Silicon Carbide Crystalline Films Synthesis out of Organosilicon Monomers Vapors in Reactor with Cold Walls
2009 ◽
Vol 615-617
◽
pp. 173-176
Keyword(s):
X Ray
◽
The possibility of silicon carbide films production out of organosilicon chlorine-containing monomers is under analysis in this research. Silicon carbide films samples were produced by chemical deposition method out of gas phase in reactor with “cold walls”, in the conditions of low pressure. The influence of monomer type, substrate temperature on crystalline SiC films composition is also under consideration. The results of infrared spectroscopy, Raman scattering spectrometry and x-ray phase analysis are presented.
2012 ◽
Vol 204-208
◽
pp. 3952-3955
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2013 ◽
Vol 34
(4)
◽
pp. 659-666
◽
2006 ◽
Vol 21
(10)
◽
pp. 2550-2563
◽
2020 ◽
Vol 50
(9)
◽
pp. 764-769
Keyword(s):
2000 ◽
Vol 65
(1)
◽
pp. 1-31
◽
Keyword(s):