Technology of SMD MOX Gas Sensors Rapid Prototyping

2020 ◽  
Vol 977 ◽  
pp. 231-237 ◽  
Author(s):  
Nikolay Samotaev ◽  
Konstantin Oblov ◽  
Denis Veselov ◽  
Boris Podlepetsky ◽  
Maya Etrekova ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Rapid Prototyping ◽  
Mechanical System ◽  
Gas Sensors ◽  
Complete Solution ◽  
Micro Electro Mechanical System ◽  
Clean Room ◽  
Fast Prototyping ◽  
Laser Micromilling

This work discusses the design of flexible laser micromilling technology for fast prototyping of metal oxide based (MOX) gas sensors in SMD packages as an alternative to traditional silicon clean room technologies. By laser micromilling technology it is possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also packages for MOX sensor, that gives complete solution for its integration in devices using IoT conception. The tests described in the work show the attainability of the stated results for the fabrication of microhotplates.

scholarly journals Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices

2018 ◽  
Vol 207 ◽  
pp. 04003 ◽  
Author(s):  
Nikolay Samotaev ◽  
Konstantin Oblov ◽  
Anastasia Ivanova
Keyword(s):  
Gas Sensors ◽  
Mass Production ◽  
Small Scale ◽  
Scale Production ◽  
Mems Devices ◽  
Clean Room ◽  
Factors Affecting ◽  
Technical Factors ◽  
Mox Sensors ◽  
Laser Micromilling

The flexible laser micromilling technology for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) gas sensors is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors in comparison with classical clean room technologies using for mass production MEMS devices. The main technical factors affecting on using MOX sensors in various applications are presented. Current results demonstrate that using described technology possible to manufacturing all parts of MOX gas sensor in the SMD form-factor SOT-23 package type.

scholarly journals Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors

Micromachines ◽  
2021 ◽  
Vol 12 (12) ◽  
pp. 1440
Author(s):  
Nikolay Samotaev ◽  
Konstantin Oblov ◽  
Pavel Dzhumaev ◽  
Marco Fritsch ◽  
Sindy Mosch ◽  
...  
Keyword(s):  
Rapid Prototyping ◽  
Gas Sensors ◽  
Gas Sensing ◽  
Manufacturing Method ◽  
Design And Optimization ◽  
Nano Fabrication ◽  
Sensor Fabrication ◽  
Semiconductor Gas Sensors ◽  
Metal Oxide Sensor ◽  
Laser Micromilling

The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping.

scholarly journals Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

Micromachines ◽  
2018 ◽  
Vol 9 (11) ◽  
pp. 557 ◽  
Author(s):  
Haotian Liu ◽  
Li Zhang ◽  
King Li ◽  
Ooi Tan
Keyword(s):  
Metal Oxide ◽  
Gas Sensors ◽  
Complementary Metal Oxide Semiconductor ◽  
Micro Electro Mechanical System ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Single Chip ◽  
Sensor Applications ◽  
Semiconductor Gas Sensor ◽  
Mems Technology

The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility.

scholarly journals Rapid Prototyping of MOX Gas Sensors in Form-Factor of SMD Packages

Proceedings ◽  
2019 ◽  
Vol 14 (1) ◽  
pp. 52 ◽  
Author(s):  
Nikolay Samotaev
Keyword(s):  
Form Factor ◽  
Gas Sensors ◽  
Hot Spot ◽  
Complete Solution ◽  
Spot Size ◽  
Smart Phones ◽  
Fast Time ◽  
3D Design ◽  
Mox Sensors ◽  
Laser Micromilling

By laser micromilling technology it is possible to fabricate custom MEMS microhotplate platform and also SMD package for MOX sensor, that gives complete solution for integration in mobile devices-smart phones, tablets and etc. The 3D design and fabrication of MEMS microhotplates and packages products occurs simultaneously that give opportunity for ultra-fast time making unique solutions for MOX sensors (number of microhotplates, hot spot size on microhotplates, diameter holes in package cap and etc.) without looking at standard solutions (primarily the package type).

scholarly journals Technology for SMD Packaging MOX Gas Sensors

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 934 ◽  
Author(s):  
Nikolay Samotaev ◽  
Konstantin Oblov ◽  
Anastasia Ivanova ◽  
Boris Podlepetsky ◽  
Nikolay Volkov ◽  
...  
Keyword(s):  
Form Factor ◽  
Metal Oxide ◽  
Gas Sensors ◽  
Small Scale ◽  
Scale Production ◽  
Economic Aspects ◽  
Technology Process ◽  
Aerosol Printing ◽  
Mox Sensors ◽  
Laser Micromilling

The perspective combination of laser micromilling technology and jet (aerosol) printing technologies for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) sensor is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors. Experiments with laser micromilling of Al2O3 ceramics confirmed possibility to produce MEMS microhotplate for MOX gas sensor in SMD package with form-factor SOT-23. Developed technology process is close to 3D prototype philosophy—rapid, simple and cheap.

Metal-oxide based ammonia gas sensors: A review

2020 ◽  
Vol 10 ◽  
Author(s):  
Priya Gupta ◽  
Savita Maurya ◽  
Narendra Kumar Pandey ◽  
Vernica Verma
Keyword(s):  
Metal Oxide ◽  
Metal Oxides ◽  
Gas Sensor ◽  
Gas Sensors ◽  
Review Paper ◽  
Gas Sensing ◽  
Gas Sensitivity ◽  
Ammonia Gas ◽  
Ammonia Sensing ◽  
Ammonia Gas Sensors

: This review paper encompasses a study of metal-oxide and their composite based gas sensors used for the detection of ammonia (NH3) gas. Metal-oxide has come into view as an encouraging choice in the gas sensor industry. This review paper focuses on the ammonia sensing principle of the metal oxides. It also includes various approaches adopted for increasing the gas sensitivity of metal-oxide sensors. Increasing the sensitivity of the ammonia gas sensor includes size effects and doping by metal or other metal oxides which will change the microstructure and morphology of the metal oxides. Different parameters that affect the performances like sensitivity, stability, and selectivity of gas sensors are discussed in this paper. Performances of the most operated metal oxides with strengths and limitations in ammonia gas sensing application are reviewed. The challenges for the development of high sensitive and selective ammonia gas sensor are also discussed.

Sulfur Dioxide Sensors

2021 ◽  
Keyword(s):  
Ionic Liquids ◽  
Sulfur Dioxide ◽  
Metal Oxide ◽  
Gas Sensors ◽  
Optical Sensors ◽  
Recent Progress ◽  
Amperometric Sensors ◽  
Metal Oxide Sensors ◽  
Semiconducting Metal Oxide

Recent progress on the sensing and monitoring of sulfur dioxide in the environment is presented. The sensing materials covered include potentiometric gas sensors, amperometric sensors, optical sensors involving colorimetric and fluorescence changes, sensors based on ionic liquids, semiconducting metal-oxide sensors, photoacoustic detectors and biosensors.

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