33.4:Distinguished Paper: Oxide Semiconductor Thin-Film Transistors Using Oxygen Barriers and a Wet-Chemical Back-Channel Etch Step

SID Symposium Digest of Technical Papers ◽

10.1002/j.2168-0159.2014.tb00124.x ◽

2014 ◽

Vol 45 (1) ◽

pp. 476-479 ◽

Author(s):

Marcus Herrmann ◽

Norbert Fruehauf

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Oxide Semiconductor ◽

Wet Chemical ◽

Semiconductor Thin Film ◽

Oxygen Barriers

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Review Article: Atomic layer deposition for oxide semiconductor thin film transistors: Advances in research and development

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5047237 ◽

2018 ◽

Vol 36 (6) ◽

pp. 060801 ◽

Author(s):

Jiazhen Sheng ◽

Jung-Hoon Lee ◽

Wan-Ho Choi ◽

TaeHyun Hong ◽

MinJung Kim ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Research And Development ◽

Thin Film Transistors ◽

Atomic Layer ◽

Review Article ◽

Oxide Semiconductor ◽

Layer Deposition ◽

Semiconductor Thin Film

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Negative-Bias Light Stress Instability Mechanisms of the Oxide-Semiconductor Thin-Film Transistors Using In–Ga-O Channel Layers Deposited With Different Oxygen Partial Pressures

IEEE Transactions on Electron Devices ◽

10.1109/ted.2013.2288264 ◽

2014 ◽

Vol 61 (1) ◽

pp. 79-86 ◽

Author(s):

Jun Yong Bak ◽

Shinhyuk Yang ◽

Ho-Jun Ryu ◽

Sang Hee Ko Park ◽

Chi Sun Hwang ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Light Stress ◽

Oxide Semiconductor ◽

Negative Bias ◽

Partial Pressures ◽

Semiconductor Thin Film

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Enhanced Phase Stability and Carrier Suppression of Ternary Cation-Based Amorphous Oxide Semiconductor Thin Film Transistors

ECS Meeting Abstracts ◽

10.1149/ma2021-01511999mtgabs ◽

2021 ◽

Vol MA2021-01 (51) ◽

pp. 1999-1999

Author(s):

Mingyuan Liu ◽

Han Wook Song ◽

Sunghwan Lee

Keyword(s):

Thin Film ◽

Phase Stability ◽

Thin Film Transistors ◽

Oxide Semiconductor ◽

Amorphous Oxide ◽

Amorphous Oxide Semiconductor ◽

Semiconductor Thin Film

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Superconcentrated aqueous electrolyte and UV curable polymer composite as gate dielectric for high-performance oxide semiconductor thin-film transistors

Applied Physics Letters ◽

10.1063/1.5093741 ◽

2019 ◽

Vol 114 (17) ◽

pp. 172903 ◽

Author(s):

Eun Goo Lee ◽

Jintaek Park ◽

Sung-Eun Lee ◽

Junhee Lee ◽

Changik Im ◽

...

Keyword(s):

Thin Film ◽

Polymer Composite ◽

Thin Film Transistors ◽

High Performance ◽

Gate Dielectric ◽

Aqueous Electrolyte ◽

Oxide Semiconductor ◽

Semiconductor Thin Film

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Solution Processed High-k Lanthanide Oxides for Low Voltage Driven Transparent Oxide Semiconductor Thin Film Transistors

ECS Transactions ◽

10.1149/1.3572327 ◽

2019 ◽

Vol 35 (4) ◽

pp. 901-908 ◽

Author(s):

Sungho Choi ◽

Byung-Yoon Park ◽

Mi Jang ◽

Sunho Jeong ◽

Ji-Yoon Lee ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Low Voltage ◽

Oxide Semiconductor ◽

Lanthanide Oxides ◽

Solution Processed ◽

High K ◽

Transparent Oxide ◽

Semiconductor Thin Film ◽

Transparent Oxide Semiconductor

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Solution Processed High-k Lanthanide Oxides for Low Voltage Driven Transparent Oxide Semiconductor Thin Film Transistors

ECS Meeting Abstracts ◽

10.1149/ma2011-01/22/1377 ◽

2011 ◽

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Low Voltage ◽

Oxide Semiconductor ◽

Lanthanide Oxides ◽

Solution Processed ◽

High K ◽

Transparent Oxide ◽

Semiconductor Thin Film ◽

Transparent Oxide Semiconductor

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The effect of surface energy characterized functional groups of self-assembled monolayers for enhancing the electrical stability of oxide semiconductor thin film transistors

Nanotechnology ◽

10.1088/1361-6528/abad5e ◽

2020 ◽

Vol 31 (47) ◽

pp. 475203

Author(s):

Sung-Eun Lee ◽

Hyun-Jae Na ◽

Eun Goo Lee ◽

Jintaek Park ◽

Kyungho Kim ◽

...

Keyword(s):

Thin Film ◽

Surface Energy ◽

Functional Groups ◽

Thin Film Transistors ◽

Oxide Semiconductor ◽

Self Assembled Monolayers ◽

Electrical Stability ◽

Assembled Monolayers ◽

Semiconductor Thin Film ◽

Effect Of Surface

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P-1.13: Influence of the Source/Drain Material on Oxide Semiconductor Thin Film Transistors

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.12781 ◽

2018 ◽

Vol 49 ◽

pp. 557-560

Author(s):

Yi Liang ◽

Dedong Han ◽

Wen Yu ◽

Junchen Dong ◽

Huijin Li ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Oxide Semiconductor ◽

Semiconductor Thin Film

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Oxide semiconductor thin-film transistors with nano-splitting and field-surrounding channels fabricated by subwavelength photolithography

Journal of Physics Materials ◽

10.1088/2515-7639/ab5f35 ◽

2019 ◽

Vol 3 (1) ◽

pp. 015010

Author(s):

Kairong Huang ◽

Sujuan Hu ◽

Jin Wu ◽

Chuan Liu

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Oxide Semiconductor ◽

Semiconductor Thin Film

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(Invited) Channel Width and Channel Length Dependencies in Amorphous-Oxide-Semiconductor Thin-Film Transistors: From a Device Structure Perspective

ECS Transactions ◽

10.1149/05008.0151ecst ◽

2013 ◽

Vol 50 (8) ◽

pp. 151-159 ◽

Author(s):

M. Mativenga ◽

J. K. Um ◽

R. Mruthyunjaya ◽

J. H. Chang ◽

G. N. Heiler ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Channel Length ◽

Channel Width ◽

Oxide Semiconductor ◽

Device Structure ◽

Amorphous Oxide ◽

Amorphous Oxide Semiconductor ◽

Semiconductor Thin Film

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