Ta2O5/SiO2 Multicomponent Dielectrics for Amorphous Oxide TFTs

Co-sputtering of SiO2 and high-κ Ta2O5 was used to make multicomponent gate dielectric stacks for In-Ga-Zn-O thin-film transistors (IGZO TFTs) under an overall low thermal budget (T = 150 °C). Characterization of the multicomponent layers and of the TFTs working characteristics (employing them) was performed in terms of static performance, reliability, and stability to understand the role of the incorporation of the high-κ material in the gate dielectric stack. It is shown that inherent disadvantages of the high-κ material, such as poorer interface properties and poor gate insulation, can be counterbalanced by inclusion of SiO2 both mixed with Ta2O5 and as thin interfacial layers. A stack comprising a (Ta2O5)x(SiO2)100 − x film with x = 69 and a thin SiO2 film at the interface with IGZO resulted in the best performing TFTs, with field-effect mobility (µFE) ≈ 16 cm2·V−1·s−1, subthreshold slope (SS) ≈ 0.15 V/dec and on/off ratio exceeding 107. Anomalous Vth shifts were observed during positive gate bias stress (PGBS), followed by very slow recoveries (time constant exceeding 8 × 105 s), and analysis of the stress and recovery processes for the different gate dielectric stacks showed that the relevant mechanism is not dominated by the interfaces but seems to be related to the migration of charged species in the dielectric. The incorporation of additional SiO2 layers into the gate dielectric stack is shown to effectively counterbalance this anomalous shift. This multilayered gate dielectric stack approach is in line with both the large area and the flexible electronics needs, yielding reliable devices with performance suitable for successful integration on new electronic applications.

Terrestrial evidence for the Lilliput effect across the Cretaceous-Paleogene (K-Pg) boundary

Recent research has demonstrated that the Lilliput effect (reduction of body size in response to a mass extinction) affected all trophic levels in the marine realm following the Cretaceous-Paleogene (K-Pg) event. However, it is unclear if this size change was strictly a marine signal, or a global phenomenon that also affected continental ecosystems. Herein we present the results of an ichnological proxy for body size of soil-dwelling insects across the K-Pg boundary in Big Bend National Park, Texas, U.S.A. Quantitative efforts focused on Naktodemasis isp., which are characterized as unbranching burrows composed of ellipsoidal packets of backfill menisci. These traces were likely produced by beetle larvae or cicada nymphs based on previous comparison with structures generated in modern soils and laboratory experiments. As an approximation for the body size of the subterranean insects, this dataset indicates that a smaller Naktodemasis diameter (DN) is statistically correlated (α < 0.05) with several edaphic factors including poor drainage and weak development (Entisols). Additionally, the DN in strata immediately superjacent to the highest Cretaceous-specific taxa is smaller by 23% (5.6 ± 1.8 mm) in comparison to DN within the subjacent Cretaceous interval (7.3 ± 2.7 mm). This abrupt shift occurs in a well-drained Inceptisol, and cannot be attributed to facies changes, drainage, or paleosol maturity. Furthermore, a reduced DN (6.6 ± 2.3 mm) persists above this anomalous shift for at least 20 stratigraphic meters within chron 29r. The cause for this negative response in body size within soil-dwelling biota may be attributed to plant-community shifts in taxonomic composition and ecological strategies, which would have caused fundamental alterations to the diet of the herbivorous, subterranean insects. This study provides empirical evidence that the Lilliput effect was not restricted to marine environments during the aftermath of the K-Pg event.