High Resolution Imaging by Means of Backscattered Electrons in the Scanning Electron Microscope

Author(s):  
Petr Wandrol ◽  
Jiřina Matějková ◽  
Antonín Rek
Author(s):  
Becky Holdford

Abstract On mechanically polished cross-sections, getting a surface adequate for high-resolution imaging is sometimes beyond the analyst’s ability, due to material smearing, chipping, polishing media chemical attack, etc.. A method has been developed to enable the focused ion beam (FIB) to re-face the section block and achieve a surface that can be imaged at high resolution in the scanning electron microscope (SEM).


2020 ◽  
Vol 1447 ◽  
pp. 012034
Author(s):  
Siti Rahmah Aid ◽  
Nik Nur Anis Awadah Nik Zain ◽  
Nur Nadhirah Mohd Rashid ◽  
Hirofumi Hara ◽  
Kamyar Shameli ◽  
...  

1996 ◽  
Vol 4 (3) ◽  
pp. 18-19
Author(s):  
Janet Tashima ◽  
Jay Lindquist

The cutting-edge tool for IC fab support and defect review brings together the Focused Ion Beam (FIB) technology with the Scanning Electron Microscope (SEM) into a single workstation. The twin beam FIB/SEM workstation, FEI Company's DualBeam™ 820 for example, combines the unique micromachining, microdeposition, and analysis capabilities of a FIB with the high resolution imaging power of a Schottky field emission scanning electron microscope (FE SEM). The full functionality of both instruments is available and neither is compromised by the other.


2011 ◽  
Vol 19 (5) ◽  
pp. 22-25 ◽  
Author(s):  
Dominik Greif ◽  
Daniel Wesner ◽  
Dario Anselmetti ◽  
Jan Regtmeier

When studying highly resolved scanning electron microscope images of cell surfaces, the question arises, whether the observed patterns are real or just artifacts of the cell preparation process. The following steps are usually necessary for preparation: fixation, drying, and metal coating. Each step might introduce different artifacts. Clever techniques have been developed to dry cells as gently as possible, for example critical point drying with different organic solvents and CO2. Instrument manufacturers also have taken account of this issue, for example, through the realization of the environmental scanning electron microscope (ESEM), operating with a low-vacuum environment saturated with water so that samples might stay hydrated. Another approach is the extreme high-resolution scanning electron microscope (XHR SEM), where the electron beam is decelerated shortly before reaching the sample. This technique requires no metal coating of the sample. Cryo-SEM also may be used, where no sample preparation is required beyond freezing in a high-pressure freezer or other cryo-fixation device. Then the cell can be examined in the frozen, hydrated state using a cryostage. However, at least some kind of preparation is necessary for SEM imaging, and we wanted to find out what changes the preparation makes on the cell surface.


2017 ◽  
Vol 888 ◽  
pp. 234-238 ◽  
Author(s):  
Izwan Johari ◽  
Amri Hamid ◽  
Shah Rizal Kasim ◽  
Zainal Arifin Ahmad

Abstract. Coated Expanded polystyrene (CEPS) mortar is a new lightweight building material that demonstrate a good mechanical properties by improving it interfacial bonding properties. By using the field emission scanning electron microscope (FESEM) with high resolution imaging, the mortar morphology at different ages (7, 14 and 28 days) can be observed. The results shows that coated EPS bead provide a good bonding as there is no gap in the interfacial surface at 28 days.


1999 ◽  
Vol 5 (S2) ◽  
pp. 322-323
Author(s):  
J.M. Krans ◽  
T.L. van Rooy

Miniaturization of electron optical systems has gained much interest over the last decade [1,2]. In a scanning electron microscope, downscaling of the column dimensions is expected to allow for high resolution imaging at low electron beam voltage. Main advantages of low voltage imaging are lower penetration depth, increased secondary electron yield, less specimen charging and better topographic contrast [3].We have developed a miniature scanning electron microscope (SEM) with high resolution at low beam energies. The outer dimensions of the miniaturized SEM column are 25 mm diameter and 95 mm length, including conventional field emitter electron source module. The column prototype is shown in Fig. 1. The size reduction has been achieved by the exclusive implementation of electrostatic column components. Electron optical simulations indicate that the retarding objective lens of the miniature SEM allows for a probe resolution of 3 nm at 1 keV beam energy. The secondary electrons are collected at an internal scintillator detector.


Author(s):  
S. Saito ◽  
H. Todokoro ◽  
S. Nomura ◽  
T. Komoda

Field emission scanning electron microscope (FESEM) features extremely high resolution images, and offers many valuable information. But, for a specimen which gives low contrast images, lateral stripes appear in images. These stripes are resulted from signal fluctuations caused by probe current noises. In order to obtain good images without stripes, the fluctuations should be less than 1%, especially for low contrast images. For this purpose, the authors realized a noise compensator, and applied this to the FESEM.Fig. 1 shows an outline of FESEM equipped with a noise compensator. Two apertures are provided gust under the field emission gun.


Author(s):  
David Joy ◽  
James Pawley

The scanning electron microscope (SEM) builds up an image by sampling contiguous sub-volumes near the surface of the specimen. A fine electron beam selectively excites each sub-volume and then the intensity of some resulting signal is measured. The spatial resolution of images made using such a process is limited by at least three factors. Two of these determine the size of the interaction volume: the size of the electron probe and the extent to which detectable signal is excited from locations remote from the beam impact point. A third limitation emerges from the fact that the probing beam is composed of a finite number of discrete particles and therefore that the accuracy with which any detectable signal can be measured is limited by Poisson statistics applied to this number (or to the number of events actually detected if this is smaller).


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