planar analysis
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2018 ◽  
Author(s):  
Sang Hoon Lee ◽  
Jeff Blackwood ◽  
Stacey Stone ◽  
Michael Schmidt ◽  
Mark Williamson ◽  
...  

Abstract The cross-sectional and planar analysis of current generation 3D device structures can be analyzed using a single Focused Ion Beam (FIB) mill. This is achieved using a diagonal milling technique that exposes a multilayer planar surface as well as the cross-section. this provides image data allowing for an efficient method to monitor the fabrication process and find device design errors. This process saves tremendous sample-to-data time, decreasing it from days to hours while still providing precise defect and structure data.



2017 ◽  
Vol 182 ◽  
pp. 368-391 ◽  
Author(s):  
A.R. Zainal Abidin ◽  
B.A. Izzuddin ◽  
F. Lancaster


2017 ◽  
Vol 12 (2) ◽  
pp. 219-247 ◽  
Author(s):  
Alan Freed ◽  
Veysel Erel ◽  
Michael Moreno


2014 ◽  
Vol 103 ◽  
pp. 303-315 ◽  
Author(s):  
Si-Wei Liu ◽  
Yao-Peng Liu ◽  
Siu-Lai Chan


Author(s):  
G.M. O’Halloran ◽  
Arjan van Ijzerloo ◽  
Rene Rongen ◽  
Frank Zachariasse

Abstract This paper presents a quick, reliable, and fully quantitative method of measuring the intermetallic coverage of copper to aluminium bonding at time zero and post reliability stressing. This method is currently used in select manufacturing quality control processes, as well as during product release procedures. By applying this measurement method after various life-tests, it has been possible to collect information on degradation in the copper aluminium system which is currently being used to make a model of the corrosion mechanism in the copper aluminium system.



2012 ◽  
Vol 39 (8) ◽  
pp. 5040-5049 ◽  
Author(s):  
Pablo Carrasco ◽  
Núria Jornet ◽  
Artur Latorre ◽  
Teresa Eudaldo ◽  
Agustí Ruiz ◽  
...  


2011 ◽  
Vol 22 (2) ◽  
pp. 241
Author(s):  
Filipa João ◽  
Sandra Amado ◽  
António Veloso ◽  
Paulo Armada-da-Silva ◽  
Ana C. Maurício


2010 ◽  
Vol 21 (6) ◽  
Author(s):  
Filipa Joãoa ◽  
Sandra Amadoa ◽  
Antoniò Velosoa ◽  
Paulo Armada-da-Silvaa ◽  
Ana C. Maurício


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