An Experimental Study on Micro Milling of PZT Deposited Si Wafer

Author(s):  
Ken-Han Chen ◽  
Ming-Chyuan Lu ◽  
Chia-Che Wu ◽  
Kuan-Ming Li ◽  
Yao-Yang Tsai
2011 ◽  
Vol 2-3 ◽  
pp. 797-800
Author(s):  
Jun Cheng ◽  
Ya Dong Gong ◽  
Yue Ming Liu ◽  
Jian Yu Yang

This paper presents a novel micro machining process that micro mill-grinding by combining micro-grinding and micro-milling. The principle of micro mill-grinding has been analyzed and a experiment is designed to study the influences in micro mill-grinding process on Al 6061-T6. The manufacturing is carried out on a desktop micro machine developed by NEU. In this research, analysis from results could found that the surface quality influences in micro mill-grinding is complicated affected both by milling and grinding, and conclude aspects such as cutter diameter, feed rate and material properties.


Author(s):  
X M Yang ◽  
X Cheng ◽  
F Wang ◽  
Q L Sun ◽  
W H Wang

2012 ◽  
Vol 500 ◽  
pp. 357-362 ◽  
Author(s):  
Xiu Bing Jing ◽  
Huai Zhong Li ◽  
Jun Wang ◽  
Jong Leng Liow

Micro-end-milling is an efficient and economical manufacturing operation that is capable of accurately producing high aspect ratio features and parts. It is important to study the cutting forces in micro-milling for the planning and control of the process. This paper presents an experimental study of the cutting forces in micro-end-milling of a 6160 aluminum alloy. The measured cutting forces are presented and discussed for different cutting conditions, such as various feeds per tooth, cutter diameters, and cutting speeds. It is found that the peak cutting forces increase with increasing cutting speed and feed rate. The effects of tool runout on the cutting forces were also analyzed based on the experimental results, from which the influences of feed rate and cutting speed are found to be obvious.


2015 ◽  
Vol 667 ◽  
pp. 326-331
Author(s):  
Peng Zhang ◽  
Yun Long Du ◽  
Bo Wang ◽  
De Bin Shan

Elgiloy is a cobalt-based alloy with excellent physical and chemical performance, which is used widely in medical and industrial applications. In this paper, the professional finite element analysis software for metal cutting is used to establish the finite element simulation model of micro cutting this kind of cobalt-based alloy, and the effect of feed rate, which is considered as the most important processing parameter, on the cutting force of micro cutting Elgiloy is analyzed. The cutting force measurement system based on ultra-precision micro milling machine tool is established for experimental study on the cutting force of micro milling Elgiloy by using ultra-fine gain tungsten carbide micro milling tool. The cutting force is measured with different feed rate parameters and the influence of the parameters on the cutting force is analyzed. The simulation and experimental results show that the trends observed at the micro scale are the same as the trends for machining at the macro scale, which implies that the Elgiloy material behaves in a similar manner at both length scales.


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