In Situ Mass Spectrometry for Chemical Identification in SiC Epitaxial Deposition

2007 ◽  
Vol 556-557 ◽  
pp. 121-124
Author(s):  
Brian H. Ponczak ◽  
James D. Oliver ◽  
Soon Cho ◽  
Gary W. Rubloff
Keyword(s):  
Mass Spectrometry ◽  
Mass Spectrometer ◽  
Chemical Species ◽  
Chemical Identification ◽  
Quadrupole Mass ◽  
Decomposition Products ◽  
Epitaxial Deposition ◽  
Chemical Modelling ◽  
Insight Into

A quadrupole mass spectrometer unit was utilized to accurately detect the chemical species present inside a SiC CVD reactor growth chamber before, during, and after epitaxial deposition. The in-situ mass spectrometer has been able to confirm the presence of silane (SiH4) and propane (C3H8) decomposition products (eg. Si and CH4) that were predicted from chemical modelling, and give insight into specific reaction kinetics. Additionally, the mass spectrometer has positively detected trace amounts of oxygen, which has helped to identify process weaknesses and possible sources of vacuum leaks.

Gas Phase Chemistry Study During Deposition of a-Si:H and μc-Si:H Films by HWCVD using Quadrupole Mass Spectrometry

2002 ◽  
Vol 715 ◽  
Author(s):  
Samadhan B. Patil ◽  
Alka A. Kumbhar ◽  
R. O. Dusane
Keyword(s):  
Mass Spectrometry ◽  
Gas Phase ◽  
Chemical Species ◽  
Quadrupole Mass ◽  
Film Properties ◽  
Quadrupole Mass Spectrometry ◽  
Gas Phase Chemistry ◽  
Hydrogen Dilution ◽  
Phase Chemistry

AbstractAmorphous and microcrystalline silicon films were deposited by HWCVD under different deposition conditions and the gas phase chemistry was studied by in situ Quadrupole Mass Spectrometry. Attempt is made to correlate the properties of the films with the gas phase chemistry during deposition. Interestingly, unlike in PECVD, partial pressure of H2 is higher than any other species during deposition of a-Si:H as well as μc-Si:H. Effect of hydrogen dilution on film properties and on concentration of various chemical species in the gas phase is studied. For low hydrogen dilution [H2]/ [SiH4] from 0 to 1 (where [SiH4] is 10 sccm), all films deposited are amorphous with photoconductivity gain of ∼ 106. During deposition of these amorphous films SiH2 was dominant in gas phase next to [H2]. Interestingly [Si]/[SiH2] ratio increases from 0.4 to 0.5 as dilution increased from 0 to 1, and further to more than 1 for higher hydrogen dilution leading to [Si] dominance. At hydrogen dilution ratio 20, consequently films deposited were microcrystalline.

scholarly journals Multistage Fragmentation of Ion Trap Mass Spectrometry System and Pseudo-MS3of Triple Quadrupole Mass Spectrometry Characterize Certain (E)-3-(Dimethylamino)-1-arylprop-2-en-1-ones: A Comparative Study

2014 ◽  
Vol 2014 ◽  
pp. 1-9 ◽  
Author(s):  
Ali S. Abdelhameed ◽  
Adnan A. Kadi ◽  
Hatem A. Abdel-Aziz ◽  
Rihab F. Angawi ◽  
Mohamed W. Attwa ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Mass Spectrometer ◽  
Ion Trap ◽  
Quadrupole Mass Spectrometer ◽  
Ion Trap Mass Spectrometry ◽  
Triple Quadrupole ◽  
Quadrupole Mass ◽  
Triple Quadrupole Mass Spectrometer ◽  
Fragment Ions ◽  
Mass Spectrometry System

A new approach was recently introduced to improve the structure elucidation power of tandem mass spectrometry simulating the MS3of ion trap mass spectrometry system overcoming the different drawbacks of the latter. The fact that collision induced dissociation in the triple quadrupole mass spectrometer system provides richer fragment ions compared to those achieved in the ion trap mass spectrometer system utilizing resonance excitation. Moreover, extracting comprehensive spectra in the ion trap needs multistage fragmentation, whereas similar fragment ions may be acquired from one stage product ion scan using the triple quadrupole mass spectrometer. The new strategy was proven to enhance the qualitative performance of tandem mass spectrometry for structural elucidation of different chemical entities. In the current study we are endeavoring to prove our hypothesis of the efficiency of the new pseudo-MS3technique via its comparison with the MS3mode of ion trap mass spectrometry system. Ten pharmacologically and synthetically important (E)-3-(dimethylamino)-1-arylprop-2-en-1-ones (enaminones4a–j) were chosen as model compounds for this study. This strategy permitted rigorous identification of all fragment ions using triple quadrupole mass spectrometer with sufficient specificity. It can be used to elucidate structures of different unknown components. The data presented in this paper provide clear evidence that our new pseudo-MS3may simulate the MS3of ion trap spectrometry system.

