The Precipitation of Si in AlCuSi Thin Films

1973 ◽  
Vol 31 ◽  
pp. 34-35 ◽  
Author(s):  
R. M. Anderson
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Heat Treatment ◽  
Solid Solution ◽  
Integrated Circuit ◽  
Copper Film ◽  
Solution Concentration ◽  
X Ray ◽  
Silicon Thin Films ◽  
Before And After

Aluminum-copper-silicon thin films have been considered as an interconnection metallurgy for integrated circuit applications. Various schemes have been proposed to incorporate small percent-ages of silicon into films that typically contain two to five percent copper. We undertook a study of the total effect of silicon on the aluminum copper film as revealed by transmission electron microscopy, scanning electron microscopy, x-ray diffraction and ion microprobe techniques as a function of the various deposition methods.X-ray investigations noted a change in solid solution concentration as a function of Si content before and after heat-treatment. The amount of solid solution in the Al increased with heat-treatment for films with ≥2% silicon and decreased for films <2% silicon.

Characterization of Ni-P and Ni-P-Al2O3 Heat Treated Layers

2017 ◽  
Vol 1143 ◽  
pp. 26-31
Author(s):  
Lucica Balint ◽  
Gina Genoveva Istrate
Keyword(s):  
Electron Microscopy ◽  
Heat Treatment ◽  
Corrosion Resistance ◽  
Composite Coatings ◽  
Treatment Temperature ◽  
Initial State ◽  
X Ray ◽  
Transmission Electron ◽  
Heat Treated ◽  
Before And After

Research has shown the relationship among hardness, usage and corrosion resistance Ni-P-Al2O3 composite coatings on steel support heat treated. The electroless strips were heat treated at 200°C, 300°C, 400°C, 500°C and 600°C. Further studies on corrosion, hardness and usage revealed changes in properties, compared to the initial state, both on the strips coated with Ni-P and the ones coated with Ni-P-Al2O3 composite. The samples have been studied before and after the heat treatment via Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), Energy Dispersive X-ray Analysis (EDX) and X-Ray Diffraction (XRD). The results show that untreated Ni-P layers exhibit strong corrosion resistance, while hardness and usage increase with heat treatment temperature, with a peak at 400 °C. Using suspended particles co-deposition, led to new types of layers, some with excellent hardness and usage properties. Corrosion resistance increase with heat treatment. Coating layers can be adjusted to the desired characteristics, by selecting proper parameters for the expected specific results.

Hot Dip Aluminizing of 9Cr-1Mo Steels and their Heat Treatment

2015 ◽  
Vol 830-831 ◽  
pp. 143-146
Author(s):  
Jalpa Patel ◽  
Prashanth Huilgol ◽  
Nirav Jamnapura ◽  
K. Udaya Bhat
Keyword(s):  
Electron Microscopy ◽  
Heat Treatment ◽  
Solid Solution ◽  
Reaction Layer ◽  
Treatment Duration ◽  
Substrate Material ◽  
X Ray ◽  
Heat Treated ◽  
Heat Treatment Duration ◽  
Scanning Electron

Coupons of 9Cr-1Mo steels of type SA 387 Grade 9 class 2 were hot dip aluminized using Al bath at a temperature of 700 °C for 30 seconds. The samples were further heat treated at 750 °C for durations of 1, 3 and 5 hours, respectively. The samples were characterized using X-ray diffractometry, scanning electron microscopy and energy dispersive spectroscopy. The investigation showed that as coated samples contain an aluminum top coat, a reaction layer and substrate material. Within the reaction layer, two distinct regions corresponding to Fe2Al5 and Fe4Al13 were identified. Chromium up to 2 at% was observed. After heat treatment Al coat was not existing. Two distinct layers, corresponding to a thick Fe2Al5 and a thin FeAl were observed at shorter heat treatment duration. Under longer heat treatment durations, multiple phases, namely, Fe2Al5, FeAl, Fe3Al and solid solution of Al in Fe were observed.

