Practical Guide to the Design, Fabrication, and Calibration of NIST
Nanocalorimeters
Keyword(s):
We report here on the design, fabrication, and calibration of nanocalorimeter sensors used in the National Institute of Standards and Technology (NIST) Nanocalorimetry Measurements Project. These small-scale thermal analysis instruments are produced using silicon microfabrication approaches. A single platinum line serves as both the heater and temperature sensor, and it is made from a 500 μm wide, 100 nm thick platinum trace, suspended on a 100 nm thick silicon nitride membrane for thermal isolation. Supplemental materials to this article (available online) include drawing files and LabVIEW code used in the fabrication and calibration process.
2013 ◽
Vol 56
(10)
◽
pp. 2398-2402
◽
2002 ◽
Vol 85
(9)
◽
pp. 2256-2260
◽
2016 ◽
Vol 18
(10)
◽
pp. 103036
◽
Keyword(s):
1992 ◽
Vol 30
(3)
◽
pp. 251-258
◽