Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 107 can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.

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Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

10.20944/preprints201907.0283.v1 ◽

2019 ◽

Author(s):

Jianhao Zhang ◽

Zhiwei Fang ◽

Jintian Lin ◽

Junxia Zhou ◽

Min Wang ◽

...

Keyword(s):

Lithium Niobate ◽

Femtosecond Laser ◽

Wedge Angle ◽

Quality Factors ◽

High Quality ◽

Surface Smoothness ◽

High Q ◽

Q Factors

We report fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on femtosecond laser assisted chemo-mechanical polish which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 107 can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.

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High and Moderate-Level Vacuum Packaging of Vibratory MEMS

International Symposium on Microelectronics ◽

10.4071/isom-2013-wp42 ◽

2013 ◽

Vol 2013 (1) ◽

pp. 000705-000710 ◽

Cited By ~ 8

Author(s):

Igor P. Prikhodko ◽

Brenton R. Simon ◽

Gunjana Sharma ◽

Sergei A. Zotov ◽

Alexander A. Trusov ◽

...

Keyword(s):

Vacuum Packaging ◽

Moderate Level ◽

Silicon On Insulator ◽

Quality Factors ◽

High Q ◽

Hermetic Sealing ◽

Hemispherical Resonator ◽

Q Factors ◽

Grade Performance

We report vacuum packaging procedures for low-stress die attachment and versatile hermetic sealing of resonant MEMS. The developed in-house infrastructure allows for both high and moderate-level vacuum packaging addressing the requirements of various applications. Prototypes of 100 μm silicon-on-insulator Quadruple Mass Gyroscopes (QMGs) were packaged using the developed process with and without getters. Characterization of stand-alone packaged devices with no getters resulted in stable quality factors (Q-factors) of 1000 (corresponding to 0.5 Torr vacuum level), while devices sealed with activated getters demonstrated Q-factors of 1.2 million (below 0.1 mTorr level inside the package). Due to the high Q-factors achieved in this work, we project that the QMG used in this work can potentially reach the navigation-grade performance, potentially bridging the gap between the inertial silicon MEMS and the state-of-the-art fused quartz hemispherical resonator gyroscopes.

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Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

International Journal of Optomechatronics ◽

10.1080/15599612.2017.1406024 ◽

2017 ◽

Vol 11 (1) ◽

pp. 47-54 ◽

Cited By ~ 6

Author(s):

Zhiwei Fang ◽

Ni Yao ◽

Min Wang ◽

Jintian Lin ◽

Jianhao Zhang ◽

...

Keyword(s):

Lithium Niobate ◽

Femtosecond Laser ◽

Quality Factor ◽

High Quality Factor ◽

High Quality

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Design of X-Cut and Z-Cut Lithium Niobate Whispering-Gallery-Mode Disk-Resonators With High Quality Factors

IEEE Photonics Journal ◽

10.1109/jphot.2017.2727286 ◽

2017 ◽

Vol 9 (4) ◽

pp. 1-8 ◽

Cited By ~ 2

Author(s):

Yu Pan ◽

Guoping Lin ◽

Souleymane Diallo ◽

Xianmin Zhang ◽

Yanne K. Chembo

Keyword(s):

Lithium Niobate ◽

Whispering Gallery Mode ◽

Quality Factors ◽

High Quality ◽

Whispering Gallery ◽

Disk Resonators

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Compositional Mapping in Dynamic Atomic Force Microscopy in High-Q vs. Low-Q Environments: Effects of Cantilever Nonlinear Dynamics

Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems ◽

10.1115/detc2010-29165 ◽

2010 ◽

Author(s):

John Melcher ◽

Arvind Raman

Keyword(s):

Nonlinear Dynamics ◽

Atomic Force Microscopy ◽

Quality Factors ◽

Force Microscopy ◽

High Q ◽

New Class ◽

Atomic Force ◽

Nanoscale Metrology ◽

Q Factors ◽

Local Stiffness

The ability to simultaneously map variations in topography and composition (local stiffness, adhesion, charge, hydrophillicity/phobicity, viscoelasticity) of samples in ambient and liquid environments has made dynamic atomic force microscopy (dAFM) a powerful tool for nanoscale metrology. In ambient and vacuum environments, quality factors (Q-factors) of the fundamental resonance are typically large, and the contrast channels in dAFM are relatively well understood. In liquid environments, however, Q-factors are typically low due to cantilever interactions with the surrounding viscous liquid, which introduces a new class of nonlinear dynamics that is accompanied by new contrast channels, such as, higher harmonic amplitudes and phases. In particular, we find that the interpretation of the traditional contrast channels is quite different in low-Q environments compared to high-Q environments. We present a theoretical investigation of the contrast channels in dAFM in the context of frequency modulation and tapping mode dAFM with an emphasis on low-Q environments.

