Simulation Assisted Measurement of Nanoparticle Concentration Generated during High-Density Plasma CVD of Poly-Silicon Films
Keyword(s):
2011 ◽
Vol 50
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pp. 036502
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1997 ◽
2004 ◽
Vol 338-340
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pp. 42-46
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2011 ◽
Vol 50
(3R)
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pp. 036502
◽
Keyword(s):
Keyword(s):
2002 ◽
Vol 16
(06n07)
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pp. 973-977
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Keyword(s):
2007 ◽
Vol 51
(3)
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pp. 1187
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