FIB Enhancement of Mechanically Polished Cross-sections
Keyword(s):
Ion Beam
◽
Abstract On mechanically polished cross-sections, getting a surface adequate for high-resolution imaging is sometimes beyond the analyst’s ability, due to material smearing, chipping, polishing media chemical attack, etc.. A method has been developed to enable the focused ion beam (FIB) to re-face the section block and achieve a surface that can be imaged at high resolution in the scanning electron microscope (SEM).
A Study on Biological Sample Preparation for High Resolution Imaging of Scanning Electron Microscope
2020 ◽
Vol 1447
◽
pp. 012034