Tetramethylammonium Hydroxide

2021 ◽  
Keyword(s):  
Tetramethylammonium Hydroxide

The Use of TMAH to Etch Silicon and Expose Metal Bridging Failures

2000 ◽  
Author(s):  
Mark Morris ◽  
James Mohr ◽  
Esteban Ortiz ◽  
Steven Englebretson
Keyword(s):  
Failure Mechanism ◽  
Schottky Diodes ◽  
Tetramethylammonium Hydroxide ◽  
Novel Approach ◽  
Failure Location ◽  
Metal Etching ◽  
Plastic Mold

Abstract Determination of metal bridging failures on plastic encapsulated devices is difficult due to the metal etching effects that occur while removing many of the plastic mold compounds. Typically, the acids used to remove the encapsulation are corrosive to the metals that are found within the device. Thus, decapsulation can result in removal of the failure mechanism. Mechanical techniques are often not successful due to damage that results in destruction of the die and failure mechanism. This paper discusses a novel approach to these types of failures using a silicon etch and a backside evaluation. The desirable characteristics of the technique would be to remove the silicon and leave typical device metals unaffected. It would also be preferable that the device passivation and oxides not be etched so that the failure location is not disturbed. The use of Tetramethylammonium Hydroxide (TMAH), was found to fit these prerequisites. The technique was tested on clip attached Schottky diodes that exhibited resistive shorting. The use of the TMAH technique was successful at exposing thin solder bridges that extruded over the edge of the die resulting in failure.

Wet Etching Behavior of Poly-Si in TMAH Solution

2012 ◽  
Vol 195 ◽  
pp. 42-45 ◽  
Author(s):  
Hiroaki Takahashi ◽  
Masayuki Otsuji ◽  
Jim Snow ◽  
Farid Sebaai ◽  
Kenichiro Arai ◽  
...  
Keyword(s):  
Wet Etching ◽  
Tetramethylammonium Hydroxide ◽  
Process Performance ◽  
Etching Behavior ◽  
Dummy Gate ◽  
Tmah Solution

Since Tetramethylammonium Hydroxide (TMAH) became widely used as a silicon etchant, e.g. the dummy gate removal for gate-last approach (RMG) [1, or Si fin formation on FinFET [, some careful preparations and optimizations have required implementation. These adaptations have involved not only chemical-related issues, but also hardware-related in order to satisfy the necessary process performance.

Synthesis of Titanium Dioxide Nanoparticles in Natural Rubber Latex Medium

2014 ◽  
Vol 1024 ◽  
pp. 108-111 ◽  
Author(s):  
Kim Song Tan
Keyword(s):  
Titanium Dioxide ◽  
Natural Rubber ◽  
Titanium Dioxide Nanoparticles ◽  
Natural Rubber Latex ◽  
Weight Fraction ◽  
Reaction Vessel ◽  
Tetramethylammonium Hydroxide ◽  
Titanium Tetraisopropoxide ◽  
Rubber Latex ◽  
Shape And Size

The feasibility of synthesizing TiO2 nanoparticles using tetramethylammonium hydroxide (TMAOH) stabilized titanium tetraisopropoxide (TTIP) in natural rubber latex medium was investigated. The TiO2 nanoparticles were separated using centrifugation and were characterized using SEM, TEM and XRD. It was found that the weight fraction of latex loaded in the reaction vessel affects the shape and size of the TiO2 particles

A Novel Photosensitive Polyimide: A Polyimide Containing the Hydroxytriphenylamine Structure with Diazonaphthoquinone

2000 ◽  
Vol 12 (1) ◽  
pp. 177-184 ◽  
Author(s):  
Satoshi Akimoto ◽  
Mitsutoshi Jikei ◽  
Masa-aki Kakimoto
Keyword(s):  
Aqueous Solution ◽  
Phthalic Anhydride ◽  
Ring Opening ◽  
Polyimide Film ◽  
Tetramethylammonium Hydroxide ◽  
Thermal Cyclization

A novel photosensitive polyimide based on a polyimide containing the hydroxytriphenylamine structure (HTA-PI) and 2, 3, 4-tris[1-oxo-2-diazonaphthoquinone-4-sulfonyloxy] benzophenone (D4SB) as a photoreactive compound has been developed. The HTAPI was prepared by the ring-opening polyaddition of 4, 4′-hexafluoroisopropylidenebis(phthalic anhydride) (6FDA) and 4,4′-diamino-4″-hydroxytriphenylamine (DHTA), followed by thermal cyclization in refluxing N-methyl-2-pyrrolidone (NMP). The resulting polyimide film showed excellent transparency to 436 nm light. Photosensitive polyimide containing 30 wt% of D4SB showed a sensitivity of 800 mJ cm−2 and a contrast of 0.8 when it was exposed to 436 nm light followed by development with 5% tetramethylammonium hydroxide (TMAH) aqueous solution at 45°C.

scholarly journals Effect of Tetramethylammonium Hydroxide on Nucleation, Surface Modification and Growth of Magnetic Nanoparticles

2012 ◽  
Vol 2012 ◽  
pp. 1-10 ◽  
Author(s):  
Ângela L. Andrade ◽  
José D. Fabris ◽  
José D. Ardisson ◽  
Manuel A. Valente ◽  
José M. F. Ferreira
Keyword(s):  
Zeta Potential ◽  
Magnetite Nanoparticles ◽  
Heat Dissipation ◽  
Tetramethylammonium Hydroxide ◽  
Precipitation Method ◽  
Attenuated Total Reflectance ◽  
X Ray Diffraction ◽  
Experimental Conditions ◽  
Transmission Electron ◽  
Magnetite Particles

Nanoparticles of magnetite (Fe3O4) were obtained by reacting ferric chloride with sodium sulphite, through the reduction-precipitation method. The effects of adding tetramethylammonium hydroxide (TMAOH) during or after the precipitation of the iron oxide were studied in an attempt to obtain well-dispersed magnetite nanoparticles. Accordingly, the following experimental conditions were tested: (i) precipitation in absence of TMAOH (sample Mt), (ii) the same as (i) after peptizing with TMAOH (Mt1), (iii) TMAOH added to the reaction mixture during the precipitation of magnetite (Mt2). Analyses with transmission electron microscopy (TEM), X-ray diffraction, Mössbauer spectroscopy, attenuated total reflectance Fourier transform infrared spectroscopy (ATR-FTIR), zeta potential, and magnetization measurements up to 2.5 T revealed that magnetite was normally formed also in the medium containing TMAOH. The degree of particles agglomeration was monitored with laser diffraction and technique and inspection of TEM images. The relative contributions of Néel and Brownian relaxations on the magnetic heat dissipation were studied by investigating the ability of suspensions of these magnetite nanoparticles to release heat in aqueous and in hydrogel media. Based on ATR-FTIR and zeta potential data, it is suggested that the surfaces of the synthesized magnetite particles treated with TMAOH become coated with (CH3)4N+cations.

Sign in / Sign up

Export Citation Format

Share Document