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Switchable Electromagnetically Induced Transparency with Toroidal Mode in a Graphene-Loaded All-Dielectric Metasurface

Nanomaterials ◽

10.3390/nano10061064 ◽

2020 ◽

Vol 10 (6) ◽

pp. 1064 ◽

Cited By ~ 1

Author(s):

Guanghou Sun ◽

Sheng Peng ◽

Xuejin Zhang ◽

Yongyuan Zhu

Keyword(s):

Electromagnetically Induced Transparency ◽

Modulation Depth ◽

Optical Filters ◽

Destructive Interference ◽

Quality Factors ◽

High Q ◽

Dipole Resonance ◽

Q Factors ◽

Induced Transparency ◽

Dielectric Metasurface

Active photonics based on graphene has attracted wide attention for developing tunable and compact optical devices with excellent performances. In this paper, the dynamic manipulation of electromagnetically induced transparency (EIT) with high quality factors (Q-factors) is realized in the optical telecommunication range via the graphene-loaded all-dielectric metasurface. The all-dielectric metasurface is composed of split Si nanocuboids, and high Q-factor EIT resonance stems from the destructive interference between the toroidal dipole resonance and the magnetic dipole resonance. As graphene is integrated on the all-dielectric metasurface, the modulation of the EIT window is realized by tuning the Fermi level of graphene, engendering an appreciable modulation depth of 88%. Moreover, the group velocity can be tuned from c/1120 to c/3390. Our proposed metasurface has the potential for optical filters, modulators, and switches.

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Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining

Optics Express ◽

10.1364/oe.22.014792 ◽

2014 ◽

Vol 22 (12) ◽

pp. 14792 ◽

Cited By ~ 19

Author(s):

Jiangxin Song ◽

Jintian Lin ◽

Jialei Tang ◽

Yang Liao ◽

Fei He ◽

...

Keyword(s):

Femtosecond Laser ◽

Quality Factor ◽

Laser Micromachining ◽

High Quality Factor ◽

High Quality ◽

High Q ◽

Femtosecond Laser Micromachining

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Broadband highly efficient nonlinear optical processes in on-chip integrated lithium niobate microdisk resonators of Q-factor above 108

New Journal of Physics ◽

10.1088/1367-2630/ac3d52 ◽

2021 ◽

Author(s):

Renhong Gao ◽

Haisu Zhang ◽

Fang Bo ◽

Wei Fang ◽

Zhenzhong Hao ◽

...

Keyword(s):

Lithium Niobate ◽

Conversion Efficiency ◽

Nonlinear Optical ◽

Second Harmonic ◽

Nonlinear Coefficient ◽

High Spectral Resolution ◽

Parametric Oscillation ◽

High Q ◽

On Chip ◽

Q Factors

Abstract Microresonators of ultrahigh quality (Q) factors represent a crucial type of photonic devices aiming at ultra-high spectral resolution, ultra-high sensitivity to the environmental perturbations, and efficient nonlinear wavelength conversions at low threshold pump powers. Lithium niobate on insulator (LNOI) microdisks of high Q factors are particularly attractive due to its large second-order nonlinear coefficient and strong electro-optic property. In this Letter, we break through the long standing bottleneck in achieving the Q factors of LNOI micro-resonators beyond 108, which approaches the intrinsic material absorption limit of lithium niobate (LN). The ultra-high Q factors give rise to a rich family of nonlinear optical phenomena from optical parametric oscillation (OPO) to harmonics generation with unprecedented characteristics including ultra-low pump threshold, high wavelength conversion efficiency, and ultra-broad operation bandwidth. Specifically, the threshold of OPO is measured to be only 19.6 μW, and the absolute conversion efficiency observed in the second harmonic generation reaches 23%. The record-breaking performances of the on-chip ultra-high Q LNOI microresonators will have profound implication for both photonic research and industry.

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