Reactive Gas Glow Discharges

Diamond and Diamond-like Films and Coatings - NATO ASI Series ◽

10.1007/978-1-4684-5967-8_5 ◽

1991 ◽

pp. 73-95 ◽

Author(s):

J. W. Coburn

Keyword(s):

Glow Discharges ◽

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Sputtering Deposition of VO$lt;inf$gt;2$lt;/inf$gt; Film Using Plasma Emission Monitor as Reactive Gas Flow Rate Feedback Control

Journal of Inorganic Materials ◽

10.15541/jim20150302 ◽

2015 ◽

Vol 30 (11) ◽

pp. 1228 ◽

Author(s):

WANG Xiao ◽

YAN Lu ◽

LI Ying ◽

CAO Yun-Zhen

Keyword(s):

Feedback Control ◽

Flow Rate ◽

Gas Flow ◽

Plasma Emission ◽

Gas Flow Rate ◽

Sputtering Deposition ◽

Rate Feedback ◽

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EXPERIMENTAL STUDY OF THE EFFECT OF REACTIVE GAS INJECTION GEOMETRY IN ATMOSPHERIC PRESSURE INDUCTIVE PLASMA TORCH ON THE CHEMICAL EFFICIENCY

High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes ◽

10.1615/hightempmatproc.v13.i3-4.50 ◽

2009 ◽

Vol 13 (3-4) ◽

pp. 315-324 ◽

Author(s):

J. Degoulange ◽

D. Pelletier ◽

B. Bournonville ◽

G. Chichignoud ◽

Y. Delannoy ◽

...

Keyword(s):

Experimental Study ◽

Atmospheric Pressure ◽

Plasma Torch ◽

Gas Injection ◽

Chemical Efficiency ◽

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ABOUT ROTATIONAL TEMPERATURE MEASUREMENTS AND THERMODYNAMIC EQUILIBRIUM IN RF GLOW DISCHARGES

High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes ◽

10.1615/hightempmatproc.v3.i1.40 ◽

1999 ◽

Vol 3 (1) ◽

pp. 39-50

Author(s):

Spyros Stamou ◽

Dimitris Mataras ◽

Dimitrious E. Rapakoulias

Keyword(s):

Thermodynamic Equilibrium ◽

Rotational Temperature ◽

Temperature Measurements ◽

Glow Discharges

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2-D temperature fields in glow discharges measured with ultraviolet Filtered Rayleigh Scattering

10.2514/6.2000-375 ◽

2000 ◽

Author(s):

Azer Yalin ◽

Yuriy Ionikh ◽

Alexander Meshchanov ◽

Richard Miles

Keyword(s):

Rayleigh Scattering ◽

Temperature Fields ◽

Glow Discharges

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Bifurcation of RF Glow Discharges Between Two Forms of Existence

39th Plasmadynamics and Lasers Conference ◽

10.2514/6.2008-3793 ◽

2008 ◽

Author(s):

Sergey Surzhikov ◽

Joseph Shang

Keyword(s):

Glow Discharges

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PC system for improving the control of reactive gas dosage in sputtering processes for film deposition

Surface and Coatings Technology ◽

10.1016/0257-8972(93)90064-u ◽

1993 ◽

Vol 59 (1-3) ◽

pp. 110-112 ◽

Author(s):

G.N. Pedersen ◽

H. Jensen ◽

G. S∅rensen

Keyword(s):

Film Deposition ◽

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Five years of innovations in development of glow discharges generated in contact with liquids for spectrochemical elemental analysis by optical emission spectrometry

Analytica Chimica Acta ◽

10.1016/j.aca.2021.338399 ◽

2021 ◽

pp. 338399

Author(s):

Pawel Pohl ◽

Piotr Jamroz ◽

Krzysztof Greda ◽

Monika Gorska ◽

Anna Dzimitrowicz ◽

...

Keyword(s):

Elemental Analysis ◽

Optical Emission ◽

Optical Emission Spectrometry ◽

Emission Spectrometry ◽

Glow Discharges

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The growth of a multi-principal element (CoCrFeMnNi) oxynitride film by direct current magnetron sputtering using air as reactive gas

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2021.127433 ◽

2021 ◽

pp. 127433

Author(s):

G. Radnóczi ◽

R. Dedoncker ◽

G.Z. Radnóczi ◽

Zs. Czigány ◽

A. Sulyok ◽

...

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Principal Element ◽

Direct Current Magnetron Sputtering ◽

Oxynitride Film ◽

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Power dissipation in rf glow discharges

Vacuum ◽

10.1016/0042-207x(91)90072-q ◽

1991 ◽

Vol 42 (1-2) ◽

pp. 33-34 ◽

Author(s):

R Deltchev ◽

M Albert ◽

G Suchaneck ◽

K Schade

Keyword(s):

Power Dissipation ◽

Glow Discharges

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Microdischarge-assisted ignition of dielectric-barrier high-pressure glow discharges

Applied Physics Letters ◽

10.1063/1.2162676 ◽

2006 ◽

Vol 88 (2) ◽

pp. 021502 ◽

Author(s):

Jichul Shin ◽

Laxminarayan L. Raja

Keyword(s):

High Pressure ◽

Dielectric Barrier ◽

Glow Discharges

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