Study of Hole-Machining on Pyrex Wafer by Electrochemical Discharge Machining (ECDM)

2006 ◽  
Vol 505-507 ◽  
pp. 1207-1212 ◽  
Author(s):  
Yunn Shiuan Liao ◽  
Wen Yang Peng

The gap control problem in hole-machining of Pyrex® wafer by electrochemical discharge machining (ECDM) to obtain a smooth quality and acceptable material removal rate is studied. Analysis of the pulse signals shows that the average current pulse interval is constant, and it is mainly related to the ion translation conditions, such as the electrolyte concentration and the flushing strategy. The most steady and intense average current density can be obtained if the voltage on-time is around 3 times the average current pulse interval and the voltage off-time is 1/4 of the on-time for bubble film dissipation. The utmost allowable feed rate at each depth is recorded as the reference of the feed rate in real continuous machining to avoid the damage to the wafer. By applying 80% of the extreme allowable feed rate, 99.9% quality-proved holes can be acquired. The diametric error at the entrance or exit is within 6%. Besides, there is no crater-like problem around the hole that facilitates the succeeding bonding process. This study contributes to the successful production of reusable optical biological chips with integrated micro fluidic channels.

Micromachines ◽  
2021 ◽  
Vol 12 (9) ◽  
pp. 1077
Author(s):  
Islam Md. Rashedul ◽  
Yan Zhang ◽  
Kebing Zhou ◽  
Guoqian Wang ◽  
Tianpeng Xi ◽  
...  

Electrochemical discharge machining (ECDM) is an emerging method for developing micro-channels in conductive or non-conductive materials. In order to machine the materials, it uses a combination of chemical and thermal energy. The tool electrode’s arrangement is crucial for channeling these energies from the tool electrode to the work material. As a consequence, tool electrode optimization and analysis are crucial for efficiently utilizing energies during ECDM and ensuring machining accuracy. The main motive of this study is to experimentally investigate the influence of different electrode materials, namely titanium alloy (TC4), stainless steel (SS304), brass, and copper–tungsten (CuW) alloys (W70Cu30, W80Cu20, W90Cu10), on electrodes’ electrical properties, and to select an appropriate electrode in the ECDM process. The material removal rate (MRR), electrode wear ratio (EWR), overcut (OC), and surface defects are the measurements considered. The electrical conductivity and thermal conductivity of electrodes have been identified as analytical issues for optimal machining efficiency. Moreover, electrical conductivity has been shown to influence the MRR, whereas thermal conductivity has a greater impact on the EWR, as characterized by TC4, SS304, brass, and W80Cu20 electrodes. After that, comparison experiments with three CuW electrodes (W70Cu30, W80Cu20, and W90Cu10) are carried out, with the W70Cu30 electrode appearing to be the best in terms of the ECDM process. After reviewing the research outcomes, it was determined that the W70Cu30 electrode fits best in the ECDM process, with a 70 μg/s MRR, 8.1% EWR, and 0.05 mm OC. Therefore, the W70Cu30 electrode is discovered to have the best operational efficiency and productivity with performance measures in ECDM out of the six electrodes.


Author(s):  
B.R. Sarkar ◽  
B. Doloi ◽  
B. Bhattacharyya

Electrochemical discharge machining (ECDM) process has great potential to machine hard, brittle and electrically non-conducting materials in micron range. The objective of this paper is to investigate into electrochemical discharge micro-machining on electrically semi-conductor type silicon carbide (SiC) material so as to study the effects of applied voltage, electrolyte concentration and inter-electrode gap on material removal rate (MRR) and radial overcut (ROC) of micro-drilled hole. Experiments were conducted based on L9 array of Taguchi method with stainless steel µ-tool of 300µm diameter using NaOH electrolyte. An attempt has been made to find out the single as well as multi-objective optimal parametric combinations for maximum MRR and minimum ROC. The single-objective parametric combinations were selected as 45V/20wt%/20mm and 25V/20wt%/40mm for maximum MRR and minimum ROC respectively whereas multi-objective optimal parametric combinations was found as 25V/20wt%/40mm. Further mathematical models have been developed between the above machining parameters and characteristics.


