scholarly journals Preparation and gas-sensing properties of very thin sputtered NiO films

2021 ◽  
Vol 72 (1) ◽  
pp. 61-65
Author(s):  
Ivan Hotovy ◽  
Vlastimil Rehacek ◽  
Martin Kemeny ◽  
Peter Ondrejka ◽  
Ivan Kostic ◽  
...  
Keyword(s):  
Butyl Acetate ◽  
Gas Sensing ◽  
Granular Structure ◽  
Reactive Magnetron ◽  
Grain Sizes ◽  
Dc Reactive Magnetron Sputtering ◽  
Gas Sensing Properties ◽  
Different Shapes ◽  
Small Grains ◽  
Nio Films

Abstract We present results on very thin NiO films which are able to detect 3 ppm of acetone, toluene and n-butyl acetate in synthetic air and to operate at 300°C. NiO films with 25 and 50 nm thicknesses were prepared by dc reactive magnetron sputtering on alumina substrates previously coated by Pt layers as heater and as interdigitated electrodes. Annealed NiO films are indexed to the (fcc) crystalline structure of NiO and their calculated grain sizes are in the range from 22 to 27 nm. Surface morphology of the examined samples was influenced by a rough and compact granular structure of alumina substrate. Nanoporous NiO film is formed by an agglomeration of small grains with different shapes while they are created on every alumina grain.

CO2 gas sensing properties of DC reactive magnetron sputtered ZnO thin film

2014 ◽  
Vol 40 (8) ◽  
pp. 13115-13122 ◽  
Author(s):  
Padmanathan Karthick Kannan ◽  
Ramiah Saraswathi ◽  
John Bosco Balaguru Rayappan
Keyword(s):  
Thin Film ◽  
Gas Sensing ◽  
Zno Thin Film ◽  
Reactive Magnetron ◽  
Co2 Gas ◽  
Sensing Properties ◽  
Gas Sensing Properties

Optoelectronic and electrochemical properties of nickel oxide (NiO) films deposited by DC reactive magnetron sputtering

2008 ◽  
Vol 403 (21-22) ◽  
pp. 4104-4110 ◽  
Author(s):  
B. Subramanian ◽  
M. Mohamed Ibrahim ◽  
V. Senthilkumar ◽  
K.R. Murali ◽  
VS. Vidhya ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Nickel Oxide ◽  
Electrochemical Properties ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
Nio Films

Synthesis of Ag Decorated TiO2 Nanoparticles for Ammonia Gas Sensor Application

2021 ◽  
Vol 10 (3) ◽  
pp. 25-34
Author(s):  
P. Anil Kumar ◽  
T. Kalaivani ◽  
Samridhi ◽  
K. Balachandran
Keyword(s):  
Impedance Spectroscopy ◽  
Gas Sensing ◽  
Sol Gel ◽  
Gas Analysis ◽  
Tem Analysis ◽  
Ammonia Gas ◽  
Grain Sizes ◽  
Gas Sensing Properties ◽  
Nano Size ◽  
Sensing Performance

In this research, nanometer size clusters of TiO2 have been successfully synthesized through sol-gel method. Further, at different concentration of Ag were further deposited on TiO2. After successful deposition of TiO2: Ag the gas sensing performance of the sample has been studied at different exposure of NH3(ammonia) gas. Analysis has been done via XRD to evaluate the grain sizes of the nanoparticles and calculated 18 nm for TiO2 and 12 nm for 5% Ag doped TiO2. EDS has been conducted, ensured that Ag has been successfully decorated on the superficial of TiO2. The formation of nano size particles has been confirmed by TEM analysis. FTlR analysis confirmed the existence of TiO2 and Ag. The surface state emission of TiO2: Ag nanoparticles can be seen in the PL spectrum at 383 nm, 450 nm, and 465 nm. As the exposure of NH3 gas increases from 50 to 250 ppm, the impedance range displayed a decrease in semicircle radius, which was then marginally increased. The variance in resistance also contributed to the gas sensing properties due to grain boundaries, in accordance to impedance spectroscopy review.

