Direct Writing Micro-Structure on 65Mn by Femtosecond Laser

2013 ◽  
Vol 291-294 ◽  
pp. 2734-2737
Author(s):  
Jian Ting Xu ◽  
Dong Qing Yuan
Keyword(s):  
Femtosecond Laser ◽  
Pulse Energy ◽  
Repetition Rate ◽  
Pulse Length ◽  
Direct Writing ◽  
Micro Structure ◽  
Circle Pattern ◽  
Scan Speed ◽  
Line Process ◽  
Regular Line

Regular line and circle arry micro-apparatus on 65Mn plate formed by femtosecond direct writting with wavelength of 800 nm, repetition rate of 1 kHz and the pulse length of 130fs in air. Investigate the effect of pulse energy and scan speed. Found, that the increased scan speed was similar to the decreased pulse energy. Due to the circle pattern was different to the line process, the contrary phenomenon appeared, which with increased ablation energy, the width of groove was less and the depth was increased.

scholarly journals Submicron and nano surface patterning using nanosecond laser technique

2021 ◽  
Author(s):  
Ali Abdul-Kadhum Husein
Keyword(s):  
Femtosecond Laser ◽  
Pulse Energy ◽  
Repetition Rate ◽  
Laser System ◽  
Surface Patterning ◽  
Optical Path ◽  
Wafer Surface ◽  
Nanosecond Laser ◽  
Direct Writing ◽  
Laser Technique

Direct writing by laser techniques in the micro and nanostructuring scale is very important for the fabrication of new materials and multifunctional devices. They have proven to be very successful tools for precision machining and microfabrication with applications in optical devices, microelectronics, medical device, biomedical, defense applications, and MEMS. Focused nanosecond (ns) laser pulses can produce periodic structures and arrays pattern structures in semiconductors and thin metallic film on shaped surfaces. The achievable structure size is restricted by the wavelength and diffraction limit as well as it is determined by material properties and laser pulse stability. This thesis proposes a nanosecond laser nanostructuring technique in common optical path configuration to examine the limitations of the currently used fabrication methods and type of setups used; the competitive edge is using nanosecond lasers as a tool. Prospectively, this technology can be applied for femtosecond laser fabrication, because this is an easy, simple and common optical path configuration. For this experimental setup, the use of a common optical path configuration for automatic interference offers equals path lengths. It is not required for complicated optical setups while in femtosecond laser setups, it is extremely important to use path compensation in order to offer time delay for one laser beam due to a long path and more optical components. A low repetition rate, low power nanosecond laser system is investigated to preventing the (HAZ) conditions. The influence of the laser repetition rate and pulse energy on the size and quality of submicron features which fabricated on silicon wafers and thin gold film is investigated. In terms of nanomachining below the ablation threshold (surface patterning), the influence of laser fluence, repetition rate and pulse energy on the spacing as well as diameter of dots created on silicon wafer surface is examined. These studies show the capability of the proposed system of nanosecond laser in common optical path configuration in meeting the industry requirements.

scholarly journals Submicron and nano surface patterning using nanosecond laser technique

2021 ◽  
Author(s):  
Ali Abdul-Kadhum Husein
Keyword(s):  
Femtosecond Laser ◽  
Pulse Energy ◽  
Repetition Rate ◽  
Laser System ◽  
Surface Patterning ◽  
Optical Path ◽  
Wafer Surface ◽  
Nanosecond Laser ◽  
Direct Writing ◽  
Laser Technique

Direct writing by laser techniques in the micro and nanostructuring scale is very important for the fabrication of new materials and multifunctional devices. They have proven to be very successful tools for precision machining and microfabrication with applications in optical devices, microelectronics, medical device, biomedical, defense applications, and MEMS. Focused nanosecond (ns) laser pulses can produce periodic structures and arrays pattern structures in semiconductors and thin metallic film on shaped surfaces. The achievable structure size is restricted by the wavelength and diffraction limit as well as it is determined by material properties and laser pulse stability. This thesis proposes a nanosecond laser nanostructuring technique in common optical path configuration to examine the limitations of the currently used fabrication methods and type of setups used; the competitive edge is using nanosecond lasers as a tool. Prospectively, this technology can be applied for femtosecond laser fabrication, because this is an easy, simple and common optical path configuration. For this experimental setup, the use of a common optical path configuration for automatic interference offers equals path lengths. It is not required for complicated optical setups while in femtosecond laser setups, it is extremely important to use path compensation in order to offer time delay for one laser beam due to a long path and more optical components. A low repetition rate, low power nanosecond laser system is investigated to preventing the (HAZ) conditions. The influence of the laser repetition rate and pulse energy on the size and quality of submicron features which fabricated on silicon wafers and thin gold film is investigated. In terms of nanomachining below the ablation threshold (surface patterning), the influence of laser fluence, repetition rate and pulse energy on the spacing as well as diameter of dots created on silicon wafer surface is examined. These studies show the capability of the proposed system of nanosecond laser in common optical path configuration in meeting the industry requirements.

