scholarly journals Experimental  Study on the  Reliability and the Precision-maintenance of the Ultra-precision Grinding Machine Based on the Key Subsystem Platforms

2021 ◽  
Author(s):  
Pengli Lei ◽  
Zhenzhong Wang ◽  
Chenchun Shi ◽  
Yunfeng Peng ◽  
Feng Lu ◽  
...  
Keyword(s):  
Large Scale ◽  
High Reliability ◽  
Large Diameter ◽  
Thermal Characteristics ◽  
Thermal Error ◽  
Poor Performance ◽  
Precision Grinding ◽  
Ultra Precision ◽  
Set Up ◽  
Grinding Machine

Abstract The development of high-reliability, high-precision large-scale CNC ultra-precision grinding machines is essential for the efficient processing and manufacturing of large-diameter optical components. In this paper, we studied the reliability and the precision-maintenance of the ultra-precision grinding machine tool experimentally. First, the subsystems with poor performance was identified based on former operating data, which turned out to be the hydrostatic spindle subsystem and the feed subsystem. Then, we set up specific experimental platforms for these two subsystems in order to study the thermal deformation and thermal characteristics. The temperature difference between the inflow and outflow oils of the hydrostatic systems is used as the key parameter to model the accuracy evolution. Our results may provide a method to reveal the relationship between the thermal characteristics and the operating parameters of the subsystems, an therefore compensate the thermal error of the whole ultra-precision grinding machine.

scholarly journals A “Double Accuracy Theory” and Experimental Research on Precision Grinding

2020 ◽  
Vol 10 (6) ◽  
pp. 2030
Author(s):  
Lai Hu ◽  
Yipeng Li ◽  
Jun Zha ◽  
Yaolong Chen
Keyword(s):  
High Speed ◽  
Coordinate Measuring Machine ◽  
Precision Grinding ◽  
Machined Parts ◽  
Accuracy Theory ◽  
Machine Theory ◽  
Ultra Precision ◽  
Measuring Machine ◽  
Grinding Machine ◽  
Multi Body

In the global machining industry, ultra-precision/ultra-high-speed machining has become a challenge, and its requirements are getting higher and higher. The challenge of precision grinding lies in the difficulty in ensuring the various dimensions and geometric accuracy of the final machined parts. This paper mainly uses the theory of a multi-body system to propose a “double accuracy” theory of manufacturing and measurement. Firstly, the grinding theory with an accuracy of 0.1 μm and the precision three-coordinate measuring machine theory with an accuracy of 0.3 μm are deduced. Secondly, the two theories are analyzed. Aiming to better explain the practicability of the “double accuracy” theory, a batch of motorized spindle parts is processed by a grinding machine. Then the precision three-coordinate measuring machine is used to measure the shape and position tolerances such as the roundness, the squareness, the flatness, and the coaxiality. The results show that the reached roundness of part A and B is 5 μm and 0.5 μm, the squareness is 3 μm and 4.5 μm, and the coaxiality tolerance is 1.2 μm, respectively.

Structural Analysis of a Grinding Machine with Linear Motion Guide Applied

2013 ◽  
Vol 336-338 ◽  
pp. 1014-1019
Author(s):  
Seon Yeol Oh ◽  
Han Seok Bang ◽  
B. Y. Choi ◽  
Woo Chun Choi ◽  
S. J. Cho
Keyword(s):  
Finite Element ◽  
Structural Analysis ◽  
Structural Design ◽  
Element Model ◽  
Linear Motion ◽  
Precision Grinding ◽  
Base Side ◽  
Ultra Precision ◽  
Linear Motion Guide ◽  
Grinding Machine

A finite element model of an ultra-precision grinding machine that can have high precision and high stiffness is constructed and structural analysis is done with equivalent stiffnesses of linear motion guides by after structural design and the deformation of the grinding machine is obtained. In order to reduce the deformation of the grinding machine that causes bad influence, structural complement is conducted by adding ribs at the lower part of the column. Also, the straightness of the grinding machine is improved by lifting that the base side of the column.

Ultra Precision Grinding of Wafer Scale

2012 ◽  
Vol 516 ◽  
pp. 257-262
Author(s):  
Martin Hünten ◽  
Fritz Klocke ◽  
Olaf Dambon ◽  
Benjamin Bulla
Keyword(s):  
Tungsten Carbide ◽  
Surface Topography ◽  
Precision Grinding ◽  
Wafer Scale ◽  
Advantages And Disadvantages ◽  
Grinding Processes ◽  
Ultra Precision ◽  
Grinding Tool ◽  
Glass Optics ◽  
Grinding Machine

Manufacturing moulds for the wafer-scale replication of precision glass optics sets new demands in terms of grinding tool lifetime and the processes to be applied. This paper will present different approaches to grinding processes and kinematics to machine wafer-scale tungsten carbide moulds with diameters of up to 100 mm and more than 100 single aspheric cavities, each featuring form accuracies in the micron range. The development of these processes will be described and advantages and disadvantages of the approaches derived from practical tests performed on an ultra precision grinding machine (Moore Nanotech 350FG) will be discussed. Finally, a comparison between the developed processes is made where achieved form accuracies and surface topography are analyzed.

