Study on the Plasma-Polymer Thin Films Deposited by Using PECVD and Application Tests for Low-k Insulator

2008 ◽  
Vol 53 (3) ◽  
pp. 1634-1637 ◽  
Author(s):  
S.-J. Cho ◽  
I.-S. Bae ◽  
J.-H. Boo ◽  
Y. S. Park ◽  
B. Hong
Keyword(s):  
Thin Films ◽  
Polymer Thin Films ◽  
Plasma Polymer ◽  
Low K

Nanopatterning of Plasma Polymer Thin Films by ArF Photolithography: Impact of Polymer Structure on Patterning Properties

2010 ◽  
Vol 7 (7) ◽  
pp. 571-581 ◽  
Author(s):  
Ali Dirani ◽  
Fernand Wieder ◽  
Vincent Roucoules ◽  
Aissam Airoudj ◽  
Olivier Soppera
Keyword(s):  
Thin Films ◽  
Polymer Thin Films ◽  
Polymer Structure ◽  
Plasma Polymer

The Optical and Mechanical Properties of Toluene-TEOS Hybrid Plasma-Polymer Thin Films Deposited by PECVD

2009 ◽  
Vol 55 (5(1)) ◽  
pp. 1780-1784
Author(s):  
Sang-Jin Cho ◽  
In-Seob Bae ◽  
Jin-Hyo Boo ◽  
Sungwoo Lee ◽  
Donggeun Jung
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Polymer Thin Films ◽  
Plasma Polymer ◽  
Hybrid Plasma ◽  
Optical And Mechanical Properties

scholarly journals Retention of Antibacterial Activity in Geranium Plasma Polymer Thin Films

Nanomaterials ◽  
2017 ◽  
Vol 7 (9) ◽  
pp. 270 ◽  
Author(s):  
Ahmed Al-Jumaili ◽  
Kateryna Bazaka ◽  
Mohan Jacob
Keyword(s):  
Thin Films ◽  
Antibacterial Activity ◽  
Polymer Thin Films ◽  
Plasma Polymer

Controlling the Morphogenesis of Needle-Like and Multibranched Structures in Maleic Anhydride Plasma Polymer Thin Films

2014 ◽  
Vol 11 (10) ◽  
pp. 943-951 ◽  
Author(s):  
Michel M. Brioude ◽  
Marie-Pierre Laborie ◽  
Aissam Airoudj ◽  
Hamidou Haidara ◽  
Vincent Roucoules
Keyword(s):  
Thin Films ◽  
Maleic Anhydride ◽  
Polymer Thin Films ◽  
Plasma Polymer

Scanning probe microscopy for the analysis of composite Ti/hydrocarbon plasma polymer thin films

2008 ◽  
Vol 602 (5) ◽  
pp. 1011-1019 ◽  
Author(s):  
A. Choukourov ◽  
A. Grinevich ◽  
D. Slavinska ◽  
H. Biederman ◽  
N. Saito ◽  
...  
Keyword(s):  
Thin Films ◽  
Scanning Probe Microscopy ◽  
Polymer Thin Films ◽  
Plasma Polymer ◽  
Scanning Probe ◽  
Probe Microscopy

scholarly journals STUDY OF NANOSTRUCTURED PLASMA-POLYMER THIN FILMS GROWTH UNDER DUSTY PLASMA CONDITIONS

2020 ◽  
Author(s):  
Vojtěch HOMOLA ◽  
Roman PŘIBIL ◽  
Štěpánka KELAROVÁ ◽  
Richard VÁCLAVÍK ◽  
Petr TOMŠEJ ◽  
...  
Keyword(s):  
Thin Films ◽  
Dusty Plasma ◽  
Polymer Thin Films ◽  
Plasma Polymer

Surface “Click” Chemistry on Brominated Plasma Polymer Thin Films

Langmuir ◽  
2010 ◽  
Vol 26 (5) ◽  
pp. 3388-3393 ◽  
Author(s):  
Rodney T. Chen ◽  
Benjamin W. Muir ◽  
Georgina K. Such ◽  
Almar Postma ◽  
Richard A. Evans ◽  
...  
Keyword(s):  
Thin Films ◽  
Click Chemistry ◽  
Polymer Thin Films ◽  
Plasma Polymer
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