A Study of Electron Beam Irradiation Influence on Device Contact Junction Characteristics of Advanced DRAM Using Atomic Force Probing

2013 ◽  
Author(s):  
Wei-Chih Wang ◽  
Jian-Shing Luo
Keyword(s):  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Forward Bias ◽  
Irradiation Damage ◽  
Beam Irradiation ◽  
Excess Current ◽  
Atomic Force ◽  
Order Of Magnitude ◽  
Voltage Contrast ◽  
Acceleration Voltage

Abstract In this paper, we revealed p+/n-well and n+/p-well junction characteristic changes caused by electron beam (EB) irradiation. Most importantly, we found a device contact side junction characteristic is relatively sensitive to EB irradiation than its whole device characteristic; an order of magnitude excess current appears at low forward bias region after 1kV EB acceleration voltage irradiation (Vacc). Furthermore, these changes were well interpreted by our Monte Carlo simulation results, the Shockley-Read Hall (SRH) model and the Generation-Recombination (G-R) center trap theory. In addition, four essential examining items were suggested and proposed for EB irradiation damage origins investigation and evaluation. Finally, by taking advantage of the excess current phenomenon, a scanning electron microscope (SEM) passive voltage contrast (PVC) fault localization application at n-FET region was also demonstrated.

Surface structure, nanocrystallite and defects in (ZrTi)CN nanocomposite irradiated by electron beam

2021 ◽  
pp. 2150111
Author(s):  
M. Yu. Tashmetov ◽  
I. I. Yuldashova ◽  
N. B. Ismatov
Keyword(s):  
Electron Beam ◽  
Surface Structure ◽  
Electron Beam Irradiation ◽  
Rietveld Method ◽  
Nanocomposite Coating ◽  
Beam Irradiation ◽  
X Ray ◽  
Nanocrystallite Size ◽  
Atomic Force ◽  
Cubic Structure

Effect of 2 MeV electron beam at the current density 0.09 nA/cm2 on surface structure, nanocrystallite size of (ZrTi)CN nanocomposite coating on steel was investigated at Scanning Electron and Atomic Force microscopes, and also X-ray diffractometer. Using the Rietveld method, two structure phases were indentified in the pristine samples: (ZrTi)(CN)-cubic (space group Fm-3m) and TiC — trigonal (sp.gr.R-3m). Electron beam irradiation to the fluency of [Formula: see text] electron/cm2 resulted in the phase transition of TiC from trigonal (sp.gr.R-3m) to cubic structure (sp.gr.Fm-3m). Besides, nanocrystallite size and shape have changed after the fluency [Formula: see text] electron/cm2. The lattice parameters have increased up to [Formula: see text] electron/cm2 fluence and the nanorcrystallite size of nanocomposite was enlarged 26%, which was attributed to generation of defects.

Hypoxic environment protects cowpea bruchid (Callosobruchus maculatus) from electron beam irradiation damage

2018 ◽  
Vol 75 (3) ◽  
pp. 726-735 ◽  
Author(s):  
Lei Wang ◽  
Weining Cheng ◽  
Jia Meng ◽  
Mickey Speakmon ◽  
Jiangping Qiu ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Callosobruchus Maculatus ◽  
Irradiation Damage ◽  
Beam Irradiation ◽  
Hypoxic Environment ◽  
Cowpea Bruchid

Effect of electron-beam irradiation temperature on irradiation damage of high Mn–Cr steel

2004 ◽  
Vol 329-333 ◽  
pp. 1038-1042 ◽  
Author(s):  
D.S Bae ◽  
S.H Nahm ◽  
H.M Lee ◽  
H Kinoshita ◽  
T Shibayama ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Irradiation Temperature ◽  
Irradiation Damage ◽  
Beam Irradiation

Irradiation Damage of Electron-Beam on High-Power AlInGaP Red LED

2011 ◽  
Vol 415-417 ◽  
pp. 1297-1301
Author(s):  
Rui Bin Zhang ◽  
Yi Ping Huang ◽  
Hai Lang Liu ◽  
Zhi Guo Peng
Keyword(s):  
Electron Beam ◽  
High Power ◽  
Electron Beam Irradiation ◽  
Optical Parameter ◽  
Elastic Collision ◽  
Luminous Flux ◽  
Experimental Result ◽  
Irradiation Damage ◽  
Beam Irradiation ◽  
Red Led

In this paper, experimental results and Monte Carlo simulation methods used to study irradiation damage of Electron-beam on high-power AlInGaP red LED. The electron beam range and distribution of energy loss in the LED chip are analyzed by CASINO program in detail, the high-power AlInGaP red LED is irradiated by different energy and dose of electron beam irradiation produced by the low energy electron beam irradiation equipment. We contrast the optical parameter of the irradiated LED with the unirradiated LED. The experimental result is analyzed and discussed by the mechanism of electron beam irradiation. The results show that: the luminous flux and power change of the irradiated and unirradiated LED are showed by dose-response. In process of irradiation, the elastic collision and ionization are occurred between the incident particles and atoms within the material, which cause defect in the internal structure of the AlInGaP material and form the color centers.

