A Rapid Prototyped Thermal Mass Flowmeter
Keyword(s):
An innovative rapid prototyping technique for embedding microcomponents in PDMS replicas was developed and applied on a thermal mass flowmeter for closed loop micropump flowrate control. Crucial flowmeter design and thermal parameters were investigated with a 3-D fully coupled electro-thermal-fluidic model which was built in Comsol Multiphysics 5.2. The flowmeter was characterized for three distinct measuring configurations. For precise low flowrate applications, a sensor-heater-sensor flowmeter configuration with a constant heater temperature was found to be the most appropriate yielding the measuring range of 0 to 90 µL·min-1 and the sensitivity of 1.3 °C·µL−1·min in the lower flowrate range of 0 to 40 µL·min−1.
2015 ◽
Vol 2015.23
(0)
◽
pp. _ICONE23-1-_ICONE23-1
Keyword(s):
1989 ◽
Vol 11
(1)
◽
pp. 2-8
◽
2011 ◽
Vol 55-57
◽
pp. 2188-2191
Keyword(s):