Structure and Hemocompatibility of Titanium Oxide Films Synthesized by Continuous or Pulsed DC Magnetron Sputtering

2005 ◽  
pp. 299-302
Author(s):  
Lan Xin Xu ◽  
Yong Xiang Leng ◽  
Hong Fang Zhou ◽  
Y.W. Liu ◽  
Nan Huang
Keyword(s):  
Magnetron Sputtering ◽  
Titanium Oxide ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering ◽  
Titanium Oxide Films

Structure and Hemocompatibility of Titanium Oxide Films Synthesized by Continuous or Pulsed DC Magnetron Sputtering

2005 ◽  
Vol 288-289 ◽  
pp. 299-302
Author(s):  
Lan Xin Xu ◽  
Yong Xiang Leng ◽  
Hong Fang Zhou ◽  
Y.W. Liu ◽  
Nan Huang
Keyword(s):  
Magnetron Sputtering ◽  
Titanium Oxide ◽  
Oxide Films ◽  
Rutile Phase ◽  
Polar Component ◽  
Interface Tension ◽  
Pulsed Dc ◽  
Sputtering Power ◽  
Lower Ratio ◽  
Titanium Oxide Films

Titanium oxide films were prepared by reactive magnetron sputtering using continuous or pulsed DC sputtering power. The results of the structure and vitro hemocompatibility analyses indicated that non-stoichiometric titanium oxide films possess better hemocompatibility than LTIC and that the hemocompatibility of the titanium oxide films are evidently improved with the increase of rutile phase. This can result from the lower interface tension between titanium oxide films and biological substances and lower ratio of dispersive and polar component of the surface energy.

Titanium oxide thin films synthesis by pulsed – DC magnetron sputtering

Vacuum ◽  
2009 ◽  
Vol 83 ◽  
pp. S91-S94 ◽  
Author(s):  
Jurgita Čyvienė ◽  
Edvinas Navickas ◽  
Darius Milčius ◽  
Giedrius Laukaitis
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Titanium Oxide ◽  
Dc Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering

Characterization of Ti–Zr–V thin films deposited by DC and unipolar pulsed DC magnetron sputtering

Vacuum ◽  
2021 ◽  
Vol 188 ◽  
pp. 110200
Author(s):  
Sihui Wang ◽  
Wei Wei ◽  
Yonghao Gao ◽  
Haibin Pan ◽  
Yong Wang
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Dc Magnetron Sputtering ◽  
Pulsed Dc ◽  
Pulsed Dc Magnetron Sputtering
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