Rapid Fabrication of Micro Optical Elements Using DMD-Based Maskless Lithography Technique

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.146-147.143 ◽

2010 ◽

Vol 146-147 ◽

pp. 143-146 ◽

Cited By ~ 1

Author(s):

Xiao Wei Guo ◽

Qi Ming Dong

Keyword(s):

Low Cost ◽

Maskless Lithography ◽

Optical Elements ◽

Rapid Fabrication ◽

Lithography Technique

A low-cost microfabrication tool based on digital mirror device(DMD) is presented in this paper. The imaging principle of the system is described and the fabrication methods for binary and nonbinary micro optical elements(MOE) are also discussed in detail. It is expected to provide an understanding of MOEs fabrication using DMD-based maskless lithography technique.

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Low-Cost, Large-Area, Facile, and Rapid Fabrication of Aligned ZnO Nanowire Device Arrays

ACS Applied Materials & Interfaces ◽

10.1021/acsami.6b01594 ◽

2016 ◽

Vol 8 (21) ◽

pp. 13466-13471 ◽

Cited By ~ 29

Author(s):

Gerard Cadafalch Gazquez ◽

Sidong Lei ◽

Antony George ◽

Hemtej Gullapalli ◽

Bernard A. Boukamp ◽

...

Keyword(s):

Low Cost ◽

Zno Nanowire ◽

Large Area ◽

Rapid Fabrication ◽

Nanowire Device

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On-Chip Fabrication of None-Dead-Volume Microtips for ESI-MS Applications

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.121-123.611 ◽

2007 ◽

Vol 121-123 ◽

pp. 611-614

Author(s):

Che Hsin Lin ◽

Jen Taie Shiea ◽

Yen Lieng Lin

Keyword(s):

Surface Tension ◽

Low Cost ◽

Microfluidic Channel ◽

Dead Volume ◽

Esi Ms ◽

Rapid Fabrication ◽

Chip Fabrication ◽

Novel Method ◽

On Chip ◽

Highly Uniform

This paper proposes a novel method to on-chip fabricate a none-dead-volume microtip for ESI-MS applications. The microfluidic chip and ESI tip are fabricated in low-cost plastic based materials using a simple and rapid fabrication process. A constant-speed-pulling method is developed to fabricate the ESI tip by pulling mixed PMMA glue using a 30-μm stainless wire through the pre-formed microfluidic channel. The equilibrium of surface tension of PMMA glue will result in a sharp tip after curing. A highly uniform micro-tip can be formed directly at the outlet of the microfluidic channel with minimum dead-volume zone. Detection of caffeine, myoglobin, lysozyme and cytochrome C biosamples confirms the microchip device can be used for high resolution ESI-MS applications.

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Measuring Optical Properties of Advanced Nano/Micro-Periodic Structures Fabricated by Multi-Exposure Interference Lithography

JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing ◽

10.1115/lemp2020-8571 ◽

2020 ◽

Author(s):

Shuzo Masui ◽

Masaki Michihata ◽

Kiyoshi Takamasu ◽

Satoru Takahashi

Keyword(s):

Periodic Structures ◽

Low Cost ◽

Industrial Applications ◽

Interference Lithography ◽

High Dispersion ◽

Optical Elements ◽

Precise Control ◽

Periodic Grating ◽

Interference Fringes ◽

Multiple Interference

Abstract Functional optical elements based on nano/micro-periodic structures have attracted much attention. Since the fabrication of these dual-periodic structures requires precise control of periodicity, the semiconductor process such as an electron beam lithography has been mainly employed. However, these techniques have problems with expensive and low throughput for industrial applications. Therefore, there remains a need for low cost and high throughput fabrication methods of dual-periodic structures. Then we developed a multi-exposure interference lithography (MEIL) system using rotational Lloyd’s mirror interferometer to overcome these problems. The advantages of interference lithography are a large processing area and low cost. Our developed rotational Lloyd’s mirror setup enables us to a highly precise superposition of multiple interference fringes by multi-exposure. Furthermore, we developed a measurement setup for reflective diffractive elements using a two axial rotating stage and measured the diffraction properties of the fabricated dual-periodic diffraction gratings. In this paper, as a demonstration, we succeeded in the fabrication of high-dispersion diffraction grating with an enhanced diffraction efficiency of the −3rd order light. The fabricated shapes have a periodicity of 1997 nm and 665 nm. Furthermore, it was confirmed that the intensity of the −3rd order light was enhanced by about 10 times compared to the single periodic grating.

