Sputtering Deposition of VO$lt;inf$gt;2$lt;/inf$gt; Film Using Plasma Emission Monitor as Reactive Gas Flow Rate Feedback Control
2015 ◽
Vol 30
(11)
◽
pp. 1228
◽
Keyword(s):
Gas Flow
◽
1966 ◽
Vol 31
(3)
◽
pp. 1152-1161
◽
1998 ◽
Vol 63
(6)
◽
pp. 881-898