Nanoscale quantitative characterization of 22nm CMOS transistor using Scanning Transmission Electron Microscopy (STEM)
2016 ◽
pp. 584-585
2014 ◽
Vol 20
(S3)
◽
pp. 498-499
◽
2002 ◽
Vol 15
(1)
◽
pp. 1-5
◽
2005 ◽
Vol 67
(3-4)
◽
pp. 126-140
◽