scholarly journals Fabrication of Diamond Submicron Lenses and Cylinders by ICP Etching Technique with SiO2 Balls Mask

Materials ◽  
2019 ◽  
Vol 12 (10) ◽  
pp. 1622 ◽  
Author(s):  
Zongchen Liu ◽  
Tian-Fei Zhu ◽  
Yan-Feng Wang ◽  
Irfan Ahmed ◽  
Zhangcheng Liu ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Coupling Efficiency ◽  
Nitrogen Vacancy ◽  
Diamond Surface ◽  
Etching Technique ◽  
Inductively Coupled ◽  
Icp Etching ◽  
Nitrogen Vacancy Center ◽  
Submicron Structures ◽  
Vacancy Center

Submicron lenses and cylinders exhibiting excellent properties in photodetector and quantum applications have been fabricated on a diamond surface by an inductively-coupled plasma (ICP) etching technique. During ICP etching, a layer containing 500 nm diameter balls of SiO2 was employed as mask. By changing the mixing ratio of O2, Ar and CF4 during ICP etching, several submicron structures were fabricated, such as cylinders and lenses. The simulation results demonstrated that such submicron structures on a diamond’s surface can greatly enhance the photon out-coupling efficiency of embedded nitrogen-vacancy center.

scholarly journals Nanocone Structures Enhancing Nitrogen-Vacancy Center Emissions in Diamonds

Coatings ◽  
2020 ◽  
Vol 10 (6) ◽  
pp. 513
Author(s):  
Tianfei Zhu ◽  
Yan Liang ◽  
Zongchen Liu ◽  
Jiao Fu ◽  
Yanfeng Wang ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Inductively Coupled Plasma ◽  
Gold Film ◽  
Nitrogen Vacancy ◽  
Diamond Surfaces ◽  
Inductively Coupled Plasma Etching ◽  
Inductively Coupled ◽  
Nitrogen Vacancy Center ◽  
Nitrogen Vacancy Centers ◽  
Vacancy Center

In this study, nitrogen-vacancy center emissions from nanocone structures fabricated on diamond surfaces by gold film annealing and inductively coupled plasma etching techniques were characterized. First, the diamond substate deposited with gold film was annealed to form a nano-sized dot mask. Second, through inductively coupled plasma etching, nanocone-shaped structures were fabricated using optimized gold dots as masks. Finally, the as-fabricated nanocone and planar structures were investigated with photoluminescence experiments at temperatures ranging from room temperature to 80 K, with the results showing approximately two-fold higher emission values for nitrogen-vacancy centers from nanocones.

Vacancy diffusion and nitrogen-vacancy center formation near the diamond surface

2021 ◽  
Vol 118 (20) ◽  
pp. 204003
Author(s):  
P. Räcke ◽  
L. Pietzonka ◽  
J. Meijer ◽  
D. Spemann ◽  
R. Wunderlich
Keyword(s):  
Nitrogen Vacancy ◽  
Diamond Surface ◽  
Vacancy Diffusion ◽  
Nitrogen Vacancy Center ◽  
Vacancy Center

Study of Mesa Etching for Infrared Detector Based on InAs/GaSb Superlattice

2013 ◽  
Vol 760-762 ◽  
pp. 137-140 ◽  
Author(s):  
Jie Guo ◽  
Rui Ting Hao ◽  
Qian Run Zhao ◽  
Shi Qing Man
Keyword(s):  
Inductively Coupled Plasma ◽  
Infrared Detector ◽  
Etching Rate ◽  
Etching Time ◽  
Rf Power ◽  
Etching Technique ◽  
Inductively Coupled ◽  
Icp Etching ◽  
Surface Leakage ◽  
Photovoltaic Detector

InAs/GaSb superlattice in infrared detector was grown on GaSb substrates by molecular beam epitaxy technique. Using inductively coupled plasma (ICP) etching technique and Cl2/Ar etching gas, the smooth mesa of the device was formed. The influence of etching time, Cl2 percent and RF power on the etching rate and the surface morphology of InAs bulk, GaSb bulk materials and superlattice were studied. It showed that the etching rate of InAs was lower than that of GaSb and the etching surface was smooth at Cl2 in the range of 20%~40%. The results will benefit to forming ohm contact and decrease surface leakage current in the photovoltaic detector.