Nanostructure evolution and properties of two-phase nc-Ti(C, N)/a-(C, CNx) nanocomposites by high-resolution transmission electron microscopy, x-ray photoelectron spectroscopy, and Raman spectroscopy

2007 ◽  
Vol 22 (9) ◽  
pp. 2460-2469 ◽  
Author(s):  
Y.H. Lu ◽  
Y.G. Shen
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Solid Solution ◽  
Transmission Electron Microscopy ◽  
Raman Spectroscopy ◽  
Photoelectron Spectroscopy ◽  
Atomic Ratio ◽  
Two Phase ◽  
X Ray ◽  
Transmission Electron

High-resolution transmission electron microscopy, x-ray photoelectron spectroscopy (XPS), and Raman spectroscopy were used to study phase configuration and nanostructure evolutions of Ti–Cx–Ny thin films with different amounts of C incorporation. It was found that the atomic ratio of (C + N)/Ti played a crucial role in phase configuration and nanostructure evolutions as well as mechanical behaviors. When the ratio was less than one unit, a nanocrystalline (nc-) Ti(C, N) solid solution was formed by way of dissolution of C into TiN lattice. When this dissolution reached saturation, precipitation of a small amount of amorphous (a-) C phase along nc-Ti(C, N) grains was followed with more C incorporation. Further increase of C content (up to ∼19 at.% C) made the amorphous phase fully wet nanocrystallites, which resulted in the formation of two-phase nanocomposite thin films with microstructures comprising of ∼5 nm nc-Ti(C,N) crystallites separated by ∼0.5 nm a-(C, CNx) phase. Thicker amorphous walls and smaller sized grains were followed when the C content was further increased, accompanying with the formation of some disorders and defects in nc-grains and amorphous matrices. When the C content was increased to ∼48 at.%, 1–3 nm nanocrystallites with an average size of ∼2 nm were embedded into amorphous matrices. Both microhardness and residual compressive stress values were increased with increase of the atomic ratio in solid solution thin films when the atomic ratio value was less than one unit. Their maximums were obtained at stiochiometry nc-Ti(C,N) solid solution. Enhancement of hardness values was attributed to solid solution effect.

Effects of Solution Treatment on the Microstructure and Properties of 7003 Aluminum Alloy

2010 ◽  
Vol 123-125 ◽  
pp. 1219-1222
Author(s):  
Xiao Ming Chen ◽  
Ren Guo Song
Keyword(s):  
Electron Microscopy ◽  
Solid Solution ◽  
Aluminum Alloy ◽  
Solution Treatment ◽  
Solution Temperature ◽  
X Ray ◽  
Microstructure And Properties ◽  
Solid Solution Treatment ◽  
Before And After ◽  
Scanning Electron

The microstructure and properties of 7003 aluminum alloy before and after aging under various solid solution treatment parameters have been studied by electronic tensile machine, scanning electron microscopy (SEM) and energy dispersive X-ray spectrometer (EDS). It’s showed that the strength decreased while the ductility increased with raising the solid solution temperature before aging; the strength decreased and then increased while the ductility increased and then decreased with increasing the solid solution time. The strength of 7003 aluminum alloy after aging were evidently higher than those before aging, and the samples solutioned at 743 K for 70 min were of the best mechanical properties with YS=286 MPa, UTS=345 MPa, E=15.5%, which are higher than those of the original alloy by 2.1%, 1.5% and 29.1% respectively. Hence 743 K/70 min is one of the best solid solution regimes.

