Silicon pressure sensor integrates resonant strain gauge on diaphragm
1990 ◽
Vol 21
(1-3)
◽
pp. 146-150
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2019 ◽
Vol 139
(4)
◽
pp. 63-68
Keyword(s):
1989 ◽
Vol 25
(5)
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pp. 524-530
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1990 ◽
Vol 23
(1-3)
◽
pp. 1007-1010
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2018 ◽
Vol 24
(7)
◽
pp. 2969-2981
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Keyword(s):
2013 ◽
Vol 562-565
◽
pp. 394-397
2020 ◽
Vol 2
(3)
◽
pp. 103-107