Manufacture of Micropropellers by Means of Ultraprecision Milling Machine

1997 ◽  
Vol 9 (6) ◽  
pp. 475-479 ◽  
Author(s):  
Yoshimi Takeuchi ◽  
◽  
Kiyoshi Sawada ◽  
Toshio Sata ◽  
◽  
...  

The requirement for producing metallic microparts for use in micromachines and/or micromechanisms will continue to increase. This study deals with the manufacturing of tiny parts, of mm-size, using micromachining technology and an ultraprecision milling machine, which consists of a z-motion table, a positionable spindle on it as the c-rotational axis, and an x-motion table. The spindle, which has a pseudo ball end mill composed of a single crystal diamond, is mounted on the x-table. A new manufacturing procedure is devised in order to create a propeller, 3 mm in diameter, as a representative micropart, based on the CAD data of the propeller. As a result, it was found that a functional machined propeller, with a surface roughness of 0.1 μm, can be mounted onto a micromotor shaft, 0.7 mm in diameter.

1994 ◽  
Vol 354 ◽  
Author(s):  
Shuji Kiyohara ◽  
Iwao Miyamoto

AbstractIn order to apply ion beam etching with hydrogen ions to the ultra-precision processing of diamond tools, hydrogen ion beam etching characteristics of single crystal diamond chips with (100) face were investigated. The etching rate of diamond for 500 eV and 1000 eV hydrogen ions increases with the increase of the ion incidence angle, and eventually reaches a maximum at the ion incidence angle of approximately 50°, then may decrease with the increase of the ion incidence angle. The dependence of the etching rate on the ion incidence angle of hydrogen ions is fairly similar to that obtained with argon ions. Furthermore, the surface roughness of diamond chips before and after hydrogen ion beam etching was evaluated using an atomic force microscope. Consequently, the surface roughness after hydrogen ion beam etching decreases with the increase of the ion incidence angle within range of the ion incidence angle of 60°.


2019 ◽  
Vol 18 (01) ◽  
pp. 157-166 ◽  
Author(s):  
Mithun Sarkar ◽  
V. K. Jain ◽  
Ajay Sidpara

Nanofinishing of complex surfaces is an important but costly processing step for many products for performing their functions satisfactorily. This paper deals with the development of a flexible abrasive tool for nanofinishing of complex surfaces. A flexible finishing tool similar to the ball end mill is developed by curing Polydimethylsiloxane (PDMS). A bowl-shaped copper workpiece is finished to nanometer surface roughness value. Different sizes of abrasive particles are used to reduce surface roughness value of the workpiece. A corrosion inhibitor is mixed with the abrasive slurry to protect the finished copper workpiece surface. A final surface roughness value of 50[Formula: see text]nm has been achieved with a variation up to 70[Formula: see text]nm on different locations of the bowl-shaped workpiece.


2008 ◽  
Vol 2008.7 (0) ◽  
pp. 39-40
Author(s):  
Naoto ISHIDA ◽  
Toshiro SHIBASAKA ◽  
Hirofumi SUZUKI

2006 ◽  
Vol 315-316 ◽  
pp. 852-855 ◽  
Author(s):  
Cheng Yong Wang ◽  
C. Chen ◽  
Yue Xian Song

In order to achieve the smooth surface of diamond, several kinds of mixture oxidizing agents have been used to polish the single crystal diamond by a designed polishing apparatus. The existing of graphite and amorphous carbon has been found in the surface of diamond after polishing. The mechanochemical actions of oxidizing agents and the polishing iron plate have been proved. The mixture of oxidizing agents can decrease the polishing temperature so that the super-smooth surface of single crystal diamond can be achieved at lower temperature. The method provided is benefit not only to simplify polishing device and control the polishing process, but also to improve the removal rate and surface roughness.


Micromachines ◽  
2020 ◽  
Vol 11 (12) ◽  
pp. 1080
Author(s):  
Julia Heupel ◽  
Maximilian Pallmann ◽  
Jonathan Körber ◽  
Rolf Merz ◽  
Michael Kopnarski ◽  
...  

The development of quantum technologies is one of the big challenges in modern research. A crucial component for many applications is an efficient, coherent spin–photon interface, and coupling single-color centers in thin diamond membranes to a microcavity is a promising approach. To structure such micrometer thin single-crystal diamond (SCD) membranes with a good quality, it is important to minimize defects originating from polishing or etching procedures. Here, we report on the fabrication of SCD membranes, with various diameters, exhibiting a low surface roughness down to 0.4 nm on a small area scale, by etching through a diamond bulk mask with angled holes. A significant reduction in pits induced by micromasking and polishing damages was accomplished by the application of alternating Ar/Cl2 + O2 dry etching steps. By a variation of etching parameters regarding the Ar/Cl2 step, an enhanced planarization of the surface was obtained, in particular, for surfaces with a higher initial surface roughness of several nanometers. Furthermore, we present the successful bonding of an SCD membrane via van der Waals forces on a cavity mirror and perform finesse measurements which yielded values between 500 and 5000, depending on the position and hence on the membrane thickness. Our results are promising for, e.g., an efficient spin–photon interface.


2012 ◽  
Vol 565 ◽  
pp. 359-364 ◽  
Author(s):  
Masahiro Furuno ◽  
Koichi Kitajima ◽  
Takeshi Akamatsu

The results of an investigation on the effects of surface roughness on ball end mill are reported here. We used grindwheels with varying in grit between #325 and #1000 to grind ball end mill’s rake surface and flank surface, and then coated the end mill with TiAlN film, CrSiN film, and TiSiN film. We measured the state of adhesion on the films on the rake surface in continuous lathe milling as well as the surface roughness and cutting force. The results show that, in generating the cutting cutoff, the optimum grinding roughness differs between the near vicinity of the cutting-edge ridgeline and the part of the rake surface that is further away from the cutting-edge ridgeline. From that fact, we understand that the cutting characteristics of the work material and the surface area of the rake surface that is in contact with the cutting cutoff exert their respective influences during the cutting.


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