Effect of He-Injection on Irradiation Damage of High Mn-Cr Steel

2005 ◽  
Vol 475-479 ◽  
pp. 1425-1428
Author(s):  
Dong Su Bae ◽  
Sang Ll Lee ◽  
Seung Hoon Nahm ◽  
J.W. Choi ◽  
H. Takahashi
Keyword(s):  
Electron Beam ◽  
Grain Boundary ◽  
Electron Beam Irradiation ◽  
Boundary Migration ◽  
Void Formation ◽  
Irradiation Damage ◽  
Irradiation Condition ◽  
Beam Diameter ◽  
Beam Irradiation ◽  
Dual Beam

The high Mn-Cr austenitic steel for structure material of nuclear and/or fusion reactors from the point of view of the reduced radio-activation has been irradiated by using three irradiation modes of electron-beam irradiation, electron-beam irradiation after He-injection and electron/He+-ion dual-beam irradiation in 1250kV high voltage electron microscope (HVEM) connected with an ion accelerators to study the effect of He-injection on irradiation damage. Irradiation-induced segregation analyses were carried out by an energy dispersive X-ray analyzer (EDX) in a 200kV FE-TEM with beam diameter of about 0.5nm. Void formation was not observed in each irradiation condition. Grain boundary migration was observed in the case of electron/He+-ion dual-beam irradiation. Irradiation-induced segregations of Cr and Mn at grain boundary were observed in each irradiation condition. The amounts of Cr and Mn segregation decreased in the cases of electron-beam irradiation after He-injection compared with other irradiation conditions.

scholarly journals Effect of Electron Beam Irradiation on Polymers

2018 ◽  
Vol 5 (1) ◽  
pp. 24-33 ◽  
Author(s):  
Pradeep Singh ◽  
B R Venugopal ◽  
D R Nandini
Keyword(s):  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Irradiation Damage ◽  
Beam Irradiation ◽  
Electron Dose ◽  
Spatially Resolved ◽  
Transmission Electron ◽  
Depth Analysis ◽  
The Stability ◽  
Electron Energy Loss

Electron energy loss spectroscopy (EELS) in combination with transmission electron microscopy (TEM) is widely used for chemical state analysis of variety of chemical compounds. High beam sensitivity of substances like polymers hinders the possibility of exploring in-depth analysis provided through the high spatially resolved EELS spectroscopy. In this study, the electron beam irradiation damage on polymers were analyzed with varying dose of electron beams. The stability of the polymers under electron beam exposure depends on the chemical structure on the polymers. In this study the polymers with and without phenyl groups namely Polycarbonate, Polyethylene terephthalate, Polystyrene, Styrene Maleic Anhydride and Polymethylmethacrylate are selected for the comparative degradation study. Effect of varying the electron dose on the stability of polymers were monitored by recording the low-loss EELS spectrum in π to π* transition and (π+σ) to (π+σ)* transition region.

Quantitative estimation of electron beam irradiation damage of polyethylene single crystal using imaging plate

1992 ◽  
Vol 50 (1) ◽  
pp. 382-383
Author(s):  
T. Oikawa ◽  
D. Shindo ◽  
J. Kudoh ◽  
S. Aita ◽  
M. Kersker
Keyword(s):  
Electron Beam ◽  
Single Crystal ◽  
Electron Beam Irradiation ◽  
Quantitative Estimation ◽  
Irradiation Damage ◽  
Imaging Plate ◽  
Beam Irradiation ◽  
Polyethylene Single Crystal ◽  
Diffraction Patterns ◽  
Intensity Fading

The degree of electron beam irradiation damage is estimated from the intensity fading of diffraction spots and the lattice spacing increase of the specimen. Previously, qualitative estimatin of the damage was made for beam-sensitive specimens, e.g., polymers and biomolecules. In the present study, the degree of irradiation damage was estimated by quantitative measurement of the intensity of electron diffraction patterns, using the Imaging Plate (IP). Polyethylene single crystal, which is a typical material for polymers, was used as a specimen.

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