A Study on Improving Polishing Process Effectiveness for Silicon Reclaim Wafer

2013 ◽  
pp. 837-843
Author(s):  
Chia-Pao Chang ◽  
Wei-Ling Wang ◽  
Yung-Ching Kuo
Keyword(s):  
Polishing Process

Polishing process effect on the image of dispersed precipitates

1984 ◽  
Vol 42 ◽  
pp. 534-535
Author(s):  
C.T. Hu ◽  
C.W. Allen
Keyword(s):  
Matrix Material ◽  
Specimen Preparation ◽  
Second Phase ◽  
Precipitate Particle ◽  
Polishing Process ◽  
Second Phase Particles ◽  
The Matrix ◽  
Surface Profiles ◽  
Thinning Process

One important problem in determination of precipitate particle size is the effect of preferential thinning during TEM specimen preparation. Figure 1a schematically represents the original polydispersed Ni3Al precipitates in the Ni rich matrix. The three possible type surface profiles of TEM specimens, which result after electrolytic thinning process are illustrated in Figure 1b. c. & d. These various surface profiles could be produced by using different polishing electrolytes and conditions (i.e. temperature and electric current). The matrix-preferential-etching process causes the matrix material to be attacked much more rapidly than the second phase particles. Figure 1b indicated the result. The nonpreferential and precipitate-preferential-etching results are shown in Figures 1c and 1d respectively.

An Improved Method for the Preparation and TEM Examination of Sharp Pointed Tips used in APFIM and STM

1990 ◽  
Vol 48 (2) ◽  
pp. 102-103
Author(s):  
E.A. Fischione ◽  
P.E. Fischione ◽  
J.J. Haugh ◽  
M.G. Burke
Keyword(s):  
Atom Probe ◽  
Preparation Process ◽  
Improved Method ◽  
Ion Milling ◽  
Polishing Process ◽  
Probe Field ◽  
Scanning Tunnelling ◽  
Stm Tips ◽  
Tunnelling Microscopy ◽  
Ion Microscopy

A common requirement for both Atom Probe Field-Ion Microscopy (APFIM) and Scanning Tunnelling Microscopy (STM) is a sharp pointed tip for use as either the specimen (APFIM) or the probe (STM). Traditionally, tips have been prepared by either chemical or electropolishing techniques. Recently, ion-milling has been successfully employed in the production of APFIM tips [1]. Conventional electropolishing techniques are applicable to a wide variety of metals, but generally require careful manual adjustments during the polishing process and may also be time-consuming. In order to reduce the time and effort involved in the preparation process, a compact, self-contained polishing unit has been developed. This system is based upon the conventional two-stage electropolishing technique in which the specimen/tip blank is first locally thinned or “necked”, and subsequently electropolished until separation occurs.[2,3] The result of this process is the production of two APFIM or STM tips. A mechanized polishing unit that provides these functions while automatically maintaining alignment has been designed and developed.

scholarly journals Ultrasonic dispersion method used in glass polishing experiment

2021 ◽  
Vol 13 (4) ◽  
pp. 168781402110118
Author(s):  
Zenan Chu ◽  
Tao Wang ◽  
Qiang He ◽  
Kai Zhao
Keyword(s):  
Surface Roughness ◽  
Rare Earth ◽  
Surface Morphology ◽  
Ultrasonic Method ◽  
Average Surface Roughness ◽  
Polishing Process ◽  
Ultrasonic Dispersion ◽  
Processing Efficiency ◽  
Average Surface ◽  
Evaluation Indexes

To solve the problems of low processing efficiency and poor glass surface quality when using rare earth polishing powder to grind super-hard K9 glass. The potential, phase structure, surface morphology, and particle size distribution of the nano-rare earth polishing powder were characterized. Compare the evaluation indexes such as polishing efficiency, surface morphology, and contact angle after the polishing process is changed. The results of the comparative study show that the average surface roughness of the glass after heating ultrasonic polishing process is 0.9064 nm, the polishing rate reaches 0.748 μm/min, the average surface roughness of the glass without heating ultrasonic polishing process is 1.3175 nm, and the polishing rate reaches 0.586 μm/min, the ultrasonic assisted polishing process is superior to the conventional polishing process. The heating ultrasonic method provides experimental basis for precise and rapid processing.

scholarly journals Development of a New Finishing Process Combining a Fixed Abrasive Polishing with Magnetic Abrasive Finishing Process

