Effect of NH3 Atmosphere on Preparation of Al2O3-AlN Composite Film by Laser CVD
Keyword(s):
Α Al2o3
◽
Al2O3-AlN composite film was first prepared by laser chemical vapor deposition (laser CVD) using aluminum acetylacetonate (Al(acac)3) and ammonia (NH3) as source materials. The effects of NH3 on the crystal phase, composition and microstructure were investigated. The crystal phase changed from α-Al2O3 to AlN gradually with increasing the mole ratio of NH3 to Ar. Al2O3-AlN composite film was obtained at NH3/Ar ratio ranged from 0.09 to 0.16 (Tdep = 862–887 K), and AlN granular grains were embedded in between α-Al2O3 polyhedral grains.
2010 ◽
Vol 256
(12)
◽
pp. 3906-3911
◽
2010 ◽
Vol 204
(14)
◽
pp. 2302-2306
◽
2011 ◽
Vol 239-242
◽
pp. 318-321
Keyword(s):
Orientation control of α-Al2O3 films prepared by laser chemical vapor deposition using a diode laser
2010 ◽
Vol 118
(1377)
◽
pp. 366-369
◽
2012 ◽
Vol 508
◽
pp. 279-282
◽