Enchancement of Mechanical Properties in BaTiO3 Ferroelectric Thin Films

2010 ◽  
Vol 150-151 ◽  
pp. 599-602 ◽  
Author(s):  
Cheng Lu ◽  
Xiang Yun Deng ◽  
Xiao Fen Guan ◽  
Zhong Wen Tan ◽  
Yan Jie Zhang ◽  
...  

Surface structure and mechanical properties of BaTiO3 thin films prepared by sol-gel process were investigated by XP-2 profiler and nano-indention. The results indicated that the thickness of thin films got thicker with sintering temperature and the thickness-increasing rate differ from different solvent. The hardness and elastic modulus were enhanced due to the presence of residual stress which was compression and probably induced by fabrication method. The maximum hardness is 9.98GPa when the Young’s modulus is 127.41GPa with ethanol as solvent sintered at 1000oC.

2017 ◽  
Vol 43 (16) ◽  
pp. 13063-13068 ◽  
Author(s):  
Haimin Li ◽  
Jianguo Zhu ◽  
Qianbao Wu ◽  
Jia Zhuang ◽  
Hongli Guo ◽  
...  

2009 ◽  
Vol 24 (9) ◽  
pp. 2974-2985 ◽  
Author(s):  
Erik G. Herbert ◽  
Warren C. Oliver ◽  
Maarten P. de Boer ◽  
George M. Pharr

A new method is proposed to determine the elastic modulus and residual stress of freestanding thin films based on nanoindentation techniques. The experimentally measured stiffness-displacement response is applied to a simple membrane model that assumes the film deformation is dominated by stretching as opposed to bending. Dimensional analysis is used to identify appropriate limitations of the proposed model. Experimental verification of the method is demonstrated for Al/0.5 wt% Cu films nominally 22 µm wide, 0.55 µm thick, and 150, 300, and 500 µm long. The estimated modulus for the four freestanding films match the value measured by electrostatic techniques to within 2%, and the residual stress to within 19.1%. The difference in residual stress can be completely accounted for by thermal expansion and a modest change in temperature of 3 °C. Numerous experimental pitfalls are identified and discussed. Collectively, these data and the technique used to generate them should help future investigators make more accurate and precise measurements of the mechanical properties of freestanding thin films using nanoindentation.


1991 ◽  
Vol 243 ◽  
Author(s):  
S.P. Faure ◽  
P. Gaucher ◽  
J.P. Ganne

AbstractFerroelectric thin films of PbZr0.5Ti0.5O3 were prepared by sol-gel process. Top electrodes of different sizes were deposited on thin films in order to study their influence on electrical properties. Histograms of the measured electrical characteristics are related to the electrode sizes. By reducing the electrode size, it is possible to improve the electrical properties of the film. Various properties, such as remanent polarization Pr and coercive voltage Vc, were measured statistically in order to show the evolution of their mean value and of their variance with the electrode size.


2015 ◽  
Vol 815 ◽  
pp. 171-175
Author(s):  
Hong Cheng Liu ◽  
Wei Jun Zhang ◽  
Xiao Chen Zhang ◽  
Qian Yu ◽  
Jue Wang

s. Yttium-substituted bismuth titanate (Bi4-xYxTi3O12, BYT) thin films were deposited on the (111)Pt/Ti/SiO2(100) substrates by a modified Sol-Gel process and studied in this work in terms ofY3+-modified microstructure and phase development as well as ferroelectric properties. With the aid of the fist-principle, the position of Y3+substitution for Bi3+on the microstructure of BYT was studied.The phase change in the formation of BYT crystalline and the effect of Y3+substitution for Bi3+on the microstructure of BYT was studiedbyXRD. The results showed that the optimal properties of the obtained BYT ferroelectric thin films werex:0.6. The ferroelectric properties of the films were also investigated. When the Y-substituted contentxwas equal to 0.6, the remnant polarization was the largest. The remnant polarization 2Prvalue was equal to 16.02μC/cm2and the coercive fieldEcvalue was 88 kV/cm.


2013 ◽  
Vol 734-737 ◽  
pp. 2328-2331
Author(s):  
Yu Fei You ◽  
C.H. Xu ◽  
Jing Zhe Wang ◽  
Jun Peng Wang

Sol-gel method is used for the formation of Pb0.499Sr0.499TiO3 (PST)thin films. The initial films were prepared with spin coating sol solution on silicon wafer and drying at room temperature and then heating coated dry sol film at 400°C for 10min. This process was repeated for 1-4 times to obtain 4 initial films with different thicknesses. The 4 initial films were annealed at 700°C for 2h to obtain PST ceramics films. The morphologies of the surface and cross-section of PST films were observed with a scanning electronic microscope (SEM). The phase structures of PST films were analyzed using X-ray diffraction meter (XRD). Experimental results show that PST film prepared by coating sol on silicon with different thicknesses can be high smooth,uniform and compact film.


2013 ◽  
Vol 537 ◽  
pp. 307-310 ◽  
Author(s):  
S. Zhang ◽  
D.J. Li ◽  
L. Dong ◽  
H.Q. Gu ◽  
R.X. Wan

Ternary Zr-Nb-N nanocomposite coatings were synthesized on Si(100) substrates by Multi-target Magnetron Co-sputtering. The structure and chemical composition and binding energy of coatings were characterized by X-ray diffractometry (XRD) and Energy-dispersive X-ray spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS). The results of measurements of Nano Indenter indicated that the maximum hardness was up to 36 GPa and elastic modulus was close to 425 GPa at the 30 W of Zr power and 120 W of NbN power. The hardest coating also showed the modest residual stress. These Zr-Nb-N coatings appeared to be a promising composite coating system suitable for engineering applications.


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