In Situ Template Synthesis of TiO2 Nanotube Array Films
Anodic aluminum oxide (AAO) is commonly used as a starting template for fabrication of several kinds of functional nanoscale devices due to its homogeneous nanohole structure with high aspect ratio. In this paper, high density and uniform titanium dioxide nanotube array films were prepared via liquid phase deposition method by immersing the AAO templates in an aqueous ammonium hexafluorotitanate solution. The phase and microstructure of the nanotube array films were characterized by X-ray diffraction and field-emission scanning electron microscopy. It was found that the mean inner diameters of nanotube are 40-100 nm, mainly depended on different templates and post treatment condition; the phase of as-deposited TiO2 array film was amorphous, while it became anatase at above 400°C.