Resist Hardening by Electron Beam Irradiation Analyzed by Atomic Force Microscope.

Abstract In this paper, we revealed p+/n-well and n+/p-well junction characteristic changes caused by electron beam (EB) irradiation. Most importantly, we found a device contact side junction characteristic is relatively sensitive to EB irradiation than its whole device characteristic; an order of magnitude excess current appears at low forward bias region after 1kV EB acceleration voltage irradiation (Vacc). Furthermore, these changes were well interpreted by our Monte Carlo simulation results, the Shockley-Read Hall (SRH) model and the Generation-Recombination (G-R) center trap theory. In addition, four essential examining items were suggested and proposed for EB irradiation damage origins investigation and evaluation. Finally, by taking advantage of the excess current phenomenon, a scanning electron microscope (SEM) passive voltage contrast (PVC) fault localization application at n-FET region was also demonstrated.

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Surface structure, nanocrystallite and defects in (ZrTi)CN nanocomposite irradiated by electron beam

International Journal of Modern Physics B ◽

10.1142/s0217979221501113 ◽

2021 ◽

pp. 2150111

Author(s):

M. Yu. Tashmetov ◽

I. I. Yuldashova ◽

N. B. Ismatov

Keyword(s):

Electron Beam ◽

Surface Structure ◽

Electron Beam Irradiation ◽

Rietveld Method ◽

Nanocomposite Coating ◽

Beam Irradiation ◽

X Ray ◽

Nanocrystallite Size ◽

Atomic Force ◽

Cubic Structure

Effect of 2 MeV electron beam at the current density 0.09 nA/cm2 on surface structure, nanocrystallite size of (ZrTi)CN nanocomposite coating on steel was investigated at Scanning Electron and Atomic Force microscopes, and also X-ray diffractometer. Using the Rietveld method, two structure phases were indentified in the pristine samples: (ZrTi)(CN)-cubic (space group Fm-3m) and TiC — trigonal (sp.gr.R-3m). Electron beam irradiation to the fluency of [Formula: see text] electron/cm2 resulted in the phase transition of TiC from trigonal (sp.gr.R-3m) to cubic structure (sp.gr.Fm-3m). Besides, nanocrystallite size and shape have changed after the fluency [Formula: see text] electron/cm2. The lattice parameters have increased up to [Formula: see text] electron/cm2 fluence and the nanorcrystallite size of nanocomposite was enlarged 26%, which was attributed to generation of defects.

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Effects of electron beam irradiation on a Ag/AsS2 bilayer using conductive atomic force microscopy

Thin Solid Films ◽

10.1016/j.tsf.2021.138747 ◽

2021 ◽

pp. 138747

Author(s):

Jānis Sniķeris ◽

Vjaceslavs Gerbreders

Keyword(s):

Atomic Force Microscopy ◽

Electron Beam ◽

Electron Beam Irradiation ◽

Beam Irradiation ◽

Conductive Atomic Force Microscopy ◽

Force Microscopy ◽

Atomic Force

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Methods to Monitor and Improve the Performance of Specimen Holders for Transmission Electron Cryomicroscopy

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100164738 ◽

1996 ◽

Vol 54 ◽

pp. 454-455

Author(s):

B. L. Armbruster ◽

B. Kraus ◽

M. Pan

Keyword(s):

Electron Microscopy ◽

Electron Beam ◽

Electron Beam Irradiation ◽

Beam Irradiation ◽

Quality Of Data ◽

Electron Cryomicroscopy ◽

Thermal Equilibration ◽

Transmission Electron ◽

Electron Microscopes

One goal in electron microscopy of biological specimens is to improve the quality of data to equal the resolution capabilities of modem transmission electron microscopes. Radiation damage and beam- induced movement caused by charging of the sample, low image contrast at high resolution, and sensitivity to external vibration and drift in side entry specimen holders limit the effective resolution one can achieve. Several methods have been developed to address these limitations: cryomethods are widely employed to preserve and stabilize specimens against some of the adverse effects of the vacuum and electron beam irradiation, spot-scan imaging reduces charging and associated beam-induced movement, and energy-filtered imaging removes the “fog” caused by inelastic scattering of electrons which is particularly pronounced in thick specimens.Although most cryoholders can easily achieve a 3.4Å resolution specification, information perpendicular to the goniometer axis may be degraded due to vibration. Absolute drift after mechanical and thermal equilibration as well as drift after movement of a holder may cause loss of resolution in any direction.

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