Investigation of silicon grain structure and electrical characteristics of TFTs fabricated using different crystallized silicon films by atmospheric pressure micro-thermal-plasma-jet irradiation
2014 ◽
Vol 53
(3S2)
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pp. 03DG02
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2012 ◽
Vol 51
(2S)
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pp. 02BH05
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2017 ◽
Vol 226
(13)
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pp. 2965-2977
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2014 ◽
Vol 33
(6)
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pp. 627-633
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2019 ◽
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