Machines ◽  
2021 ◽  
Vol 9 (4) ◽  
pp. 81
Author(s):  
Yanhua Zou ◽  
Ryunosuke Satou ◽  
Ozora Yamazaki ◽  
Huijun Xie
Keyword(s):  
Alumina Ceramic ◽  
Ceramic Plate ◽  
Polishing Process ◽  
High Quality ◽  
Influence Of Process Parameters ◽  
Magnetic Abrasive Finishing ◽  
Nano Scale ◽  
Finishing Process ◽  
Abrasive Finishing ◽  
Fixed Abrasive

High quality, highly efficient finishing processes are required for finishing difficult-to-machine materials. Magnetic abrasive finishing (MAF) process is a finishing method that can obtain a high accuracy surface using fine magnetic particles and abrasive particles, but has poor finishing efficiency. On the contrary, fixed abrasive polishing (FAP) is a polishing process can obtain high material removal efficiency but often cannot provide a high-quality surface at the nano-scale. Therefore, this work proposes a new finishing process, which combines the magnetic abrasive finishing process and the fixed abrasive polishing process (MAF-FAP). To verify the proposed methodology, a finishing device was developed and finishing experiments on alumina ceramic plates were performed. Furthermore, the mechanism of the MAF-FAP process was investigated. In addition, the influence of process parameters on finishing characteristics is discussed. According to the experimental results, this process can achieve high-efficiency finishing of brittle hard materials (alumina ceramics) and can obtain nano-scale surfaces. The surface roughness of the alumina ceramic plate is improved from 202.11 nm Ra to 3.67 nm Ra within 30 min.

Control of mid-spatial frequency errors considering the pad groove feature in smoothing polishing process

2014 ◽  
Vol 53 (28) ◽  
pp. 6332 ◽  
Author(s):  
Xuqing Nie ◽  
Shengyi Li ◽  
Hao Hu ◽  
Qi Li
Keyword(s):  
Spatial Frequency ◽  
Polishing Process

Application of Taguchi and Response Surface Methodologies for Surface Roughness in Rotary Tool Polishing Hardness Mould Steels

2011 ◽  
Vol 87 ◽  
pp. 82-89
Author(s):  
Potejanasak Potejana ◽  
Chakthong Thongchattu
Keyword(s):  
Surface Roughness ◽  
Response Surface ◽  
Laser Scanning ◽  
Cutting Speed ◽  
Optimal Level ◽  
Confocal Laser ◽  
Milling Machine ◽  
Cnc Milling ◽  
Polishing Process ◽  
Cnc Milling Machine

This research proposes a new application of 3-axis CNC milling machine for polishing the 60 HRC hardness steels. The rotary polishing tools are designed by refer to the end-mill ball nose’s design. The diamond powder are coated in rotary polishing tools by resinoid bonding method and concentrated in 4.4 karat/cm2. The Zig-milling tool paths are used to polish the hardness steel. After polishing, the confocal laser scanning microscope is used to analyze the arithmetic mean surface roughness of the hardness steels. The L12 orthogonal array of the Taguchi’s method is selected to conduct the matrix experiment to determine the optimal polishing process parameters. The diamond grit size and cutting speed of the rotary polishing tools, feed rate and step over of the tool path, the depth of polishing process penetration, and polishing time are used to study. The combination of the optimal level for each factor of the hardness steel polishing process are used to study again in the confirmation experiment. The predicted signal to noise ratio of smaller - the better under optimal condition are calculated by using the data from the experiment. The combination of the optimal level for each factor are used to study again in the confirmation experiment and the result show that polishing time was a dominant parameter for the surface roughness and the next was depth of penetration. The response surface design is then used to build the relationship between the input parameters and output responses. The experimental results show that the integrated approach does indeed find the optimal parameters that result in very good output responses in the rotary polishing tools polished hardness mould steel using CNC milling machine. The mean surface roughness of hardness steel polishing process is improved by the diamond rotary tools with the 3-axis CNC milling machine.

Basic experimental investigation of pulsed electrochemical mechanical polishing process

2009 ◽  
Vol 25 (7) ◽  
pp. 535-540 ◽  
Author(s):  
J. J. Yi ◽  
C. M. Chen ◽  
X. Q. Tian ◽  
B. Y. Ji
Keyword(s):  
Experimental Investigation ◽  
Mechanical Polishing ◽  
Polishing Process ◽  
Electrochemical Mechanical Polishing
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