Microwave Heating of Low-Temperature Plasma and Its Application

In this chapter, the results of theoretical and experimental studies of the interaction of an electromagnetic field with a plasma (fundamental interaction of the wave-particle type) both in the regime of standing waves (in the case of a resonator) and in the case of traveling waves in a waveguide are presented. The results of computer modeling the distribution of a regular electromagnetic field for various designs of electrodynamic structures are considered. The most attractive designs of electrodynamic structures for practical application are determined. A brief review and analysis of some mechanisms of stochastic plasma heating are given as well as the conditions for the formation of dynamic chaos in such structures are determined. Comparison analysis of microwave plasma heating in a regular electromagnetic field (in a regime with dynamical chaos) with plasma heating by random fields is considered. It is shown, that stochastic heating of plasma is much more efficient in comparison with other mechanisms of plasma heating (including fundamental interaction of the wave-wave type). The results obtained in this work can be used to increase the efficiency of plasma heating as well as to develop promising new sources of electromagnetic radiation in the microwave and optical ranges.

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Experimental studies of optical phenomena in laser-induced low-temperature plasma

10.1117/12.172719 ◽

1994 ◽

Author(s):

Vladimir N. Anisimov ◽

Vladimir Y. Baranov ◽

Oleg N. Derkach ◽

Vladimir A. Dolgov ◽

Mikhail F. Kanevskii ◽

...

Keyword(s):

Low Temperature ◽

Experimental Studies ◽

Low Temperature Plasma ◽

Temperature Plasma ◽

Optical Phenomena

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Effect of radical on defect and molecular structure of monolayer MoS2 by low temperature plasma treatment

Japanese Journal of Applied Physics ◽

10.35848/1347-4065/ac4b0d ◽

2022 ◽

Author(s):

Shuya ASADA ◽

Akihisa OGINO

Keyword(s):

Molecular Structure ◽

Low Temperature ◽

Plasma Treatment ◽

Photoelectron Spectroscopy ◽

Microwave Plasma ◽

Hydrogen Ions ◽

Low Temperature Plasma ◽

Temperature Plasma ◽

X Ray ◽

Ar Plasma

Abstract The aim of this study is to form the sulfur defects on monolayer molybdenum disulfide (MoS2) by low temperature microwave plasma treatment suppressing disturbance of molecular structure. CVD-grown and plasma treated multilayer MoS2 surface were analyzed to investigate the effects of H2 and Ar plasma treatment on sulfur defects and molecular structure. It was found that the disturbance of molecular structure was suppressed in the H2 plasma treatment compared to the Ar plasma treatment. Varying the incident ratio of hydrogen ions H+ and radicals H*, the influences of H2 plasma treatment with high and low H*/H+ ratio on monolayer MoS2 structure were discussed. As a result of X-ray photoelectron spectroscopy, Raman spectroscopy and photoluminescence analysis, sulfur defects increased with the increase in total amount of radical incident on MoS2. In addition, it is speculated that the etching with radical contributed to form sulfur defects suppressing the disturbance of molecular structure.

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Quantum Character of Electromagnetic Langmuir Oscillations in Conventional Electron-Ion Plasma

International Journal of Optics ◽

10.1155/2012/648741 ◽

2012 ◽

Vol 2012 ◽

pp. 1-8 ◽

Cited By ~ 2

Author(s):

Boris Alexandrovich Veklenko

Keyword(s):

Electromagnetic Field ◽

Low Temperature ◽

Thermodynamic Equilibrium ◽

Electron Interaction ◽

Low Temperature Plasma ◽

Temperature Plasma ◽

Langmuir Waves ◽

Ion Plasma ◽

Quantum Nature ◽

Quantum Charge

It is shown that the low-temperature plasma near-thermodynamic equilibrium cannot be classical because of a quantum nature of the longitudinal electromagnetic field and electron interaction with Rayleigh-Jeans distribution of Langmuir waves. The theory requires introduction of a dimensionless quantum charge whose value is greater than unity leading to a liquid-like behavior of the plasma.

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