Microstructural and Dielectrical Properties for Ceramics and Thin Films of the xPbTiO3-(1−x)SrTiO3 Solid Solution

2001 ◽  
Vol 688 ◽  
Author(s):  
E. Martínez ◽  
A. Fundora ◽  
O. Blanco ◽  
S. García ◽  
E. Heredia ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Solid Solution ◽  
Scanning Electron Microscopy ◽  
Dielectric Properties ◽  
Integrated Circuit ◽  
X Ray Diffraction ◽  
X Ray ◽  
Analysis Technique ◽  
Dielectrical Properties ◽  
Scanning Electron

AbstractSrTiO3 and PbTiO3 perovskites are combined to form the xPbTiO3-(1−x)SrTiO3 (PST) solid solution. The effect of the PbTiO3 content on the microstructural and dielectric properties is studied for different compositions (x=0.1,0.3,0.5,0.7, and 0.9). Microstructural features of the PST system are studied by X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM) techniques. Electrical properties are studied by the thermoelectric analysis technique at both fixed frequency and varying frequency to study the behavior of the dielectric constant and dielectric loss.Films of 0.5PbTiO3-0.5SrTiO3 (PST50) have been obtained by RF ion sputtering on different substrates. We investigate the relation between the crystalline structure and the dielectric properties of PST50 films deposited on different metallic films. Scanning Electron Microscopy (SEM) and X-Ray Diffraction were used for the structural analysis of the PST50/TiN/Si and PST50/RuO2/TiN /Si systems. The dielectric properties of the PST50 films were measured for TiN/PST50/TiN/Si, and RuO2/PST50/RuO2/TiN/Si capacitors and the results were correlated to the structure and composition. The charge storage capabilities of the PST50 films are evaluated for possible application in integrated circuit technology.

Nanoscale stability of two- and three-dimensional defects in Cu/Ag–Mo thin films

2017 ◽  
Vol 50 (1) ◽  
pp. 152-171 ◽  
Author(s):  
G. Csiszár ◽  
A. Makvandi ◽  
E. J. Mittemeijer
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
Texture Evolution ◽  
Three Dimensional ◽  
X Ray Diffraction ◽  
Twin Boundaries ◽  
X Ray ◽  
Transmission Electron ◽  
Before And After ◽  
Columnar Grain

A comparative study of the thermal stability of nanocrystalline Cu–Mo and Ag–Mo alloy thin films was performed. Phase decomposition, texture evolution, grain coarsening and segregation of Mo to planar faults of both films, before and after heat treatment, were studied using X-ray diffraction measurements and (high-resolution) transmission electron microscopy with energy-dispersive spectroscopy. The evolution of stress/strain in the thin films was traced by in situ X-ray diffraction measurements. The segregation of Mo solute atoms at twin boundaries in both films already occurs at room temperature. By first segregation and then precipitation of Mo atoms at grain boundaries, the columnar grain microstructure is preserved upon heat treatment. In the case of Ag–Mo thin films, the twin boundaries are also more or less preserved at elevated temperature, but in the case of Cu–Mo thin films the annihilation of twin boundaries takes place concomitantly with the precipitation of Mo in columnar grain interiors.

Fabrication of Functionally Gradient Ultrafine-Grained WC-Co Composites

2013 ◽  
Vol 423-426 ◽  
pp. 885-889 ◽  
Author(s):  
Yi Gao Yuan ◽  
Jian Jun Ding ◽  
Yan Kun Wang ◽  
Wei Quan Sun
Keyword(s):  
Electron Microscopy ◽  
Heat Treatment ◽  
Scanning Electron Microscopy ◽  
X Ray Diffraction ◽  
X Ray ◽  
Grain Sizes ◽  
Functionally Gradient ◽  
Ultrafine Grained ◽  
Before And After ◽  
Scanning Electron

The carburizing heat treatments of ultrafine-grained WC-Co composites with sub-stoichiometric carbon content were carried out, and the microstructures of ultrafine-grained WC-Co carbides before and after treated were characterized by means of scanning electron microscopy and X-ray diffraction. The results show that the functionally gradient ultrafine-grained WC-Co hardmetals with a Co depleted surface and not comprising the η-phase can be fabricated by carburizing heat treatment. After heat treatment, WC grain sizes in materials are still at the ultrafine grade.

