Failure Analysis of the Digital Micromirror Device

2002 ◽  
Author(s):  
Cary Davis ◽  
Wes Mahin ◽  
Becky Holdford
Keyword(s):  
High Resolution ◽  
Failure Analysis ◽  
Mechanical Systems ◽  
Digital Micromirror Device ◽  
Light Modulation ◽  
High Quality ◽  
Show Evidence ◽  
Spatial Light Modulation

Abstract The Digital Micromirror Device (DMD) is a spatial light modulation Micro-Optical Electro-Mechanical Systems (MOEMS) device used in tabletop projectors, televisions and cinema projection systems. This device creates high resolution, high quality images by deflecting/modulating light with microscopic mirrors. Failure analysis of these devices requires superstructure, package, optics, and substructure approaches. Particles within the active array of a DMD are often killer defects, but those are the subjects of an entire discussion of their own. This paper will show evidence of failures associated with: windows in the package lids, failures of the superstructure area, and failures within the substructure. Methods for removal of the mirrors, as well as other structures, will be covered in greater detail. We will conclude with examples of analysis areas in DMD devices that show how they differ from other types of devices.

scholarly journals Pursuing High Quality Phase-Only Liquid Crystal on Silicon (LCoS) Devices

2018 ◽  
Vol 8 (11) ◽  
pp. 2323 ◽  
Author(s):  
Huang-Ming Chen ◽  
Jhou-Pu Yang ◽  
Hao-Ting Yen ◽  
Zheng-Ning Hsu ◽  
Yuge Huang ◽  
...  
Keyword(s):  
Liquid Crystal ◽  
High Resolution ◽  
Current Status ◽  
Driving Frequency ◽  
Light Modulation ◽  
High Definition ◽  
High Quality ◽  
Hardware Interface ◽  
Spatial Light Modulation ◽  
Liquid Crystal On Silicon

Fine pixel size and high-resolution liquid crystal on silicon (LCoS) backplanes have been developed by various companies and research groups since 1973. The development of LCoS is not only beneficial for full high definition displays but also to spatial light modulation. The high-quality and well-calibrated panels can project computer generated hologram (CGH) designs faithfully for phase-only holography, which can be widely utilized in 2D/3D holographic video projectors and components for optical telecommunications. As a result, we start by summarizing the current status of high-resolution panels, followed by addressing issues related to the driving frequency (i.e., liquid crystal response time and hardware interface). LCoS panel qualities were evaluated based on the following four characteristics: phase linearity control, phase precision, phase stability, and phase accuracy.

High-resolution spatial light modulation with distributed photorefractive devices

1998 ◽  
Vol 10 (2) ◽  
pp. 221-223 ◽  
Author(s):  
E. Canoglu ◽  
P. Tayebati ◽  
C. Hantzis ◽  
A. Jehanno ◽  
R.N. Sacks
Keyword(s):  
High Resolution ◽  
Light Modulation ◽  
Spatial Light Modulation

A High Resolution Scanning Microscope

1968 ◽  
Vol 26 ◽  
pp. 356-357
Author(s):  
A. V. Crewe ◽  
J. Wall ◽  
L. M. Welter
Keyword(s):  
High Resolution ◽  
Field Emission ◽  
Spherical Aberration ◽  
Focal Length ◽  
Spot Size ◽  
Emission Source ◽  
Field Of View ◽  
Scanning Microscope ◽  
Magnetic Lens ◽  
High Quality

A scanning microscope using a field emission source has been described elsewhere. This microscope has now been improved by replacing the single magnetic lens with a high quality lens of the type described by Ruska. This lens has a focal length of 1 mm and a spherical aberration coefficient of 0.5 mm. The final spot size, and therefore the microscope resolution, is limited by the aberration of this lens to about 6 Å.The lens has been constructed very carefully, maintaining a tolerance of + 1 μ on all critical surfaces. The gun is prealigned on the lens to form a compact unit. The only mechanical adjustments are those which control the specimen and the tip positions. The microscope can be used in two modes. With the lens off and the gun focused on the specimen, the resolution is 250 Å over an undistorted field of view of 2 mm. With the lens on,the resolution is 20 Å or better over a field of view of 40 microns. The magnification can be accurately varied by attenuating the raster current.

