Study of Nitrogen Effect on the Boron Diffusion during Heat Treatment in Polycrystalline Silicon/Nitrogen-Doped Silicon Thin Films
2011 ◽
Vol 50
(5R)
◽
pp. 051301
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Keyword(s):
2011 ◽
Vol 50
(5)
◽
pp. 051301
◽
Keyword(s):
Keyword(s):
1998 ◽
Vol 37
(Part 1, No. 8)
◽
pp. 4254-4257
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Keyword(s):
1998 ◽
Vol 37
(Part 2, No. 2A)
◽
pp. L112-L114
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2001 ◽
Vol 65
(1-4)
◽
pp. 577-583
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2012 ◽
Vol 121
(1)
◽
pp. 175-177
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2007 ◽
Vol 46
(3B)
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pp. 1286-1289
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Keyword(s):