scholarly journals A Novel Nitrogen Ion Implantation Technique for Turning Thin Film “Normally On” AlGaN/GaN Transistor into “Normally Off” Using TCAD Simulation

Membranes ◽  
2021 ◽  
Vol 11 (11) ◽  
pp. 899
Author(s):  
Gene Sheu ◽  
Yu-Lin Song ◽  
Dupati Susmitha ◽  
Kutagulla Issac ◽  
Ramyasri Mogarala
Keyword(s):  
Thin Film ◽  
Ion Implantation ◽  
Computer Aided Design ◽  
Drain Current ◽  
Current Gain ◽  
Implantation Technique ◽  
Positive Temperature ◽  
Implantation Energy ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion

This study presents an innovative, low-cost, mass-manufacturable ion implantation technique for converting thin film normally on AlGaN/GaN devices into normally off ones. Through TCAD (Technology Computer-Aided Design) simulations, we converted a calibrated normally on transistor into a normally off AlGaN/GaN transistor grown on a silicon <111> substrate using a nitrogen ion implantation energy of 300 keV, which shifted the bandgap from below to above the Fermi level. In addition, the threshold voltage (Vth) was adjusted by altering the nitrogen ion implantation dose. The normally off AlGaN/GaN device exhibited a breakdown voltage of 127.4 V at room temperature because of impact ionization, which showed a positive temperature coefficient of 3 × 10−3 K−1. In this study, the normally off AlGaN/GaN device exhibited an average drain current gain of 45.3%, which was confirmed through an analysis of transfer characteristics by changing the gate-to-source ramping. Accordingly, the proposed technique enabled the successful simulation of a 100-µm-wide device that can generate a saturation drain current of 1.4 A/mm at a gate-to-source voltage of 4 V, with a mobility of 1487 cm2V−1s−1. The advantages of the proposed technique are summarized herein in terms of processing and performance.

scholarly journals EFFECTS OF NITROGEN ION IMPLANTATION ON HARDNESS AND WEAR RESISTANCE OF THE Ti-6Al-4V ALLOY

2015 ◽  
Vol 18 (2) ◽  
pp. 61 ◽  
Author(s):  
Sudjatmoko, Lely Susita R.M., Wirjoadi, Bambang Siswanto
Keyword(s):  
Wear Resistance ◽  
Ion Implantation ◽  
Surface Hardness ◽  
Wear Test ◽  
Xrd Analysis ◽  
Implantation Technique ◽  
Alloy Sample ◽  
Nitrogen Ion Implantation ◽  
X Ray ◽  
Nitrogen Ion

ABSTRACT EFFECT OF NITROGEN ION IMPLANTATION ON HARDNESS AND WEAR RESISTANCE OF THE Ti-6Al-4V ALLOY. The nitrogen ion implantation technique was chosen for improving surface hardness and the wear resistance properties of the Ti-6Al-4V alloy. An optimum nitrogen ion dose of 5 ´ 1016 ion/cm2 and ion energies of 70, 80 and 100 keV were used in this study. Microstructure, chemical composition and surface morphology studied using the technique of Scanning Electron Microscope (SEM) coupled with Energy Dispersive X-ray (EDX) and X-ray Diffraction (XRD). Analysis of the SEM-EDX micrographs and XRD diffraction patterns indicate that implanted layer on the surface of the Ti-6Al-4V alloy sample showed the presence of Ti2N and TiN phases which very hard and excellent wear resistance properties. Microhardness was measured by Vickers method, and the wear resistance was determined using the wear test equipment that work based on the amount of samples material lost during wear time. The results of measurements clearly indicate that implanted layer on surface of the Ti-6Al-4V alloy sample produced an optimum enhancement of hardness properties and wear resistance, and it occurs at ion energy of 80 keV and ion dose of 5 ´ 1016 ion/cm2. It is obtained that the hardness of implanted layer was increased by a factor of 2.1; whereas the wear resistance increased up to a factor of 27 compared to the standard sample. The increase in hardness and wear resistance of implanted layer are mainly due to the formation of Ti2N and TiN phases.

scholarly journals Effect of Nitrogen Ion Implantation Energy on the Mechanical and Chemical Properties of AISI M50 Steel

2021 ◽  
Vol 2021 ◽  
pp. 1-8
Author(s):  
Xiangyu Xie ◽  
Chao Chen ◽  
Jun Luo ◽  
Jin Xu
Keyword(s):  
Ion Implantation ◽  
Chemical Properties ◽  
Metal Vapor ◽  
Vacuum Arc ◽  
Implantation Energy ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ions ◽  
Nitrogen Ion ◽  
And Chemical Properties ◽  
M50 Steel

