Effect of metal heat guide structure on the performance of planar Si thermoelectric generator embedded in SiO2 inter-layer dielectric
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Abstract Heat guide (HG) is a layer providing a heat flux to a desired part in micro thermoelectric generator (µ-TEG). In this work, we experimentally investigated the impact of the HG structure on the thermoelectric voltage of a cavity-free planer-type Si-nanowire (Si-NW) µ-TEG, which is embedded in SiO2 acting as an inter-layer dielectric (ILD). Although the heat flows also through the ILD, a sub-µm-thick HG is able to selectively guide the heat flux to hot side terminal of the µ-TEG, and the µ-TEG performance is improved by increasing the thickness of the HG.
2015 ◽
Vol 98
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pp. 268-274
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2018 ◽
Vol 19
(1)
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pp. 443-453
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2018 ◽
Vol 1052
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pp. 012131
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2005 ◽
Vol 9
(6)
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pp. 607-613
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2018 ◽
Vol 65
(11)
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pp. 5180-5188
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