Formation of Diamond-Like Carbon Film on Organic Substrate by High Power Impulse Magnetron Sputtering

Using vacuum magnetron sputtering, preparation of diamond-like carbon film by middle transition layer of Ti, TiN and TiAlN, Ti/TiN/TiAlN in preparing multilayer structure of DLC carbon film on stainless steel substrates, research among different coating material of DLC carbon membrane structure, appearance, hardness, the influence of the interface bonding strength and wear resistance, the film contains some carbon chain structure sp3 hybridized carbon content in the highest and the excellent comprehensive mechanical properties of the material of the middle layer. Experimental studies find that Ti/TiN/TiAlN as transition layer DLC carbon film performance is good, obvious anti stripping adhesion properties, can reduce the diamond-like coating system caused by thermal expansion mismatch stress, using Ti/TiN/TiAlN transition layer of the interface bonding strength of the most outstanding in the middle.

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Single-crystal thin-film bonding on diamond-like carbon film by intermolecular force for super high-density integration of high-power LEDs

2008 IEEE International Electron Devices Meeting ◽

10.1109/iedm.2008.4796729 ◽

2008 ◽

Cited By ~ 1

Author(s):

M. Ogihara ◽

T. Sagimori ◽

M. Mutoh ◽

H. Furuta ◽

T. Suzuki ◽

...

Keyword(s):

Thin Film ◽

Single Crystal ◽

High Power ◽

Carbon Film ◽

High Density ◽

Diamond Like Carbon ◽

Intermolecular Force ◽

Diamond Like Carbon Film

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Analysis of diamond-like carbon film on enhancing thermal radiation of substrate of high-power LED

2019 20th International Conference on Electronic Packaging Technology(ICEPT) ◽

10.1109/icept47577.2019.246501 ◽

2019 ◽

Author(s):

Xingyang Wu ◽

Weilin Duan ◽

Siwei Wu ◽

Jianhua Zhang

Keyword(s):

Thermal Radiation ◽

High Power ◽

Carbon Film ◽

Diamond Like Carbon ◽

Diamond Like Carbon Film ◽

High Power Led

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Experimental Investigation on the DLC Film Coating Technology in Scroll Compressors of Automobile Air Conditioning

Energies ◽

10.3390/en13195103 ◽

2020 ◽

Vol 13 (19) ◽

pp. 5103

Author(s):

Zhilong He ◽

Lantian Ji ◽

Ziwen Xing

Keyword(s):

Magnetron Sputtering ◽

Bonding Strength ◽

Carbon Film ◽

Film Coating ◽

Diamond Like Carbon ◽

Scroll Compressor ◽

Coating Technology ◽

Unbalanced Magnetron Sputtering ◽

Diamond Like Carbon Film ◽

Unbalanced Magnetron

The friction of the orbiting scroll leads to large power consumption and low energy efficiency of the scroll compressor. The common methods to solve this problem are high cost and a complex process. Considering special structures and operating principles to apply the coating technology on the scroll compressor is a new subject. Given the material of the orbiting scroll being aluminum alloy, the unbalanced magnetron sputtering technology for the orbiting scroll of the scroll compressor was chosen and the Cr transition layer was coated to enhance the bonding strength. Moreover, we innovatively performed an experiment to verify the feasibility of unbalanced magnetron sputtering film coating technology for the diamond-like carbon film coated in the scroll compressor. This article elaborates the parameter test methods of the film properties before and after experiments and the experimental system components. The results showed that the diamond-like carbon film has low coefficient and high bonding strength, which renders it a good wear-reducing effect and an excellent self-lubricating property. Due to the thin film layer and high operating temperature, the thickness should be increased to raise the abrasion resistance. The refrigeration system with the scroll compressor coated with the diamond-like carbon film can satisfy the national standard conditions with low Vickers hardness. Its performance was improved at low speed. Therefore, the unbalanced magnetron sputtering with increased Cr bond layer is a feasible and appropriate technology for coating diamond-like carbon film.

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