Production of Active Species in Flowing Microwave Discharges for Iron Surface Treatment and Diamond Film Deposition

1993 ◽  
pp. 481-490
Author(s):  
A. Ricard ◽  
A. Gicquel ◽  
H. Malvos ◽  
H. Michel ◽  
S. Bordeleau ◽  
...  
Keyword(s):  
Surface Treatment ◽  
Diamond Film ◽  
Active Species ◽  
Film Deposition ◽  
Iron Surface ◽  
Microwave Discharges

The effect of surface treatment on the electrical properties of metal contacts to boron-doped homoepitaxial diamond film

1990 ◽  
Vol 11 (2) ◽  
pp. 100-102 ◽  
Author(s):  
S.A. Grot ◽  
G.S. Gildenblat ◽  
C.W. Hatfield ◽  
C.R. Wronski ◽  
A.R. Badzian ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Surface Treatment ◽  
Diamond Film ◽  
Metal Contacts ◽  
Boron Doped ◽  
Effect Of Surface

scholarly journals MAGNETIC FIELD ASSISTED MICROWAVE PLASMA AND LARGE AREA DIAMOND FILM DEPOSITION

1990 ◽  
Vol 39 (10) ◽  
pp. 1635
Author(s):  
SONG RU-AN ◽  
CHENG XIAN-AN ◽  
ZHOU ZHONG-YI
Keyword(s):  
Magnetic Field ◽  
Diamond Film ◽  
Microwave Plasma ◽  
Film Deposition ◽  
Large Area
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