Vector magnetometry using perfectly aligned nitrogen-vacancy center ensemble in diamond

2021 ◽  
Vol 118 (26) ◽  
pp. 264002
Author(s):  
Moeta Tsukamoto ◽  
Kensuke Ogawa ◽  
Hayato Ozawa ◽  
Takayuki Iwasaki ◽  
Mutsuko Hatano ◽  
...  
Keyword(s):  
Nitrogen Vacancy ◽  
Nitrogen Vacancy Center ◽  
Vacancy Center

Hybrid communication assisted by coherent oscillator using resonant excitation of Nitrogen-vacancy center in diamond

2021 ◽  
pp. 127073
Author(s):  
Faisal Nadeem ◽  
Faizan Raza ◽  
Kangkang Li ◽  
Huanrong Fan ◽  
Irfan Ahmed ◽  
...  
Keyword(s):  
Resonant Excitation ◽  
Nitrogen Vacancy ◽  
Nitrogen Vacancy Center ◽  
Vacancy Center

scholarly journals Solar-blind ultraviolet photodetector based on vertically aligned single-crystalline β-Ga2O3 nanowire arrays

Nanophotonics ◽  
2020 ◽  
Vol 9 (15) ◽  
pp. 4497-4503
Author(s):  
Liying Zhang ◽  
Xiangqian Xiu ◽  
Yuewen Li ◽  
Yuxia Zhu ◽  
Xuemei Hua ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Light Trapping ◽  
High Surface ◽  
Volume Ratio ◽  
Average Diameter ◽  
Nanowire Arrays ◽  
Etching Technique ◽  
Inductively Coupled ◽  
Solar Blind ◽  
Vertically Aligned

AbstractVertically aligned nanowire arrays, with high surface-to-volume ratio and efficient light-trapping absorption, have attracted much attention for photoelectric devices. In this paper, vertical β-Ga2O3 nanowire arrays with an average diameter/height of 110/450 nm have been fabricated by the inductively coupled plasma etching technique. Then a metal-semiconductor-metal structured solar-blind photodetector (PD) has been fabricated by depositing interdigital Ti/Au electrodes on the nanowire arrays. The fabricated β-Ga2O3 nanowire PD exhibits ∼10 times higher photocurrent and responsivity than the corresponding film PD. Moreover, it also possesses a high photocurrent to dark current ratio (Ilight/Idark) of ∼104 and a ultraviolet/visible rejection ratio (R260 nm/R400 nm) of 3.5 × 103 along with millisecond-level photoresponse times.

A flexible nitrogen-vacancy center probe for scanning magnetometry

2021 ◽  
Vol 92 (5) ◽  
pp. 055001
Author(s):  
Maosen Guo ◽  
Mengqi Wang ◽  
Pengfei Wang ◽  
Diguang Wu ◽  
Xiangyu Ye ◽  
...  
Keyword(s):  
Nitrogen Vacancy ◽  
Nitrogen Vacancy Center ◽  
Vacancy Center

Manufacture of High Aspect Ratio Bulk Titanium Micro-Parts by Inductively Coupled Plasma Etching

2008 ◽  
Author(s):  
Gang Zhao ◽  
Qiong Shu ◽  
Yue Li ◽  
Jing Chen
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Inductively Coupled Plasma ◽  
Etching Rate ◽  
Sidewall Roughness ◽  
Inductively Coupled ◽  
Icp Etching ◽  
Novel Technology ◽  
Micro Parts ◽  
Etching Mask

A novel technology is developed to fabricate high aspect ratio bulk titanium micro-parts by inductively coupled plasma (ICP) etching. An optimized etching rate of 0.9 μm/min has been achieved with an aspect ratio higher than 10:1. For the first time, SU-8 is used as titanium etching mask instead of the traditional hard mask such as TiO2 or SiO2. With an effective selectivity of 3 and a spun-on thickness beyond 100 μm, vertical etching sidewall and low sidewall roughness are obtained. Ultra-deep titanium etching up to 200 μm has been realized, which is among the best of the present reports. Titanium micro-springs and planks are successfully fabricated with this approach.

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