Pulsed DC Reactive Magnetron Sputtering of AlN Thin Films on High Frequency LTCC Substrates

2003 ◽  
Vol 783 ◽  
Author(s):  
Jung W. Lee ◽  
Jerome J. Cuomo ◽  
Baxter F. Moody ◽  
Yong S. Cho ◽  
Roupen L. Keusseyan
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Crystal Orientation ◽  
Broad Band ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Pulsed Dc ◽  
Dc Reactive Magnetron Sputtering ◽  
Small Grains ◽  
Xrd Patterns

ABSTRACTThis preliminary work reports the preparation of AlN thin films on an LTCC (low temperature co-fired ceramics) substrate by pulsed dc reactive magnetron sputtering and the limited characterization focusing on microstructure and crystal orientation. The main focus will be placed on the effects of changing pulsed frequency. The AlN thin film showed good adhesion with the substrate and columnar structures having small grains regardless of pulsed frequency. The crystal orientation of AlN thin films was dependent on pulsed frequency according to the result of XRD patterns. The preferred (002) orientation was obtained at a pulsed frequency of 100 kHz. The broad band of 300 to 650 nm observed in photoluminescence spectrum was believed due to defects associated with the presence of oxygen impurities.

Preparation of WO3 Nanorods by Glancing Angle DC Reactive Magnetron Sputtering Deposition for NO2 Gas Sensing Application

2013 ◽  
Vol 770 ◽  
pp. 267-270
Author(s):  
T. Srichaiyaperk ◽  
K. Aimpanakit ◽  
M. Horprathum ◽  
S. Limwichean ◽  
C. Chananonnawathorn ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Gas Sensing ◽  
Operating Temperature ◽  
Fast Response ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Sputtering Deposition ◽  
Glancing Angle ◽  
Dc Reactive Magnetron Sputtering ◽  
Glad Technique

In this study, we present a tungsten trioxide (WO3) nanorods based gas sensor for NO2sensing at operating temperature range 150-350 °C in purify dry air carrier. WO3nanorods were fabricated by dc reactive magnetron sputtering with glancing angle deposition (GLAD) technique on silicon (100) wafer and alumina substrates interdigitated with gold electrode. The length of WO3nanorods was varied from 370 nm to 620 nm. As-deposited nanorods were annealed at a temperature of 400 °C in air for 1 h. The microstructure and phase structure of WO3nanorod were characterized by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FE-SEM), respectively. XRD of annealed WO3nanorod showed polycrystalline phase. The WO3nanorods length 420 nm exhibit excellent NO2sensing properties with a maximum sensitivity of 360 at 250 °C operating temperature with fast response and recovery time.

Annealing Temperature Dependent on Microstructure and Ethanol Gas Sensing Properties of TiO2Thin Films

2013 ◽  
Vol 770 ◽  
pp. 213-216
Author(s):  
Benjarong Samransuksamer ◽  
Worawarong Rakreungdet ◽  
Supattanapong Dumrongrattana ◽  
M. Horprathum ◽  
Pitak Eiamchai ◽  
...  
Keyword(s):  
Thin Films ◽  
Annealing Temperature ◽  
Gas Sensing ◽  
X Ray Diffraction ◽  
Temperature Dependent ◽  
Sensing Properties ◽  
Dc Reactive Magnetron Sputtering ◽  
Gas Sensing Properties ◽  
Microstructure Morphology ◽  
Deposited Films

The TiO2 thin films were prepared by a dc reactive magnetron sputtering technique from high purity Ti target on silicon (100) wafers and alumina substrates inter-digital with gold electrodes. The as-deposited films were annealed from 400°C up to 800°C with 100 °C steps for 1 hour in air ambience in order to promote microstructure, morphology and gas-sensing properties. The change in microstructure and morphology of the films were investigated by X-ray diffraction (XRD) and field emission scanning electron microscopy (FE-SEM). The enhancement in the gas-sensing properties was test by ethanol gas. The prepared thin films were exposed to ethanol gas at concentration 1,000 ppm in purify dry air carrier. The resistance was measured as a function of the ethanol concentration of the films at operated temperatures in the range of 250 - 350°C. The influence of annealing temperature at 500 °C of TiO2 thin film has a highest sensitivity at 350 °C operated temperature.