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Low-cost Polymer Fresnel Microlens Array Fabricated by Maskless Lithography

Latin America Optics and Photonics Conference ◽

10.1364/laop.2012.ls4c.4 ◽

2012 ◽

Author(s):

G.A. Cirino ◽

S.A. Lopera ◽

L.G. Neto ◽

A.N. Montagnoli ◽

R.D. Mansano

Keyword(s):

Low Cost ◽

Microlens Array ◽

Maskless Lithography

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Tunable laser induced periodic surface structures in Ge2Sb2Te5 thin films

Journal of Physics Conference Series ◽

10.1088/1742-6596/2086/1/012170 ◽

2021 ◽

Vol 2086 (1) ◽

pp. 012170

Author(s):

Irina G Bessonova ◽

Pavel I Trofimov ◽

Petr I Lazarenko ◽

Demid A Kirilenko ◽

Nikolay A Bert ◽

...

Keyword(s):

Thin Films ◽

Phase Change ◽

Low Cost ◽

Beam Steering ◽

Tunable Laser ◽

Surface Structures ◽

Periodic Surface ◽

Light Localization ◽

Rapid Fabrication ◽

Direct Laser

Abstract Planar photonic structures, such as gratings and metasurfaces, are routinely used for beam steering, waveguide coupling, and light localization. However, conventional fabrication techniques that involve lithography are demanding in terms of time and cost. Much cheaper and simpler methods for surface patterning and formation of periodic surface structures are enabled by direct laser processing. Here, we demonstrate low-cost rapid fabrication of high-quality phase gratings based on the formation of laser induced periodic surface structures (LIPSS, or ripples) in Ge2Sb2Te5 (GST) thin films. Due to unique phase change properties of GST, the structures demonstrate strong modulation of refractive index with period controlled by the wavelength of laser irradiation. We study the formation of phase change LIPSS in a broad range of excitation wavelengths and observe transition between regimes with different orientations of generated ripples with respect to laser polarization.

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Rapid fabrication of versatile omni-directional and long-distance three-dimensional flow paper-fluidic analytical devices using a cut-and-insert method for biomedical applications

Analytical Methods ◽

10.1039/c8ay01318g ◽

2018 ◽

Vol 10 (38) ◽

pp. 4648-4654 ◽

Cited By ~ 3

Author(s):

Tae Joon Kwak ◽

Wookkun Kwon ◽

Jiang Yang ◽

Sang Woo Lee ◽

Woo-Jin Chang

Keyword(s):

Liquid Flow ◽

Biomedical Applications ◽

Low Cost ◽

Three Dimensional ◽

Long Distance ◽

Three Dimensional Flow ◽

Dimensional Flow ◽

Rapid Fabrication ◽

Paper Fluidics ◽

Cost Regime

Paper fluidics has recently offered an approach to precisely guide liquid flow in analytical devices with a low-cost regime.

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Complex optical elements for scanning helium microscopy through 3D printing

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/ac3a3e ◽

2021 ◽

Author(s):

Matthew Bergin ◽

Thomas Myles ◽

Aleksandar Radić ◽

Christopher Hatchwell ◽

Sam Lambrick ◽

...

Keyword(s):

3D Printing ◽

Multiple Scattering ◽

Low Cost ◽

Optical Element ◽

Next Generation ◽

Background Signal ◽

Optical Elements ◽

Cost Components

Abstract Developing the next generation of scanning helium microscopes requires the fabrication of optical elements with complex internal geometries. We show that resin stereolithography (SLA) 3D printing produces low-cost components with the requisite convoluted structures whilst achieving the required vacuum properties, even without in situ baking. As a case study, a redesigned pinhole plate optical element of an existing scanning helium microscope was fabricated using SLA 3D printing. In comparison to the original machined component, the new optical element minimised the key sources of background signal, in particular multiple scattering and the secondary effusive beam.

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