Direct writing of sub-wavelength ripples on silicon using femtosecond laser at high repetition rate

2016 ◽  
Vol 360 ◽  
pp. 896-903 ◽  
Author(s):  
Changxin Xie ◽  
Xiaohong Li ◽  
Kaijun Liu ◽  
Min Zhu ◽  
Rong Qiu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Direct Writing ◽  
High Repetition ◽  
Sub Wavelength

scholarly journals Femtosecond Laser Machining At Submicron And Nano Scale

2021 ◽  
Author(s):  
Alireza Dalili
Keyword(s):  
Femtosecond Laser ◽  
Pulse Energy ◽  
Repetition Rate ◽  
Pulse Width ◽  
Laser System ◽  
High Repetition Rate ◽  
Silicon Wafers ◽  
Good Precision ◽  
High Repetition ◽  
Nano Scale

The arrival of the femtosecond laser with a MHz repetition rate has provided the industry with a new tool to conduct submicron and nano scale machining. Several advantages such as high quality machining finish, good precision and high throughput can be obtained when using femtosecond laser to conduct nanomachining over lithography techniques currently in use. High repetition rate systems are preferred over low repetition rate femtosecond laser systems that have been studied by others due to their increased stability, speed, quality and discovery of new phenomena such as ripples and grains. This thesis proposes a high repetition rate fiber femtosecond laser system for meeting the above-mentioned conditions. The influence of the laser repetition rate and pulse energy on the size and quality of nano features fabricated on silicon wafers was investigated. Higher repetition rates led to smaller cutlines with uniform width. A 110 nm crater with a small heat affected zone of 0.79 µm was obtained at 13 MHz repetition rate and 2.042 J/cm² energy fluence. In terms of nanomachining below the ablation threshold (surface patterning), the influence of pulse width, repetition rate and pulse energy on the spacing of ripples, as well as diameter of grains created on silicon wafers, was examined. For the pulse width, repetition rate and pulse energy range used, the ripple spacing and grain diameter increased with laser pulse duration while other parameters did not play a significant role. These results show the capability of the proposed system in meeting the industry requirements.

scholarly journals Femtosecond Laser Machining At Submicron And Nano Scale

2021 ◽  
Author(s):  
Alireza Dalili
Keyword(s):  
Femtosecond Laser ◽  
Pulse Energy ◽  
Repetition Rate ◽  
Pulse Width ◽  
Laser System ◽  
High Repetition Rate ◽  
Silicon Wafers ◽  
Good Precision ◽  
High Repetition ◽  
Nano Scale

The arrival of the femtosecond laser with a MHz repetition rate has provided the industry with a new tool to conduct submicron and nano scale machining. Several advantages such as high quality machining finish, good precision and high throughput can be obtained when using femtosecond laser to conduct nanomachining over lithography techniques currently in use. High repetition rate systems are preferred over low repetition rate femtosecond laser systems that have been studied by others due to their increased stability, speed, quality and discovery of new phenomena such as ripples and grains. This thesis proposes a high repetition rate fiber femtosecond laser system for meeting the above-mentioned conditions. The influence of the laser repetition rate and pulse energy on the size and quality of nano features fabricated on silicon wafers was investigated. Higher repetition rates led to smaller cutlines with uniform width. A 110 nm crater with a small heat affected zone of 0.79 µm was obtained at 13 MHz repetition rate and 2.042 J/cm² energy fluence. In terms of nanomachining below the ablation threshold (surface patterning), the influence of pulse width, repetition rate and pulse energy on the spacing of ripples, as well as diameter of grains created on silicon wafers, was examined. For the pulse width, repetition rate and pulse energy range used, the ripple spacing and grain diameter increased with laser pulse duration while other parameters did not play a significant role. These results show the capability of the proposed system in meeting the industry requirements.

