Failure Localization of an Electrical Transient Behavior on a Mixed-Mode IC by Using Static Emission Microscopy Technique
Keyword(s):
Abstract This paper presents a case study on reliability reject on a Freescale mixed-mode IC. It focuses on a novel use of one of most frequently used failure localization techniques: static emission microscopy (EMMI) to localize a failure due to an electrical transient behavior. This work helped Freescale to identify a wafer fab process limitation and contributed to test improvement.
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2002 ◽
Vol 95
(2)
◽
pp. 210-220
◽
2004 ◽
Vol 41
(4)
◽
pp. 297-306
◽
2009 ◽
Vol 631-632
◽
pp. 109-114