Effect of Trench Aspect Ratio on Microstructure and Texture in Damascene Cu Interconnects

2012 ◽  
Vol 706-709 ◽  
pp. 2605-2610
Author(s):  
L. Chen ◽  
G.J. Yuan ◽  
J.G. Xu ◽  
F. Guo ◽  
N. Pang
Keyword(s):  
Aspect Ratio ◽  
Grain Boundaries ◽  
Electron Backscatter Diffraction ◽  
Coincidence Site Lattice ◽  
X Ray Diffraction ◽  
X Ray ◽  
Cu Interconnects ◽  
Electron Backscatter ◽  
Line Spacing ◽  
Backscatter Diffraction

The effect of trench aspect ratio and line spacing on microstructure and texture in annealed damascene Cu interconnects has been investigated. The X-ray diffraction (XRD) and electron backscatter diffraction (EBSD) analyses of Cu lines, showed a preferred {111} orientation and the trenches reduce the proportion of high-angle grain boundaries and increase the fraction of coincidence site lattice (CSL) grain boundaries, comparing with the Cu blanket film. In addition, both trench aspect ratio and line spacing can largely affect the microstructure and texture in annealed damascene Cu interconnects.

scholarly journals Effect of TiO2-Nanoparticles on Ni Electrodeposition on Copper Wire

Metals ◽  
2020 ◽  
Vol 10 (3) ◽  
pp. 406
Author(s):  
Samiha Saad ◽  
Zakaria Boumerzoug ◽  
Anne Laure Helbert ◽  
François Brisset ◽  
Thierry Baudin
Keyword(s):  
Surface Morphology ◽  
Tio2 Nanoparticles ◽  
Vickers Microhardness ◽  
Electron Backscatter Diffraction ◽  
Copper Wire ◽  
X Ray Diffraction ◽  
X Ray ◽  
Electron Backscatter ◽  
Electrodeposited Nickel ◽  
Backscatter Diffraction

The objective of this work is to study, on a copper wire, the effect of TiO2-nanoparticles on electrodeposited nickel. Both the microstructure and surface morphology (texture) of the coating were investigated. This deposit is obtained from baths of sulfated electroplating Watts. The Ni-TO2 composite coating is deposited at a temperature of 45 °C. The composite deposit is prepared by adding nanoparticles of TiO2 to the electrolyte. The characterization has been carried out by X-ray diffraction, scanning electron microscopy, microhardness measurements, and electron backscatter diffraction (EBSD). Vickers microhardness was used to characterize the mechanical properties of the electrodeposited nickel. The results showed the effects of the TiO2 on the composition, the surface morphology, and the hardness of the deposited layer. However, there was not an effect of TiO2 nanoparticles on texture.

Surface Crystallization of Cordierite from Glass Studied by High-Temperature X-ray Diffraction and Electron Backscatter Diffraction (EBSD)

2011 ◽  
Vol 11 (10) ◽  
pp. 4660-4666 ◽  
Author(s):  
Wolfgang Wisniewski ◽  
Carlos André Baptista ◽  
Matthias Müller ◽  
Günter Völksch ◽  
Christian Rüssel
Keyword(s):  
High Temperature ◽  
Electron Backscatter Diffraction ◽  
Surface Crystallization ◽  
X Ray Diffraction ◽  
X Ray ◽  
Electron Backscatter ◽  
Backscatter Diffraction

Microstructural Evaluation of Alloy 800H After SCWL Exposure

2021 ◽  
Vol 7 (2) ◽  
Author(s):  
D. Marušáková ◽  
C. Aparicio ◽  
R. Fukač
Keyword(s):  
Supercritical Water ◽  
Electron Backscatter Diffraction ◽  
X Ray Diffraction ◽  
Alloy 800H ◽  
X Ray ◽  
Electron Backscatter ◽  
Microstructural Evaluation ◽  
The Matrix ◽  
Core Components ◽  
Backscatter Diffraction

Abstract Alloy 800H is a candidate material for supercritical water-cooled reactors (SCWR), specifically for in-core components in Canadian-type SCWR, that will operate at a pressure of 25 MPa and a core temperature from 350 °C to 625 °C. To evaluate this, several exposures to supercritical water took place at 395 °C and 25 MPa in a supercritical water loop (SCWL). The duration of each exposure was 500, 150, and 1000 h. Scanning electron microscopy (SEM) with electron backscatter diffraction (EBSD), in combination with Raman spectroscopy (RS) and X-ray diffraction (XRD), was used to evaluate the microstructure of alloy 800H after the exposures to supercritical water. All these methods confirmed the presence of magnetite and trevorite/chromite crystals, with a thickness of less than 1 μm, on the surface after each exposure. No significant change occurred after the second and third exposures. The matrix crystallography did not change during the exposures and demonstrated grain twinning with a grain size of 100–400 μm.