Palladium Nanowire Thin Films via Template Growth

2003 ◽  
Vol 775 ◽  
Author(s):  
Donghai Wang ◽  
David T. Johnson ◽  
Byron F. McCaughey ◽  
J. Eric Hampsey ◽  
Jibao He ◽  
...  
Keyword(s):  
Thin Film ◽  
Electron Microscopy ◽  
Thin Films ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Conductive Substrate ◽  
Palladium Nanowires ◽  
Efficient Route ◽  
Silica Thin Film

AbstractPalladium nanowires have been electrodeposited into mesoporous silica thin film templates. Palladium continually grows and fills silica mesopores starting from a bottom conductive substrate, providing a ready and efficient route to fabricate a macroscopic palladium nanowire thin films for potentially use in fuel cells, electrodes, sensors, and other applications. X-ray diffraction (XRD) and transmission electron microscopy (TEM) indicate it is possible to create different nanowire morphology such as bundles and swirling mesostructure based on the template pore structure.

scholarly journals Phase Relations in the ZrO2-MgO-FeOx System: Experimental Data and Assessment of Thermodynamic Parameters

2021 ◽  
Author(s):  
Ivan Saenko ◽  
O. Fabrichnaya
Keyword(s):  
Electron Microscopy ◽  
Experimental Data ◽  
Solid Solution ◽  
Thermodynamic Parameters ◽  
Spinel Phase ◽  
Experimental Investigations ◽  
X Ray ◽  
Heat Treated ◽  
Preliminary Phase ◽  
Scanning Electron

AbstractThermodynamic parameters were assessed for the MgO–FeOx system and combined with already available descriptions of ZrO2-FeOx and ZrO2-MgO systems to calculate preliminary phase diagrams for planning experimental investigations. Samples of selected compositions were heat treated at 1523, 1673 and 1873 K and characterized using x-ray and scanning electron microscopy combined with energy dispersive x-ray spectroscopy (SEM/EDX). Experiments indicated extension of cubic ZrO2 solid solution into the ternary system at 1873 K (75 mol.% ZrO2, 10 mol.% FeOx and 15 mol.% MgO) and limited solubility of 4 mol.% ZrO2 in spinel phase. Based on the obtained results thermodynamic parameters of C-ZrO2 and spinel phase were optimized.

Studies on Magnetron-Sputtered NiO/Si3N4 Thin Films

2018 ◽  
Vol 17 (03) ◽  
pp. 1760039
Author(s):  
K. M. Dhanisha ◽  
M. Manoj Christopher ◽  
M. Abinaya ◽  
P. Deepak Raj ◽  
M. Sridharan
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Smooth Surface ◽  
Deposition Time ◽  
Si Substrate ◽  
X Ray ◽  
Coating Time ◽  
Deposited Films ◽  
Nio Films ◽  
Scanning Electron

The present work deals with NiO/Si3N4 layers formed by depositing nickel oxide (NiO) thin films over silicon nitrate (Si3N[Formula: see text] thin films. NiO films were coated on Si3N4-coated Si substrate using magnetron sputtering method by changing duration of coating time and were analyzed using X-ray diffractometer, field emission-scanning electron microscopy, UV–Vis spectrophotometer and four-point probe method to study the influence of thickness on physical properties. Crystallinity of the deposited films increases with increase in thickness. All films exhibited spherical-like structure, and with increase in deposition time, grains are coalesced to form smooth surface morphology. The optical bandgap of NiO films was found to decrease from 3.31[Formula: see text]eV to 3.22[Formula: see text]eV with upsurge in the thickness. The film deposited for 30[Formula: see text]min exhibits temperature coefficient resistance of [Formula: see text]1.77%/[Formula: see text]C as measured at 80[Formula: see text]C.

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