Electrical and gas sensing properties of novel cobalt(II), copper(II), manganese(III) phthalocyanines carrying ethyl 7-oxy-4,8-dimethylcoumarin-3-propanoate moieties

2018 ◽  
Vol 22 (01n03) ◽  
pp. 121-136 ◽  
Author(s):  
Baybars Köksoy ◽  
Meryem Aygün ◽  
Aylin Çapkin ◽  
Fatih Dumludağ ◽  
Mustafa Bulut
Keyword(s):  
Butyl Acetate ◽  
Gas Sensing ◽  
Response Times ◽  
Sensing Properties ◽  
Mass Spectral ◽  
H Nmr ◽  
Gas Sensing Properties ◽  
Volatile Organic ◽  
Ft Ir ◽  
Increasing Temperature

The synthesis of metallophthalocyanines (M [Formula: see text] Co, Cu, Mn) bearing four ethyl 7-oxy-4,8-dimethylcoumarin-3-propanoate moieties was performed. These novel compounds were characterized by elemental analysis, [Formula: see text]H-NMR spectroscopy, FT-IR, UV-vis and mass spectral data. DC and AC electrical properties of the films of metallophthalocyanines were investigated in the temperature range of 295–523 K. AC measurements were performed in the frequency range of 40–10[Formula: see text] Hz. Activation energy values of the films took place between 0.55 eV–0.93 eV. Impedance spectroscopy measurements revealed that bulk resistance decreases with increasing temperature, indicating semiconductor properties. DC conductivity results also supported this result. Their gas sensing properties were also investigated for the vapors of Volatile Organic Compounds (VOCs), [Formula: see text]-butyl acetate (200–3200 ppm) and ammonia (7000–56000 ppm) between temperatures 25–100°C. Sensitivity and response times of the films for the tested vapors were reported. The results were found to be reversible and sensitive to the vapors of [Formula: see text]-butyl acetate and ammonia. It was found that Mn(OAc)Pc showed better sensitivity than CoPc and CuPc for [Formula: see text]-butyl acetate vapors at all measured vapor concentrations and temperatures. Mn(OAc)Pc also showed better sensitivity than CoPc and CuPc for ammonia vapors at 22°C.

Controlled Synthesis and Gas-Sensing Properties of One Dimensional Zinc Oxide Architectures

2013 ◽  
Vol 726-731 ◽  
pp. 642-645 ◽  
Author(s):  
Ru Chen ◽  
Dan Liu ◽  
Li Xia Yuan ◽  
Dian Wu Huang
Keyword(s):  
Gas Sensing ◽  
Zno Nanorods ◽  
Hydrothermal Process ◽  
Sodium Dodecyl ◽  
One Dimensional ◽  
Zno Nanostructure ◽  
Gas Sensing Properties ◽  
Typical Morphology ◽  
Zno Powders ◽  
Different Shapes

One-dimensional (1D) ZnO nanorods with different shapes and high aspect ratio were successfully synthesized using a cetyltrimethylammonium bromide (CTAB)-assisted or sodium dodecyl sulfate (SDS)-assisted hydrothermal process at 90°C for 5h. The surface morphology and structure of nanocrystals were characterized by FE-SEM and XRD. Experimental results showed that the typical morphology of ZnO crystals grown with additive of CTAB was pencil-like rods, while the ZnO crystals grown with SDS showed needle-like rods. The gas sensors had been fabricated using 1D ZnO powders to examine the response towards 40ppm NO2 in the range of operating temperature from 150 oC to 450 oC. Compared with needle-like ZnO crystals, the NO2 gas sensor based on pencil-like ZnO nanostructure had better selectivity at the same gas concentration.

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