SEM-Based Nanoprobing on 40, 32 and 28 nm CMOS Devices Challenges for Semiconductor Failure Analysis

2013 ◽  
Author(s):  
Erik Paul ◽  
Holger Herzog ◽  
Sören Jansen ◽  
Christian Hobert ◽  
Eckhard Langer
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Scanning Electron Microscope ◽  
Failure Analysis ◽  
Case Studies ◽  
State Of The Art ◽  
Root Cause ◽  
Highly Efficient ◽  
Technology Nodes ◽  
Scanning Electron

Abstract This paper presents an effective device-level failure analysis (FA) method which uses a high-resolution low-kV Scanning Electron Microscope (SEM) in combination with an integrated state-of-the-art nanomanipulator to locate and characterize single defects in failing CMOS devices. The presented case studies utilize several FA-techniques in combination with SEM-based nanoprobing for nanometer node technologies and demonstrate how these methods are used to investigate the root cause of IC device failures. The methodology represents a highly-efficient physical failure analysis flow for 28nm and larger technology nodes.

Aeromagnetic survey in central West Greenland: project Aeromag 2001

2002 ◽  
pp. 67-72 ◽  
Author(s):  
Thorkild M. Rasmussen
Keyword(s):  
High Resolution ◽  
Magnetic Measurements ◽  
Geophysical Data ◽  
High Quality ◽  
Aeromagnetic Survey ◽  
Original Series ◽  
West Greenland ◽  
Airborne Measurements ◽  
Geophysical Surveys ◽  
Airborne Geophysical Data

NOTE: This article was published in a former series of GEUS Bulletin. Please use the original series name when citing this article. Rasmussen, T. M. (1). Aeromagnetic survey in central West Greenland: project Aeromag 2001. Geology of Greenland Survey Bulletin, 191, 67-72. https://doi.org/10.34194/ggub.v191.5130 The series of government-funded geophysical surveys in Greenland was continued during the spring and summer of 2001 with a regional aeromagnetic survey north of Uummannaq, project Aeromag 2001 (Fig. 1). The survey added about 70 000 line kilometres of high-quality magnetic measurements to the existing database of modern airborne geophysical data from Greenland. This database includes both regional high-resolution aeromagnetic surveys and detailed surveys with combined electromagnetic and magnetic airborne measurements.

scholarly journals PCDRN: Progressive Cascade Deep Residual Network for Pansharpening

2020 ◽  
Vol 12 (4) ◽  
pp. 676 ◽  
Author(s):  
Yong Yang ◽  
Wei Tu ◽  
Shuying Huang ◽  
Hangyuan Lu
Keyword(s):  
High Resolution ◽  
Loss Function ◽  
High Frequency ◽  
Experimental Results ◽  
Superior Performance ◽  
Residual Network ◽  
High Quality ◽  
Convolution Approach ◽  
Visual Assessments ◽  
Coarse To Fine

Pansharpening is the process of fusing a low-resolution multispectral (LRMS) image with a high-resolution panchromatic (PAN) image. In the process of pansharpening, the LRMS image is often directly upsampled by a scale of 4, which may result in the loss of high-frequency details in the fused high-resolution multispectral (HRMS) image. To solve this problem, we put forward a novel progressive cascade deep residual network (PCDRN) with two residual subnetworks for pansharpening. The network adjusts the size of an MS image to the size of a PAN image twice and gradually fuses the LRMS image with the PAN image in a coarse-to-fine manner. To prevent an overly-smooth phenomenon and achieve high-quality fusion results, a multitask loss function is defined to train our network. Furthermore, to eliminate checkerboard artifacts in the fusion results, we employ a resize-convolution approach instead of transposed convolution for upsampling LRMS images. Experimental results on the Pléiades and WorldView-3 datasets prove that PCDRN exhibits superior performance compared to other popular pansharpening methods in terms of quantitative and visual assessments.

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