Statistical Model of a Thin Film Formation

This paper presents a model of a thin film formation process of an amorphous alloy as a sequential procedure when a conditional unit of substance is randomly thrown onto a substrate at each next step. The islands of a precipitant are generated on the substrate with an increase of number of steps (density defects of substance). We determine the probability distribution of an island area, which shows the maximum informational entropy. An algorithm for computing estimates of parameters of this distribution is obtained. The results of processing experimental data are presented. We demonstrate that the proposed distribution is more consistent with the experimental data than the Pareto distribution.