Nitrogen ion implantation has shown its role in enhancing steel surface properties. In this work, AISI M50 steel was implanted with nitrogen ions by using the metal vapor vacuum arc technique with a dose of 2 × 1017 cm−2, and corresponding implanted energies were at 60 keV, 80 keV, and 100 keV, respectively. The distribution of implanted nitrogen ions was calculated, and the samples were tribologically tested and examined. As shown by the results, the microhardness in implanted samples was 1.17 times greater relative to that of the unimplanted sample. The implantation of the nitrogen ion leads to a change in the friction coefficient of the AISI M50 steel. Adhesive wear mechanism occurs in the unimplanted sample, and adhesion resistance tends to increase when nitrogen-implanted energy increases. The formation of oxides α-Fe2O3 and Fe3O4 further enhanced the tribological properties for implanted samples.

scholarly journals Formation of buried superconducting Mo2N by nitrogen-ion-implantation

RSC Advances ◽  
2020 ◽  
Vol 10 (72) ◽  
pp. 44339-44343
Author(s):  
Joonhyuk Lee ◽  
Jun Kue Park ◽  
Joon Woo Lee ◽  
Yunseok Heo ◽  
Yoon Seok Oh ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Implantation ◽  
Low Energy ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion

Formation of chemically distinct interfaces, including crystalline buried-superconducting Mo2N, by low-energy nitrogen ion implantation in an epitaxial molybdenum thin film.

scholarly journals Effect of Low-Energy Nitrogen Ion Implantation on Friction and Wear Properties of Ion-Plated TiC Coating

Coatings ◽  
2021 ◽  
Vol 11 (7) ◽  
pp. 775
Author(s):  
Zhongyu Dou ◽  
Yinglu Guo ◽  
Faguang Zhang ◽  
Dianxi Zhang
Keyword(s):  
Wear Resistance ◽  
Ion Implantation ◽  
Implantation Dose ◽  
Low Energy ◽  
Wear Properties ◽  
Implantation Energy ◽  
Nitrogen Ion Implantation ◽  
Friction Performance ◽  
Nitrogen Ion ◽  
Tribological Analysis

To further improve the performance of the coated tools, we investigated the effects of low-energy nitrogen ion implantation on surface structure and wear resistance for TiC coatings deposited by ion plating. In this experiment, an implantation energy of 40 keV and a dose of 2 × 1017 to 1 × 1018 (ions/cm2) were used to implant N ions into the TiC coatings. The results indicate that the surface roughness of the coating increases first and then decreases with the increase of ion implantation dose. After ion implantation, the surface of the coating will soften and reduce the hardness, and the production of TiN phase will gradually increase the hardness. Nitrogen ion implantation can reduce the friction coefficient of the TiC coating and improve the friction performance. In terms of wear resistance, the coating with an implant dose of 1×1018 ions/cm2 has the greatest improvement in wear resistance. Tribological analysis shows that the improvement in the performance of TiC coatings implanted with N ions is mainly due to the effect of the lubricating implanted layer. The implanted layer mainly exists in the form of amorphous TiC, TiN phase, and sp2C–C phase.

Study on the Performances Properties of Medical Pure Magnesium by Ion Implantation of Nitrogen

2017 ◽  
Vol 1142 ◽  
pp. 31-36
Author(s):  
De Weng Tang ◽  
Wen Ming Zhang ◽  
Rui Lan Zhao ◽  
Xi Jian Lv
Keyword(s):  
Wear Resistance ◽  
Ion Implantation ◽  
Surface Properties ◽  
Corrosion And Wear ◽  
Pure Magnesium ◽  
Process Conditions ◽  
Implantation Energy ◽  
Chemical Corrosion ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion

To improve medical pure magnesium corrosion and wear resistance, the advanced plasma implantation technology were used to implanted medical pure magnesium with nitrogen ions under certain conditions, obtaining a certain depth of nitrogen ion implantation layer, and to study the surface properties of the implantation layer. The sample after ion implanted, the surface morphology, phase composition were analyzed, and have electro chemical corrosion tests, friction and wear tests, the results showed that: pure magnesium by nitrogen ion implantation, can be obtained a surface organizations which whole flat, compact, no surface cracks and holes; the surface implantation layer mainly composed of Mg and MgO, also found a small amount of Mg3N2, which is also the main reason for corrosion and wear resistance improved; compared to pure magnesium base, nitrogen ion implantation (process conditions: implantation energy: 40KeV, implantation dose: 3×1017ions/cm2, control temperature: 200°C) improved the corrosion resistance of the sample, but not obvious, about 1.2%; however, the friction coefficient decreased significantly, approximately 61%, the amount of wear also reduced significantly, about 74%, this means that, its wear resistance has been improved significantly. This study provides a reference to improve the surface properties of pure magnesium and be learned to develop a more reasonable parameters for further study of medical pure magnesium by ion implantation of nitrogen.

Sign in / Sign up

Export Citation Format

Share Document