Effect of the deposition temperature and a hydrogen post-annealing treatment on the structural, electrical, and optical properties of Ga-doped ZnO films

2009 ◽  
Vol 5 (3) ◽  
pp. 127-133 ◽  
Author(s):  
Min-Jung Lee ◽  
Tae-Il Lee ◽  
Jinhyong Lim ◽  
Jungsik Bang ◽  
Woong Lee ◽  
...  
Keyword(s):  
Optical Properties ◽  
Deposition Temperature ◽  
Annealing Treatment ◽  
Zno Films ◽  
Electrical And Optical Properties ◽  
Post Annealing ◽  
Doped Zno

Effects of As Doping on Properties of ZnO Films

2001 ◽  
Vol 692 ◽  
Author(s):  
K. S. Huh ◽  
D. K. Hwang ◽  
K. H. Bang ◽  
M. K. Hong ◽  
D. H. Lee ◽  
...  
Keyword(s):  
Optical Properties ◽  
Secondary Ion Mass Spectrometry ◽  
Annealing Treatment ◽  
Zno Films ◽  
X Ray Diffraction ◽  
Electrical And Optical Properties ◽  
As Doping ◽  
Dopant Atoms ◽  
Increasing Temperature ◽  
Secondary Ion

AbstractA series of ZnO thin films with various deposition temperatures were prepared on (100) GaAs substrates by radio-frequency magnetron sputtering using ZnO target. The ZnO films were studied by field emission scanning electron microscope(FESEM), x-ray diffraction(XRD), photoluminescence(PL), cathodoluminescence(CL), and Hall measurements. The structural, optical, and electrical properties of the films were discussed as a function of the deposition temperature. With increasing temperature, the compressive stress in the films was released and their crystalline and optical properties were improved. From the depth profile of As measured by secondary ion mass spectrometry(SIMS), As doping was confirmed, and, in order to activate As dopant atoms, post-annealing treatment was performed. After annealing treatment, electrical and optical properties of the films were changed.

Effects of annealing conditions and film thickness on electrical and optical properties of epitaxial Al-doped ZnO films

2016 ◽  
Vol 599 ◽  
pp. 19-26 ◽  
Author(s):  
S. Kuprenaite ◽  
A. Abrutis ◽  
V. Kubilius ◽  
T. Murauskas ◽  
Z. Saltyte ◽  
...  
Keyword(s):  
Optical Properties ◽  
Film Thickness ◽  
Zno Films ◽  
Electrical And Optical Properties ◽  
Annealing Conditions ◽  
Doped Zno

Electrical and Optical Properties of Ga-Doped ZnO Films Grown on Glass and Plastic Substrates by Using Plasma-Assisted Deposition

2008 ◽  
Vol 53 (9(5)) ◽  
pp. 2947-2950 ◽  
Author(s):  
T. Muranaka ◽  
A. Nisii ◽  
T. Uehara ◽  
T. Sakano ◽  
Y. Nabetani ◽  
...  
Keyword(s):  
Optical Properties ◽  
Zno Films ◽  
Electrical And Optical Properties ◽  
Plastic Substrates ◽  
Doped Zno

Structural, electrical, and optical properties of hydrogen-doped ZnO films

2012 ◽  
Vol 86 (11) ◽  
Author(s):  
Achim Kronenberger ◽  
Angelika Polity ◽  
Detlev M. Hofmann ◽  
Bruno K. Meyer ◽  
André Schleife ◽  
...  
Keyword(s):  
Optical Properties ◽  
Zno Films ◽  
Electrical And Optical Properties ◽  
Doped Zno
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