Quantitative In Situ Mass Spectrometry Analysis of Mannitol Decomposition Products under Hydrothermal Conditions

2017 ◽  
Vol 31 (10) ◽  
pp. 10866-10873
Author(s):  
Pattasuda Duangkaew ◽  
Shuhei Inoue ◽  
Tsunehiro Aki ◽  
Yutaka Nakashimada ◽  
Yoshiko Okamura ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Mass Spectrometry Analysis ◽  
Hydrothermal Conditions ◽  
Decomposition Products ◽  
Spectrometry Analysis

Hypervalent Molecular Cluster: C28H4

2005 ◽  
Vol 494 ◽  
pp. 181-186
Author(s):  
M. Veljković ◽  
O. Nešković ◽  
A. Djerić ◽  
S. Veličković ◽  
V. Šipka
Keyword(s):  
Mass Spectrometry ◽  
Mass Spectrometer ◽  
Source Parameters ◽  
Carbon Cluster ◽  
Ion Source ◽  
Molecular Cluster ◽  
Hydrogen Atoms ◽  
Cluster Source ◽  
The Impact

A growing number of recent publications on clusters reflect a tremendous interest in these particles. These studies reveal new fundamental physical and chemical aspects of matter. Clusters are called the fifth state of matter: liquid, solid, cluster, gas and plasma. In this work, a carbon cluster was generated by a spark cluster source and detected by single focusing mass spectrometer in situ. We examined the effects of cluster source parameters on the generation of carbon cluster and report our initial results. This method should be useful for studying the mechanism of fullerene formation. In the case when carbon clusters generated in plasma arc are carried by the Ar or H2 gas flow downstream through a vacuum chamber to the ion source of mass spectrometer, we obtained a small binary carbon cluster C28H4 (hydrogenated fullerene). The empty fullerene is tetravalent and strongly binds four hydrogen atoms, which significantly weakens two different sets of bonds and leads to an open-shell electronic structure. Conclusion is that endohedral C28H4 are hypervalent. We have demonstrated how in situ mass spectrometry has led to the rapid development of an important branch of synthetic fullerene chemistry that has yielded many new small fullerenes and related derivatives with novel structures and properties. The impact of mass spectrometry on the synthesis of fullerene derivatives is the subject of this paper. Significantly, a large fraction of products could be condensed on a specially designed collection plate, which allows further spectroscopic characterization of new derivatives.

In situ 207Pb/206Pb isotope ratio measurements using two Daly detectors equipped on an ICP-mass spectrometer

2017 ◽  
Vol 32 (3) ◽  
pp. 686-691 ◽  
Author(s):  
Hideyuki Obayashi ◽  
Michitaka Tanaka ◽  
Kentaro Hattori ◽  
Shuhei Sakata ◽  
Takafumi Hirata
Keyword(s):  
Mass Spectrometry ◽  
Mass Spectrometer ◽  
Isotope Ratio ◽  
Simultaneous Detection ◽  
Pb Ions ◽  
Icp Mass Spectrometry ◽  
Isotope Ratio Measurements

The simultaneous detection of 206Pb and 207Pb ions has been made by multiple-ion counting ICP-mass spectrometry using two Daly detectors (MC-ICPMS).

scholarly journals 157-nm-Induced Resist Outgassing Studied by Film Thickness Loss and In-Situ Quadrupole Mass Spectrometry

2004 ◽  
Vol 17 (4) ◽  
pp. 671-673 ◽  
Author(s):  
Yoshinori Matsui ◽  
Shu Seki ◽  
Seiichi Tagawa ◽  
Shinji Kishimura ◽  
Masaru Sasago
Keyword(s):  
Mass Spectrometry ◽  
Film Thickness ◽  
Quadrupole Mass ◽  
Quadrupole Mass Spectrometry ◽  
Thickness Loss
Sign in / Sign up

Export Citation Format

Share Document