Research on Block Thin Film Hydrostatic Guide Rail of Precision Grinding Machine for Optical Manufacturing

2012 ◽  
Vol 479-481 ◽  
pp. 1510-1514
Author(s):  
Tao Jiang ◽  
Yin Biao Guo
Keyword(s):  
Thin Film ◽  
Large Scale ◽  
Design Calculation ◽  
Guide Rail ◽  
Precision Grinding ◽  
Optical Lens ◽  
Stiffness Design ◽  
Grinding Machine ◽  
Optical Manufacturing

2MK-1760 is a grinding machine used in large scale optical lens manufacturing. To meet the manufacturing requirements, the block thin film hydrostatic guide rail is applied. In this paper, the structure of block thin film hydrostatic guide rail is proposed. In order to get the thickness and the stiffness, design calculation is performed. Experiments are carried out to verify that the feasibility and the validity of this technique.

Research of Ultra Precision Machining Technology

2014 ◽  
Vol 687-691 ◽  
pp. 476-479 ◽  
Author(s):  
Ya Ping Fan
Keyword(s):  
Large Scale ◽  
High Efficiency ◽  
Process Integration ◽  
New Technology ◽  
Modern Technology ◽  
Precision Machining ◽  
Measurement Technology ◽  
Precision Grinding ◽  
Online Processing ◽  
Ultra Precision

Ultra-precision machining technology is adapt to the development of modern technology a new technology of mechanical processing, the new achievement of the development of the integrated application of the mechanical technology and modern electronic technology, measurement technology and computer technology in advanced control, testing method, etc., makes a further improve the precision of machining. At present the increasing maturity of the ultra precision machining, has formed a series, it include ultra precision cutting, super precision grinding and super precision grinding and super precision special processing, etc. Ultra-precision machining to high precision, high efficiency, large-scale, miniaturization, intelligent, process integration, the integration of online processing detection, such as green direction.

Stick-Slip Simulation of Feeding System in Silicon Ultra-Precision Grinding Machine

2012 ◽  
Vol 566 ◽  
pp. 530-533
Author(s):  
Zhi Hua Sha ◽  
Shao Xing Zhang ◽  
Yi Wang ◽  
Sheng Fang Zhang
Keyword(s):  
Surface Quality ◽  
Silicon Wafer ◽  
Crystalline Silicon ◽  
Virtual Prototype ◽  
Feeding System ◽  
Precision Grinding ◽  
Stick Slip ◽  
Machining Precision ◽  
Ultra Precision ◽  
Grinding Machine

Mono-crystalline silicon is the typical substrate material in integrated circuits manufacturing, and machining precision and surface quality of the silicon wafer impacts on the quality and performance of the electronic products directly. Silicon grinding technology has high accuracy, low cost and can obtained high surface quality, which has become the mainstream of silicon ultra-precision machining. Stick-slip of feeding system in silicon ultra-precision grinding machine is an important factor which influencing the machining precision of the silicon wafer. In this paper, based on the structure analysis of feeding system in a certain type of silicon ultra-precision grinding machine, the rigid body coupling virtual prototype model of the feeding system is established using ADAMS, the factors which influencing the stick-slip is analyzed deeply via the dynamic simulation of the virtual prototype.

An Online Modeling Method for Real-Time Thermal Error Compensation on High-Speed Machines Based on RBF Neural Network Theory

2010 ◽  
Vol 455 ◽  
pp. 606-611 ◽  
Author(s):  
Hong Tao Zhang ◽  
Hui Jiang ◽  
Jian Guo Yang
Keyword(s):  
Neural Network ◽  
High Speed ◽  
Rbf Neural Network ◽  
Thermal Characteristics ◽  
Thermal Error ◽  
Modeling Method ◽  
Learning Ability ◽  
Online Modeling ◽  
Set Up ◽  
Neural Network Theory

This paper studies the modeling method based on RBF (Radial-Basis Function) neural network according to its learning ability, and a new neural network online model has been set up. The comparison and analysis result of the case studies shows that, when changing the working condition, the compensation effect of online modeling method is better than offline modeling method and the online model can better reflect the thermal characteristics of High-speed machine tool.

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