27.2:
Invited Paper:
Towards High Performance Gate Electrodes: Resistance Reduction in Molybdenum Films by Seed Layer Application
Keyword(s):
Keyword(s):
2018 ◽
Vol 2018
(1)
◽
pp. 000270-000276
◽
Keyword(s):
2013 ◽
Vol 9
(6)
◽
pp. 741-746
◽