Разработка системы низкопрофильного дефлектометра комбинированных систем сканирующей зондовой и оптической микроскопии
Keyword(s):
A system of a low-profile SPM-deflectometer (SPM - scanning probe microscopy) which makes it possible to increase the aperture of the supplied objectives to the currently record value NA = 0.75 has been developed, manufactured and tested. The introduction of such a system will significantly improve the performance of optical techniques for combined SPM / optical microspectroscopy systems.
1996 ◽
Vol 13
(3-4)
◽
pp. 225-256
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2011 ◽
2011 ◽
2015 ◽