scholarly journals Biomimetic surface structures in steel fabricated with femtosecond laser pulses: influence of laser rescanning on morphology and wettability

2018 ◽  
Vol 9 ◽  
pp. 2802-2812 ◽  
Author(s):  
Camilo Florian Baron ◽  
Alexandros Mimidis ◽  
Daniel Puerto ◽  
Evangelos Skoulas ◽  
Emmanuel Stratakis ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Repetition Rate ◽  
Laser Processing ◽  
Laser Pulses ◽  
High Repetition Rate ◽  
Femtosecond Laser Pulses ◽  
Surface Structures ◽  
Complex Structures ◽  
Direct Writing ◽  
Wide Range

The replication of complex structures found in nature represents an enormous challenge even for advanced fabrication techniques, such as laser processing. For certain applications, not only the surface topography needs to be mimicked, but often also a specific function of the structure. An alternative approach to laser direct writing of complex structures is the generation of laser-induced periodic surface structures (LIPSS), which is based on directed self-organization of the material and allows fabrication of specific micro- and nanostructures over extended areas. In this work, we exploit this approach to fabricate complex biomimetic structures on the surface of steel 1.7131 formed upon irradiation with high repetition rate femtosecond laser pulses. In particular, the fabricated structures show similarities to the skin of certain reptiles and integument of insects. Different irradiation parameters are investigated to produce the desired structures, including laser repetition rate and laser fluence, paying special attention to the influence of the number of times the same area is rescanned with the laser. The latter parameter is identified to be crucial for controlling the morphology and size of specific structures. As an example for the functionality of the structures, we have chosen the surface wettability and studied its dependence on the laser processing parameters. Contact angle measurements of water drops placed on the surface reveal that a wide range of angles can be accessed by selecting the appropriate irradiation parameters, highlighting also here the prominent role of the number of scans.

scholarly journals Passive Q-Switching by Cr4+:YAG Saturable Absorber of Buried Depressed-Cladding Waveguides Obtained in Nd-Doped Media by Femtosecond Laser Beam Writing

Materials ◽  
2018 ◽  
Vol 11 (9) ◽  
pp. 1689 ◽  
Author(s):  
Gabriela (Salamu) ◽  
Nicolaie Pavel
Keyword(s):  
Femtosecond Laser ◽  
Laser Beam ◽  
Repetition Rate ◽  
Peak Power ◽  
Continuous Wave ◽  
Average Power ◽  
Laser Pulses ◽  
Direct Writing ◽  
Optical Efficiency ◽  
Femtosecond Laser Beam

We report on laser performances obtained in Q-switch mode operation from buried depressed-cladding waveguides of circular shape (100 μm diameter) that were inscribed in Nd:YAG and Nd:YVO4 media by direct writing with a femtosecond laser beam. The Q-switch operation was realized with a Cr4+:YAG saturable absorber, aiming to obtain laser pulses of moderate (few μJ) energy at high (tens to hundreds kHz) repetition rate. An average power of 0.52 W at 1.06 μm consisting of a train of pulses of 7.79 μJ energy at 67 kHz repetition rate, was obtained from a waveguide realized in a 4.8 mm long, 1.1-at % Nd:YAG ceramics; the pulse peak power reached 1.95 kW. A similar waveguide that was inscribed in a 3.4 mm long, 1.0-at % Nd:YVO4 crystal yielded laser pulses with 9.4 μJ energy at 83 kHz repetition rate (at 0.77 W average power) and 1.36 kW peak power. The laser performances obtained in continuous-wave operation were discussed for each waveguide used in the experiments. Thus, a continuous-wave output power of 1.45 W was obtained from the circular buried depressed-cladding waveguide inscribed in the 1.1-at %, 4.8 mm long Nd:YAG; the overall optical-to-optical efficiency, with respect to the absorbed pump power, was 0.21. The waveguide inscribed in the 1.0-at %, 3.4 mm long Nd:YVO4 crystal yielded 1.85 W power at 0.26 overall optical efficiency. This work shows the possibility to build compact laser systems with average-to-high peak power pulses based on waveguides realized by a femtosecond (fs) laser beam direct writing technique and that are pumped by a fiber-coupled diode laser.

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