Low-Temperature Deposition of Transparent Conducting Films Applied to Flexible Electrochromic Devices

Here, we compare two different transparent conducting oxides (TCOs), namely indium tin oxide (ITO) and indium zinc tin oxide (IZTO), fabricated as transparent conducting films using processes that require different temperatures. ITO and IZTO films were prepared at 230 °C and at room temperature, respectively, on glass and polyethylene terephthalate (PET) substrates using reactive magnetron sputtering. Electrochromic WO3 films deposited on ITO-based and IZTO-based ECDs using vacuum cathodic arc plasma (CAP) were investigated. IZTO-based ECDs have higher optical transmittance modulation, ΔT = 63% [from Tbleaching (90.01%) to Tcoloration (28.51%)], than ITO-based ECDs, ΔT = 59%. ECDs consisted of a working electrochromic electrode (WO3/IZTO/PET) and a counter-electrode (Pt mesh) in a 0.2 M LiClO4/perchlorate (LiClO4/PC) liquid electrolyte solution with an active area of 3 cm × 4 cm a calculated bleaching time tc of 21.01 s and a coloration time tb of 4.7 s with varying potential from −1.3 V (coloration potential, Vc) to 0.3 V (bleaching potential, Vb).

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Thermoelectric Materials Discovery Using Combinatorial Chemistry

MRS Proceedings ◽

10.1557/opl.2011.708 ◽

2011 ◽

Vol 1315 ◽

Author(s):

Matin Amani ◽

Ian Tougas ◽

Otto J. Gregory

Keyword(s):

Tin Oxide ◽

Thermoelectric Materials ◽

Indium Tin Oxide ◽

Transparent Conducting Oxides ◽

Combinatorial Libraries ◽

Room Temperature Resistivity ◽

Conducting Oxides ◽

Transparent Conducting ◽

Zinc Tin Oxide ◽

Optical Applications

ABSTRACTTransparent conducting oxides have been previously investigated for both bulk and thin film thermoelectric applications, and have shown promising results due to their thermal stability and electrical conductivity. Alloys of two or more transparent conducting oxides have been deposited using pulsed laser deposition (PLD) and combinatorial sputtering, and the resulting films were optimized for optical applications. In this study, thermoelectric materials were prepared by co-sputtering techniques, whereby a chemical gradient was formed across an alumina substrate that was patterned using photolithography to form hundreds of micro-thermocouples. The systems indium tin oxide (ITO), indium zinc oxide (IZO), and zinc tin oxide (ZTO) were investigated for this purpose and the resulting combinatorial libraries were rapidly screened to establish room temperature resistivity, Seebeck coefficient, and power factor as functions of both composition and heat treatment, in nitrogen and air ambients. Due to their chemical stability, oxidation resistance, and large Seebeck coefficients relative to metal thermocouples, these materials are ideal for temperature measurement or energy harvesting in harsh environments such as gas turbine engines.

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Indium Tin Oxide Alternatives-High Work Function Transparent Conducting Oxides as Anodes for Organic Light-Emitting Diodes

Advanced Materials ◽

10.1002/1521-4095(200110)13:19<1476::aid-adma1476>3.0.co;2-y ◽

2001 ◽

Vol 13 (19) ◽

pp. 1476-1480 ◽

Cited By ~ 204

Author(s):

J. Cui ◽

A. Wang ◽

N. L. Edleman ◽

J. Ni ◽

P. Lee ◽

...

Keyword(s):

Work Function ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Transparent Conducting Oxides ◽

Organic Light Emitting Diodes ◽

Light Emitting ◽

Conducting Oxides ◽

Organic Light ◽

Transparent Conducting ◽

High Work

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A novel technique for increasing electron mobility of indium-tin-oxide transparent conducting films

Thin Solid Films ◽

10.1016/s0040-6090(02)00340-1 ◽

2002 ◽

Vol 413 (1-2) ◽

pp. 167-170 ◽

Cited By ~ 28

Author(s):

S.H Keshmiri ◽

M Rezaee-Roknabadi ◽

S Ashok

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Electron Mobility ◽

Novel Technique ◽

Transparent Conducting Films ◽

Transparent Conducting

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Microstructural Study of Ultraviolet-Assisted Pulse Laser depoisted Indium Tin Oxide Films

MRS Proceedings ◽

10.1557/proc-721-j6.3 ◽

2002 ◽

Vol 721 ◽

Cited By ~ 1

Author(s):

Nabil D. Bassim ◽

Valentin Craciun ◽

Doina Craciun ◽

Rajiv K. Singh

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Films ◽

Flat Panel Displays ◽

Thermal Budget ◽

Conducting Oxides ◽

Transparent Conducting ◽

Deposited Film ◽

Tin Oxide Films ◽

Made In

AbstractIndium tin oxide is one of the most used transparent conducting oxides. In order to reduce the processing thermal budget and enhance compatibility of these films for such applications as transparent electrodes for solar cells and flat panel displays, lower deposition temperatures are desirable. The addition of a non-thermal energy source during deposition, in this case, a mercury lamp, has the ability to lower the required substrate temperature during processing while increasing the oxygen content of the deposited film through the added contribution of ionized species into the deposited material. We investigated the microstructure of UV-assisted pulsed laser deposited indium tin oxide films. Comparisons between the UV and non-UV films were made in order to judge the effectiveness of the UV radiation in achieving desirable properties.

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