Stacking Fault Analysis of Epitaxial 3C-SiC on Si(001) Ridges

2016 ◽  
Vol 858 ◽  
pp. 147-150 ◽  
Author(s):  
Mojmír Meduňa ◽  
Thomas Kreiliger ◽  
Ivan Prieto ◽  
Marco Mauceri ◽  
Marco Puglisi ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Electron Backscatter Diffraction ◽  
Stacking Faults ◽  
Stacking Fault ◽  
Fault Analysis ◽  
X Ray Diffraction ◽  
X Ray ◽  
Electron Backscatter ◽  
Backscatter Diffraction

The stacking faults (SFs) in 3C-SiC epitaxially grown on ridges deeply etched into Si (001) substrates offcut towards [110] were quantitatively analyzed by electron microscopy and X-ray diffraction. A significant reduction of SF density with respect to planar material was observed for the {111} planes parallel to the ridges. The highest SF density was found in the (-1-11) plane. A previously observed defect was identified as twins by electron backscatter diffraction.

Comparison of electron backscatter and X-ray diffraction techniques for measuring dislocation density in Zircaloy-2

2019 ◽  
Vol 52 (2) ◽  
pp. 415-427 ◽  
Author(s):  
T. Skippon ◽  
L. Balogh ◽  
M. R. Daymond
Keyword(s):  
Dislocation Density ◽  
Electron Backscatter Diffraction ◽  
Profile Analysis ◽  
Line Profile Analysis ◽  
X Ray Diffraction ◽  
Density Measurements ◽  
X Ray ◽  
Ebsd Data ◽  
Electron Backscatter ◽  
Backscatter Diffraction

Two methods for measuring dislocation density were applied to a series of plastically deformed tensile samples of Zircaloy-2. Samples subjected to plastic strains ranging from 4 to 17% along a variety of loading paths were characterized using both electron backscatter diffraction (EBSD) and synchrotron X-ray line profile analysis (LPA). It was found that the EBSD-based method gave results which were similar in magnitude to those obtained by LPA and followed a similar trend with increasing plastic strain. The effects of microscope parameters and post-processing of the EBSD data on dislocation density measurements are also discussed. The typical method for estimating uncertainty in dislocation density measured via EBSD was shown to be overly conservative, and a more realistic method of determining uncertainty is presented as an alternative.

Shape Recovery and ε - γ Transformation in Fe29Mn7Si5Cr SMA

2008 ◽  
Vol 59 ◽  
pp. 86-91 ◽  
Author(s):  
Nele Van Caenegem ◽  
Kim Verbeken ◽  
Roumen H. Petrov ◽  
N.M. van der Pers ◽  
Yvan Houbaert
Keyword(s):  
Martensitic Transformation ◽  
Shape Memory ◽  
Shape Recovery ◽  
Electron Backscatter Diffraction ◽  
X Ray Diffraction ◽  
X Ray ◽  
Electron Backscatter ◽  
Shape Memory Behaviour ◽  
Backscatter Diffraction

The shape memory behaviour of a Fe29Mn7Si5Cr based alloy has been investigated. Characterization of the martensitic transformation and the different structural constituents was performed using optical microscopy, X-ray diffraction (XRD) methods and electron backscatter diffraction (EBSD). The transformation temperatures and the shape recovery were determined by dilatometry on prestrained samples.

Morphology Evolution of Grain Boundary Carbides in Highly Twinned Inconel Alloy 600

2016 ◽  
Vol 879 ◽  
pp. 1111-1116 ◽  
Author(s):  
Hui Li ◽  
Jiao Rong Ma ◽  
Xin Rong Liu ◽  
Shuang Xia ◽  
Wen Qing Liu ◽  
...  
Keyword(s):  
Grain Boundary ◽  
Grain Boundaries ◽  
Aging Time ◽  
Electron Backscatter Diffraction ◽  
Coincidence Site Lattice ◽  
Morphology Evolution ◽  
Alloy 600 ◽  
Inconel Alloy ◽  
Electron Backscatter ◽  
Backscatter Diffraction

The effects of grain boundary characters on the morphology evolution of grain boundary carbides in Inconel Alloy 600 with high proportional low Σ coincidence site lattice (CSL) boundaries aged at 715 oC for 1-100 h were investigated by scanning electron microscopy (SEM) and electron backscatter diffraction (EBSD). During the aging process, the carbides precipitated at coherent twin (Σ3) boundaries are very few and finest within all the aging time. Bar like carbides precipitated near both sides of the incoherent twin (Σ3) boundaries, and bigger carbides than that of coherent Σ3 boundaries had been found on the incoherent Σ3 boundaries. Bar like carbides precipitated near only one side of Σ9 boundaries, and much bigger carbides than that of Σ3 boundaries have been found on the Σ9 boundaries. The morphology of carbides precipitated at Σ27 and random grain boundaries are similar, and is bigger than that of precipitated at other grain boundaries. The carbides precipitated at grain boundaries with all types grow bigger with the aging time prolonging, but their growth rates are different.

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