2014 ◽  
Vol 939 ◽  
pp. 161-168 ◽  
Author(s):  
Kun Ling Wu ◽  
Hsin Min Lee ◽  
Kuan Hwa Chin

Electrochemical discharge machining (ECDM) is the preferred non-traditional process technology in recent years, The main processing is applied to machining non-conductive hard brittle materials. This study investigated the precision and stability of quartz fabricated by ECDM and explored the optimal processing parameters including size of electrode, machining speed as well as pulse-on and pulse-off duration. Microgrooves machined under the optimal processing parameters with adjusted rotational speed and feed rate were examined to understand the effect of different ECDM parameters on machining performance. The results indicate that micro-holes of better morphology could be obtained under pulse voltage of 40 V, electrolyte concentration of 5 M, electrode size of 125 μm. Moreover, rotational speed of 1500 rpm and pulse-on/pulse-off (ms) ratio of 1:0.6 gave higher machining accuracy with smaller hole diameter and shorter machining time. Finally, microgrooves machined under the optimal processing parameters showed the best accuracy in dimension and cross-sectional morphology at rotational speed of 2500 rpm, pulse-on /pulse-off (ms) ratio of 1:1.6, and feed rate of 3000 μm/min.


Author(s):  
Arindam Debroy

It is very important to select the optimal parametric values for various non-traditional machining processes (NTM) for improving their performance. The performance measures of NTM processes include material removal rate (MRR), radial overcut (ROC), heat affected zone (HAZ), etc. In this chapter, particle swarm optimization has been used to find out the optimal parametric settings for electrochemical discharge machining (ECDM) to improve its performance measure. Both single-objective as well as multi-objective optimization has been performed and the results have been compared with those obtained by other researchers.


2020 ◽  
Vol 978 ◽  
pp. 121-132
Author(s):  
Nitesh Kumar ◽  
Harish Bishwakarma ◽  
Prasenjit Sharma ◽  
Purshottam Kumar Singh ◽  
Alok Kumar Das

Micro-electrochemical discharge machining is hybrid machining process which is based on combined principle of electro discharge machining and electro chemical machining. It is suitable for machining of both conductive as well as non-conductive materials. In this study a micro hole drilled on Ti-6Al-4V as work piece by varying machining parameters like electrolyte concentration, voltage and duty factor at three different levels. Orthogonal array L9 considered for design and performing experiments. The Grey relation analysis (GRA) was performed to optimize the output parameters i.e. material removal rate (MRR) and hole tapper angle (HTA). The result reveals that voltage was the most significant factor for both MRR and HTA followed by electrolyte concentration and duty factor. The maximum MRR and minimum taper angle are 1.50 mg/min and 0.98 ° obtained respectively. The GRA show optimal machining parameters at electrolyte concentration 3M, voltage 40 V and duty factor 25% respectively.


Author(s):  
Baoyang Jiang ◽  
Shuhuai Lan ◽  
Jun Ni

Electrochemical discharge machining (ECDM) is a non-conventional micromachining technology, and is highlighted for non-conductive brittle materials. However, the outcomes of ECDM have many restrictions in application due to limitations on efficiency, accuracy, and machining quality. In this paper, a drilling incorporated ECDM process is presented and analyzed to enhance material removal rate in ECDM drilling process. Incorporating micro-drilling into ECDM significantly increases the rate of material removal, especially in deep hole drilling. As fundamentals of the machining process, material removal mechanisms have been investigated to account for the increment in material removal rate by incorporating micro-drilling. Vibration of tool electrode, induced by a piezo-actuator, was introduced to further enhance material removal rate. Quantitative studies were conducted to determine the appropriate process parameters of drilling incorporated ECDM with tool vibration.


2021 ◽  
Author(s):  
Boopathi Sampath ◽  
Sureshkumar Myilsamy ◽  
Sudhager Sukkasamy

Abstract In this research, the mixing of compressed air with the minimum quantity of water is used as a dielectric medium and the cryogenically cooled molybdenum wire is used as a tool in wire-cut electrical discharge machining (WEDM) to encourage the eco-friendly production, called cryogenically cooled near-dry WEDM process. The nitrogen gas-cooled wire tool is utilized to cut the Inconel 718 alloy workpiece to prevent wire breakage and maintain enough electrical conductivity. The preliminary experiments were conducted to compare wet, dry, near-dry, and cryogenically cooled near-dry WEDM processes. It was revealed that cryogenic cooled near-dry WEDM is better performance than dry, near-dry WEDM except for the wet process. The systematic experiments of eco-friendly cryogenically cooled near-dry WEDM have been conducted to analyse the effect of input factors like spark current, pulse-width, pulse-interval, and mixing water flow rate on material removal rate (MRR) and surface roughness (SR) using Box–Behnken method. The fitted models and response surface graphs were developed to analyse the influences of input factors on each response parameter. It was concluded that MRR and SR of cryogenically cooled near-dry WEDM are increased by maximizing spark current, pulse-width, and flow rate, conversely, both responses were decreased by increasing pulse-interval. The technique for order of preference by similarity to ideal solution (TOPSIS) technique has been applied to predict the best combination of input factors for satisfying the optimal values of both responses.


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