XPS Analysis of Silicon Oxycarbide Formed on the Surface of Rf-Sputter Deposited SiC Thin Films
1996 ◽
Vol 54
◽
pp. 1000-1001
Keyword(s):
1996 ◽
Vol 54
◽
pp. 1020-1021
1995 ◽
Vol 05
(C8)
◽
pp. C8-689-C8-694
◽
1995 ◽
Vol 05
(C8)
◽
pp. C8-683-C8-688
◽
Keyword(s):
Keyword(s):